JP2013527625A - In−situ表面不動態化を伴うイオン注入された選択エミッタ太陽電池 - Google Patents
In−situ表面不動態化を伴うイオン注入された選択エミッタ太陽電池 Download PDFInfo
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- 238000011065 in-situ storage Methods 0.000 title abstract description 11
- 238000002161 passivation Methods 0.000 title description 17
- 239000000758 substrate Substances 0.000 claims abstract description 108
- 239000002019 doping agent Substances 0.000 claims abstract description 71
- 238000000034 method Methods 0.000 claims abstract description 59
- 238000005468 ion implantation Methods 0.000 claims abstract description 48
- 238000004519 manufacturing process Methods 0.000 claims abstract description 16
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 12
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 12
- 239000001301 oxygen Substances 0.000 claims abstract description 12
- 238000010344 co-firing Methods 0.000 claims abstract description 11
- 229910052710 silicon Inorganic materials 0.000 claims description 34
- 239000010703 silicon Substances 0.000 claims description 34
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 33
- 238000000137 annealing Methods 0.000 claims description 31
- 229910052782 aluminium Inorganic materials 0.000 claims description 24
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 24
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 21
- 229910052709 silver Inorganic materials 0.000 claims description 21
- 239000004332 silver Substances 0.000 claims description 21
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 20
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 15
- 230000003667 anti-reflective effect Effects 0.000 claims description 10
- 239000013078 crystal Substances 0.000 claims description 10
- 238000002513 implantation Methods 0.000 claims description 8
- 229910052698 phosphorus Inorganic materials 0.000 claims description 8
- 239000011574 phosphorus Substances 0.000 claims description 8
- 239000005360 phosphosilicate glass Substances 0.000 claims description 8
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 7
- 239000007791 liquid phase Substances 0.000 claims description 7
- 238000004891 communication Methods 0.000 claims description 6
- 238000007650 screen-printing Methods 0.000 claims description 6
- 238000000151 deposition Methods 0.000 claims description 4
- 230000003213 activating effect Effects 0.000 claims description 3
- 230000008569 process Effects 0.000 abstract description 19
- 238000010304 firing Methods 0.000 abstract description 9
- 238000001465 metallisation Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 description 13
- 239000002800 charge carrier Substances 0.000 description 11
- 150000002500 ions Chemical class 0.000 description 11
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 238000009792 diffusion process Methods 0.000 description 9
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 7
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- 238000010438 heat treatment Methods 0.000 description 6
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- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 238000005215 recombination Methods 0.000 description 6
