JP2013534729A - 並列電気パスを有するメモリ・セル - Google Patents
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Abstract
【解決手段】本メモリ・セルは、幅より大きな長さと該長さ方向に整列された軸とを有する第一導電電極領域を含む。また、本メモリ・セルは、第一導電電極領域の軸に対しある角度に方向付けられたエッジを有する第二導電電極領域も含む。本メモリ・セルは、第一導電電極領域の終端と第二導電電極領域のエッジとの間に横方向の分離距離を設ける絶縁体領域をさらに含み、該絶縁体領域は絶縁体膜の少なくとも一部を含み、横方向の分離距離は絶縁体膜の厚さに対応する。
【選択図】図12
Description
Claims (26)
- ほぼ平坦な表面を有する統合電子メモリ・セル装置であって、
幅より大きな長さと前記長さ方向に整列された軸とを有する第一導電電極領域と、
前記第一導電電極領域の前記軸に対しある角度に方向付けられたエッジを有する第二導電電極領域と、
前記第一導電電極領域の終端と前記第二導電電極領域の前記エッジとの間に横方向の分離距離を設ける絶縁体領域であって、前記絶縁体領域は絶縁体膜の少なくとも一部を含み、前記横方向の分離距離は前記絶縁体膜の厚さに対応する、前記絶縁体領域と、
を含む装置。 - 前記第一導電電極領域の前記幅が第一堆積材料層の厚さに対応する、請求項1に記載の装置。
- 前記第一堆積材料層がチタン、タングステン、窒化チタン、および窒化チタンアルミニウムの一つである、請求項2に記載の装置。
- 前記第一導電電極領域および前記第二導電電極領域を少なくとも部分的に覆うストレージ材料の層をさらに含む、請求項1〜3のいずれかに記載の装置。
- 前記ストレージ材料は相変化材料である、請求項4に記載の装置。
- 前記ストレージ材料の層はパターン取りされる、請求項4または5に記載の装置。
- 前記角度がほぼ直角である、請求項1〜6のいずれかに記載の装置。
- 前記角度が20〜80度の間である、請求項1〜6のいずれかに記載の装置。
- 相変化メモリを動作させる方法であって、前記方法は、
メモリ・セルを初期設定するステップを含み、前記メモリ・セルは、幅より大きな長さと前記長さ方向に整列された軸とを有する第一導電電極と、前記第一導電電極の前記軸に対しある角度に方向付けられたエッジを有する第二導電電極と、前記第一導電電極の終端と前記第二導電電極の前記エッジとの間に分離距離を設ける絶縁体と、前記第一導電電極のかなりの部分および前記第二導電電極の少なくとも一部を覆う相変化材料と、を含み、前記初期設定するステップは、
前記相変化材料中に第一アモルファス材料領域を生成するステップを含み、前記第一アモルファス材料領域は前記相変化材料のかなりの面積を占める、前記生成するステップと、
前記第一アモルファス材料領域の一部を結晶化することによって、前記第一アモルファス材料領域の内部に活性結晶材料領域を生成するステップと、
前記活性結晶材料領域の内部に第二アモルファス材料領域を生成することによって、前記メモリ・セル中に情報を格納するステップと、
を含む、方法。 - その後に印加される電気パルスよりも大きな電気パルスを前記メモリ・セルに印加するステップをさらに含み、前記電気パルスの前記印加は、前記第一導電電極および前記第二導電電極の少なくとも一つを介する、
請求項9に記載の方法。 - 前記メモリ・セルを初期設定する前記ステップは、シングル・レベル・セルを初期設定するステップを含む、請求項9または10に記載の方法。
- 前記メモリ・セルを初期設定する前記ステップは、マルチ・レベル・セルを初期設定するステップを含む、請求項9または10に記載の方法。
- 前記第一アモルファス材料領域の内部に前記活性結晶材料領域を生成する前記ステップは、前記活性結晶材料領域のサイズを調整して規定のセル抵抗を得るステップをさらに含む、請求項9〜10に記載の方法。
- 請求項9〜13のいずれかに記載の、相変化メモリ・セルを動作させる方法であって、前記方法は、
一つ以上の電気パルスを使って、相変化材料中のアモルファス材料領域の前記サイズを変更するステップ、
をさらに含む方法。 - 前記アモルファス相変化材料領域の前記サイズを変更するステップは、第一電気パルスを印加することによって前記サイズを増大するステップを含み、前記第一電気パルスの前記印加は前記第一導電電極および前記第二導電電極の少なくとも一つを介し、前記第一電気パルスは、従前に印加された電気パルスより大きな振幅および従前に印加された電気パルスよりも短い持続時間の少なくとも一つを有する、
