JP2013538464A - 太陽電池及びその製造方法 - Google Patents
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 28
- 230000004888 barrier function Effects 0.000 claims abstract description 169
- 239000000758 substrate Substances 0.000 claims abstract description 61
- 238000000034 method Methods 0.000 claims abstract description 56
- 238000006243 chemical reaction Methods 0.000 claims abstract description 43
- 230000008569 process Effects 0.000 claims description 38
- 229910052751 metal Inorganic materials 0.000 claims description 35
- 239000002184 metal Substances 0.000 claims description 35
- 230000031700 light absorption Effects 0.000 claims description 23
- 239000000463 material Substances 0.000 claims description 17
- 238000004544 sputter deposition Methods 0.000 claims description 11
- 238000009713 electroplating Methods 0.000 claims description 7
- 230000003647 oxidation Effects 0.000 claims description 5
- 238000007254 oxidation reaction Methods 0.000 claims description 5
- 230000001590 oxidative effect Effects 0.000 claims description 5
- 238000007745 plasma electrolytic oxidation reaction Methods 0.000 claims description 5
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 4
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims description 4
- 239000000395 magnesium oxide Substances 0.000 claims description 4
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims description 4
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 claims description 4
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 4
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 4
- 229910001930 tungsten oxide Inorganic materials 0.000 claims description 4
- 239000012535 impurity Substances 0.000 abstract description 6
- 230000007480 spreading Effects 0.000 abstract description 3
- 238000003892 spreading Methods 0.000 abstract description 3
- 239000011148 porous material Substances 0.000 abstract 1
- 150000001875 compounds Chemical class 0.000 description 12
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 238000001704 evaporation Methods 0.000 description 5
- 229910052733 gallium Inorganic materials 0.000 description 5
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- 229910052738 indium Inorganic materials 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000007517 polishing process Methods 0.000 description 3
- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- KTSFMFGEAAANTF-UHFFFAOYSA-N [Cu].[Se].[Se].[In] Chemical compound [Cu].[Se].[Se].[In] KTSFMFGEAAANTF-UHFFFAOYSA-N 0.000 description 2
- 229910052980 cadmium sulfide Inorganic materials 0.000 description 2
- 238000000224 chemical solution deposition Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 239000011669 selenium Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- -1 CGS compound Chemical class 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- YNLHHZNOLUDEKQ-UHFFFAOYSA-N copper;selanylidenegallium Chemical compound [Cu].[Se]=[Ga] YNLHHZNOLUDEKQ-UHFFFAOYSA-N 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000011133 lead Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
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- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
- H01L31/0392—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
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- H01L31/03923—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate including AIBIIICVI compound materials, e.g. CIS, CIGS
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- H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
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Abstract
【解決手段】本発明に係る太陽電池は、支持基板、前記支持基板の上に配置されるバリアー層、及び前記バリアー層の上に配置される光電変換部を含み、前記バリアー層は互いに異なる気孔度を有する第1バリアー層及び第2バリアー層を含む。
【選択図】図1
Description
Claims (17)
- 支持基板と、
前記支持基板の上に配置されるバリアー層と、
前記バリアー層の上に配置される光電変換部と、を含み、
前記バリアー層は、互いに異なる気孔度を有する第1バリアー層及び第2バリアー層を含むことを特徴とする太陽電池。 - 前記支持基板の上に配置される金属層をさらに含むことを特徴とする請求項1に記載の太陽電池。