- 235000012239 silicon dioxide Nutrition 0.000 description 6
- 229910052581 Si3N4 Inorganic materials 0.000 description 5
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 5
- 238000005530 etching Methods 0.000 description 5
- 239000012535 impurity Substances 0.000 description 5
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 5
- 229910052984 zinc sulfide Inorganic materials 0.000 description 5
- 230000005684 electric field Effects 0.000 description 4
- 238000000059 patterning Methods 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- -1 silver-aluminum Chemical compound 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 3
- 239000005083 Zinc sulfide Substances 0.000 description 3
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 3
- 229910052732 germanium Inorganic materials 0.000 description 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 3
- 239000010439 graphite Substances 0.000 description 3
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 3
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 229910017875 a-SiN Inorganic materials 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 2
- CSDREXVUYHZDNP-UHFFFAOYSA-N alumanylidynesilicon Chemical compound [Al].[Si] CSDREXVUYHZDNP-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
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- 239000011777 magnesium Substances 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
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- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
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- 238000005520 cutting process Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000011143 downstream manufacturing Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 229910021478 group 5 element Inorganic materials 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 238000004943 liquid phase epitaxy Methods 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- RLOWWWKZYUNIDI-UHFFFAOYSA-N phosphinic chloride Chemical compound ClP=O RLOWWWKZYUNIDI-UHFFFAOYSA-N 0.000 description 1
- XHXFXVLFKHQFAL-UHFFFAOYSA-N phosphoryl trichloride Chemical compound ClP(Cl)(Cl)=O XHXFXVLFKHQFAL-UHFFFAOYSA-N 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
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- 230000001681 protective effect Effects 0.000 description 1
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- 229910000077 silane Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Abstract
Description
る。エミッタ層は、1つ以上の第1のドープ領域と、1つ以上の第2のドープ領域とを有する選択エミッタである。1つ以上の第2のドープ領域は、1つ以上の第1のドープ領域よりも高濃度にドープされる。太陽電池は、また、p型ベース層とエミッタ層との界面に、p−n接合を有する。エミッタ層の前面に、不動態化酸化物層が形成される。p−n接合及び不動態化酸化物層は、単一のアニールサイクルにおいて形成される。
、1つ以上の銀前面コネクションもスクリーン印刷される。ベース層の裏面には、はんだ付け可能パッド又はバスバーなどの、1つ以上の銀−アルミニウム裏面コネクションがスクリーン印刷される。ベース層の裏面には、アルミニウム製裏面コンタクトもスクリーン印刷される。前面及び裏面のコンタクト及びコネクションは、それらが反射防止層及び/又は不動態化酸化物層を通って焼成されるように、ベルト炉内で、同時焼成される。1つ以上の前面コンタクトは、非晶質窒化シリコン層及び前面不動態化酸化物層を通じて選択エミッタ層と電子通信関係にある。ベース層の裏面と裏面コンタクトとの界面には、前面コンタクト及び裏面コンタクトの同時焼成中に、液相エピタキシャル再成長によって、アルミニウムドープp+シリコン層が形成される。