請求項14に記載の方法。 - 前記アモルファス相変化材料領域の前記サイズを変更するステップは、前記メモリ・セルに第二電気パルスを印加することによって前記サイズを低減するステップを含み、前記第二電気パルスの前記印加は前記第一導電電極および前記第二導電電極の少なくとも一つを介し、前記第二電気パルスは、前記従前に印加された電気パルスより低い振幅および前記従前に印加された電気パルスよりも長い持続時間の少なくとも一つを有する、
請求項14または15に記載の方法。 - 基板上に相変化メモリ・セルを製作する方法であって、前記方法は、
前記基板中に第一トレンチをエッチングするステップと、
前記第一トレンチ中に第一導体層を堆積するステップと、
前記第一トレンチ中の前記第一導体層を覆って第一絶縁体層を堆積するステップと、
前記基板中に、前記第一トレンチに対しある角度で第二トレンチをエッチングするステップと、
前記第二トレンチ中に第二絶縁体層を堆積するステップと、
前記第二トレンチ中の前記第二絶縁体層を覆って第二導体層を堆積するステップと、
相変化材料を堆積するステップであって、前記相変化材料は前記第一導体層および前記第二導体層と接触している、前記堆積するステップと、
を含む方法。 - 前記基板は、前記相変化メモリ・セルへのアクセスを提供するための底部コンタクトを含むウエハであり、前記基板中の前記第一トレンチを前記エッチングするステップは前記底部コンタクトを露出させる、請求項17に記載の方法。
- 第一トレンチまたは第二トレンチをエッチングする前記ステップを含み、前記第一トレンチおよび前記第二トレンチの少なくとも一つは直線でない、請求項17または18に記載の方法。
- 第一絶縁体層を堆積する前記ステップを含み、前記第一絶縁体層が前記第一トレンチを充填する、請求項17〜19のいずれかに記載の方法。
- 第二導体層を堆積する前記ステップを含み、前記第二導体層が前記第二トレンチを充填する、請求項17〜20のいずれかに記載の方法。
- 第二導体層を堆積する前記ステップを含み、前記第二導体層は前記第二トレンチを充填せず、前記方法は、前記第二トレンチ中に第三絶縁体層を堆積し前記第二トレンチ充填するステップをさらに含む、請求項17〜21のいずれかに記載の方法。
- 集積回路を設計、製造、または試験するための、マシン可読媒体中に実体的に具現された設計構造体であって、前記設計構造体はほぼ平坦な表面を有し、前記設計構造体は、
幅より大きな長さと前記長さ方向に整列された軸とを有する第一導電電極領域と、
前記第一導電電極領域の前記軸に対しある角度に方向付けられたエッジを有する第二導電電極領域と、
前記第一導電電極領域の終端と前記第二導電電極領域の前記エッジとの間に横方向の分離距離を設ける絶縁体領域であって、前記絶縁体領域は絶縁体膜の少なくとも一部を含み、前記横方向の分離距離は前記絶縁体膜の厚さに対応する、前記絶縁体領域と、
を含む設計構造体。 - 前記第一導電電極および前記第二導電電極を少なくとも部分的に覆うストレージ材料の層をさらに含む、請求項23に記載の設計構造体。
- 前記ストレージ材料は相変化材料である、請求項24に記載の設計構造体。
- コンピュータ・システムにロードされ実行されたとき、前記コンピュータ・システムに、請求項9〜16のいずれかに記載の方法の前記ステップの全てを遂行させるための、コンピュータ可読媒体に格納されたコンピュータ・プログラム・コードを含むコンピュータ・プログラム。
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PCT/EP2011/060595 WO2011161227A1 (en) | 2010-06-25 | 2011-06-24 | Memory cell with parallel electrical paths |
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US20130016556A1 (en) | 2013-01-17 |
CN102918675B (zh) | 2015-07-22 |
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BR112012031952A2 (pt) | 2019-09-24 |
TW201222909A (en) | 2012-06-01 |
EP2532037B1 (en) | 2013-07-31 |
EP2532037A1 (en) | 2012-12-12 |
TWI513073B (zh) | 2015-12-11 |
US8624217B2 (en) | 2014-01-07 |
JP5826835B2 (ja) | 2015-12-02 |
US20110317481A1 (en) | 2011-12-29 |
WO2011161227A1 (en) | 2011-12-29 |
CN102918675A (zh) | 2013-02-06 |
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