- 前記第1バリアー層は、前記支持基板の上に配置され、
前記第2バリアー層は、前記第1バリアー層の上に配置されることを特徴とする請求項1に記載の太陽電池。 - 前記第2バリアー層の気孔度は、前記第1バリアー層の気孔度より高いことを特徴とする請求項3に記載の太陽電池。
- 前記第1バリアー層の気孔度は、10%であることを特徴とする請求項4に記載の太陽電池。
- 前記第2バリアー層の気孔度は、20%乃至40%であることを特徴とする請求項4に記載の太陽電池。
- 前記第1バリアー層及び前記第2バリアー層は、同一の物質を含むことを特徴とする請求項1に記載の太陽電池。
- 前記第1バリアー層に対する前記第2バリアー層の厚さ比率は、0.1乃至0.3であることを特徴とする請求項1に記載の太陽電池。
- 前記バリアー層の厚さは5μm以下であることを特徴とする請求項1に記載の太陽電池。
- 前記バリアー層は、酸化物を含むことを特徴とする請求項1に記載の太陽電池。
- 前記バリアー層は、アルミニウム酸化物、チタニウム酸化物、マグネシウム酸化物、タングステン酸化物、及びこれらの組み合わせからなる群から選択された物質を少なくとも1つ以上含むことを特徴とする請求項10に記載の太陽電池。
- 前記光電変換部は、
前記バリアー層の上に配置される第1電極層と、
前記第1電極層の上に配置される光吸収層と、
前記光吸収層の上に配置される第2電極層と、
を含むことを特徴とする請求項1に記載の太陽電池。 - 前記支持基板は、フレキシブル基板を含むことを特徴とする請求項1に記載の太陽電池。
- 支持基板の上に第1バリアー層を形成するステップと、
前記第1バリアー層の上に前記第1バリアー層と気孔度が相異する第2バリアー層を形成するステップと、
前記第2バリアー層の上に光電変換部を形成するステップと、
を含むことを特徴とする太陽電池の製造方法。 - 前記支持基板の上に第1バリアー層を形成するステップは、
前記支持基板の上に金属層を形成するステップと、
前記金属層を酸化させて前記第1バリアー層を形成するステップと、
を含むことを特徴とする請求項14に記載の太陽電池の製造方法。 - 前記第1バリアー層及び前記第2バリアー層の各々は、スパッタリング工程、電解メッキ工程、マイクロアーク酸化工程、正極酸化工程、及びこれらの組み合わせからなる群から選択される工程により形成されることを特徴とする請求項14に記載の太陽電池の製造方法。
- 前記第2バリアー層は、
前記第1バリアー層の上部をエッチングして形成されることを特徴とする請求項14に記載の太陽電池の製造方法。
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KR1020100091277A KR101091375B1 (ko) | 2010-09-16 | 2010-09-16 | 태양 전지 및 이의 제조 방법 |
KR10-2010-0091277 | 2010-09-16 | ||
PCT/KR2011/006850 WO2012036504A2 (ko) | 2010-09-16 | 2011-09-16 | 태양 전지 및 이의 제조 방법 |
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JP2013538464A true JP2013538464A (ja) | 2013-10-10 |
JP5913320B2 JP5913320B2 (ja) | 2016-04-27 |
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JP (1) | JP5913320B2 (ja) |
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US20140124028A1 (en) * | 2011-06-10 | 2014-05-08 | Kyoung-Bo Kim | Solar cell substrate, method for manufacturing same, and solar cell using same |
KR101865953B1 (ko) * | 2012-09-12 | 2018-06-08 | 엘지이노텍 주식회사 | 태양전지 및 이의 제조방법 |
EP2832898A1 (de) * | 2014-02-05 | 2015-02-04 | ThyssenKrupp Steel Europe AG | Plasmaelektrolytisch veredeltes Bauteil und Verfahren zu seiner Herstellung |
CN105226118B (zh) * | 2014-06-05 | 2017-04-12 | 中物院成都科学技术发展中心 | 柔性太阳能电池及其制备方法 |
WO2016182025A1 (ja) * | 2015-05-14 | 2016-11-17 | 株式会社昭和 | 対極に集電極を設けた色素増感型太陽電池 |
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JP4075021B2 (ja) * | 1997-12-26 | 2008-04-16 | ソニー株式会社 | 半導体基板の製造方法および薄膜半導体部材の製造方法 |
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JP4461656B2 (ja) | 2000-12-07 | 2010-05-12 | セイコーエプソン株式会社 | 光電変換素子 |
TWI234885B (en) * | 2002-03-26 | 2005-06-21 | Fujikura Ltd | Electroconductive glass and photovoltaic cell using the same |
CN100530701C (zh) * | 2002-09-30 | 2009-08-19 | 米亚索尔公司 | 薄膜太阳能电池大规模生产的制造装置与方法 |
KR20100029414A (ko) * | 2008-09-08 | 2010-03-17 | 엘지이노텍 주식회사 | 태양전지 및 이의 제조방법 |
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2010
- 2010-09-16 KR KR1020100091277A patent/KR101091375B1/ko active IP Right Grant
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2011
- 2011-09-16 CN CN201180039615.XA patent/CN103069575B/zh not_active Expired - Fee Related
- 2011-09-16 EP EP11825464.8A patent/EP2503599B1/en active Active
- 2011-09-16 WO PCT/KR2011/006850 patent/WO2012036504A2/ko active Application Filing
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JPS61251589A (ja) * | 1985-04-30 | 1986-11-08 | 三菱重工業株式会社 | セラミツクス基材表面へのコ−テイング方法 |
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Also Published As
Publication number | Publication date |
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WO2012036504A3 (ko) | 2012-07-19 |
KR101091375B1 (ko) | 2011-12-07 |
EP2503599A2 (en) | 2012-09-26 |
JP5913320B2 (ja) | 2016-04-27 |
EP2503599B1 (en) | 2020-11-04 |
CN103069575A (zh) | 2013-04-24 |
CN103069575B (zh) | 2015-09-16 |
WO2012036504A2 (ko) | 2012-03-22 |
EP2503599A4 (en) | 2017-09-27 |
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