によって得られる太陽電池は、156ミリメートルの角加工基板において、18.5〜19%の平均電池効率と、潜在的には約20%の効率とを達成することができる。
、別の半導体タイプの場合は酸化物を含んでもよい。酸化物層40、41の厚さは、5〜150ナノメートルの範囲とすることができ、例えば、20ナノメートルが可能である。基板の表面における未結合のシリコン結合を不動態化することによって、酸化物層40、41は、表面再結合速度を低下させるとともに逆方向飽和電流密度のエミッタ成分(Joe)を減少させて、太陽電池5の全体効率を高めることができる。また、特定の実施形態において、p型ベース層10の裏面に形成される酸化物層41は、シリコン窒化物層を被せられたときに、誘電体によって高品質の不動態化された裏面を有利に形成することができる。
コンタクトに限定されると望ましいといえる。前面コンタクト30とその下の選択エミッタ層との間の接触抵抗を減少させるために、前面コンタクト30は、選択エミッタ層の高濃度ドープ領域15と位置合わせされる。特定の実施形態において、前面コンタクト30の幅は、前面コンタクト30が完全に高濃度ドープ領域15内にあることを保証するために、高濃度ドープ領域15の幅未満としてもよい。これらの選択領域における高濃度のドープにより、その下のp−n接合25の深さも増加し、これにより、前面コンタクト30を形成するために使用される金属ペーストの成分によってp−n接合25を通って生じる分路形成又は焼成を阻止することができる。特定の実施形態によれば、酸化物層40及び反射防止層45は、前面コンタクト30及び前面コネクションが形成される前に、選択エミッタ層のドープ領域15、20の前面に配することができる。この場合は、前面コンタクト30及び前面コネクションは、酸化物層40及び反射防止層45を物理的に貫通し、下にある選択エミッタ層の領域との接触を成すことができる。前面コンタクト30及び前面コネクションは、金属に加えてガラスフリットを含有することで、酸化物層40及び反射防止層45を通って生じる焼成を促し、選択エミッタ層との接触を成すことができる。
ス層10を形成するためにp型のドーパントでドープすることができる。ドーパント濃度は、1015〜1017原子毎立方センチメートル(原子/cm3)の範囲とすることができる。基板の厚さは、50〜500μmの範囲とすることができるが、50μm〜200μm未満までの厚さの基板を使用することによって、現在の標準的な基板と比べて半導体材料を節約することができる。基板の抵抗性は、1〜100オーム−cmの範囲とすることができ、1〜3オーム−cmを採用すると、優れた結果が得られる。単結晶若しくは多結晶、又は場合によってストリングリボン法による薄膜タイプ若しくはその他のタイプの基板が使用可能である。
コネクションは、p型ベース層10の裏面の裏面不動態化酸化物層41にスクリーン印刷することができる。裏面コンタクト35は、例えばMonocrystal Analog 12Dなどのアルミニウムペーストを使用して施すことができる。また、裏面コネクションは、例えばMonocrystal PPAS−7−1などのアルミニウム−銀ペーストを使用して施すことができる。実施形態の例によれば、はんだ付け可能パッド及びバスバーなどの裏面コネクションは、裏面コンタクト35が施される前に、p型ベース層10の裏面に施すことができる。裏面コンタクト35は、裏面コネクションの一部を露出させつつ裏面コネクションのエッジに重なるように印刷することができる。実施形態の例によれば、裏面コンタクト35及び裏面コネクションは、p型ベース層10の裏面のほぼ全面にスクリーン印刷することができる。これらの実施形態では、裏面コネクション35のアルミニウムペーストが、ウエハのエッジの近くのおおよそ1mm幅の狭い縁部分にプリントされないようにすることができる。あるいは、裏面コンタクト35及び裏面コネクションは、p型ベース層10の裏面の一部分のみにプリントすることができる。太陽電池5は、プリントされたペーストを乾燥させるために、任意で、30〜300秒にわたり、周囲空気中で摂氏150〜350度の温度のベルト炉に置くことができる。
き、これによって太陽電池が光の照射を受けたときに負荷に出力を提供することが可能となる。
、エミッタ層のより高濃度にドープされた1つ以上の第2のドープ領域と位置合わせされることで接触抵抗が減少する。
Claims (20)
- 選択エミッタ太陽電池を製造する方法であって、
p型ベース層を含む基板を提供するステップと、
イオン注入によって、前記p型ベース層の前面の少なくとも第1の領域にドーパントを導入するステップと、
イオン注入によって、前記p型ベース層の前面の少なくとも第2の領域にドーパントを導入するステップであって、前記第2の領域は、前記第1の領域よりも高濃度にドープされ、前記第1及び第2の領域に導入されるドーパントは、n型の伝導性である、ステップと、
前記基板をアニールするステップであって、該アニールするステップは、炉内で前記基板をある温度に加熱して
前記注入による損傷をアニールし、
前記第1及び第2の領域からのドーパントを活性化させ、
前記第1及び第2の領域からのドーパントを前記基板内のより深部に移動させ、前記p型ベース層の前面に選択エミッタ層を形成する、ステップと、
前記アニールするステップにおいて前記炉に酸素を導入するステップであって、前記選択エミッタ層の少なくとも前面に不動態化酸化物層を形成する、ステップと、
を有する方法。 - 前記基板は、単結晶のチョクラルスキシリコン基板である、請求項1に記載の方法。
- 前記ドーパントは、リンを含む、請求項1又は請求項2に記載の方法。
- 少なくとも前記第1の領域にドーパントを導入するステップは、前記p型ベース層の前面の前記第1及び第2の領域に均一にドーパントを導入するステップを含み、少なくとも前記第2の領域にドーパントを導入するステップは、前記p型ベース層の前面の少なくとも前記第2の領域にマスクを通して追加のトーパントを導入するステップを含む、請求項1から請求項3のいずれか1項に記載の方法。
- 前記基板をアニールするステップは、前記選択エミッタ層の前面と前記p型ベース層の裏面との間に電気的分路を形成せず、前記基板をアニールするステップは、リンケイ酸塩ガラスを形成しない、請求項1から請求項4のいずれか1項に記載の方法。
- 前記不動態化酸化物層の前面に非晶質窒化シリコン層を蒸着させ、それによって反射防止層を形成するステップをさらに有する、請求項1から請求項5のいずれか1項に記載の方法。
- 前記非晶質窒化シリコン層に、1つ以上の前面コンタクトを、前記p型ベース層の前面の前記第2の領域と位置合わせしてスクリーン印刷するステップをさらに有する、請求項6に記載の方法。
- 前記p型ベース層の裏面に1つ以上のアルミニウム製裏面コンタクトをスクリーン印刷するステップをさらに有する、請求項7に記載の方法。
- 前記1つ以上の前面コンタクト及び前記裏面コンタクトを同時焼成して、前記太陽電池との電気的接続を提供するステップをさらに有する、請求項8に記載の方法。
- 前記前面コンタクトがフリットを含み、該フリットにより、前記1つ以上の前面コンタクトが前記非晶質窒化シリコン層及び前記不動態化酸化物層を貫通することで、前記選択
エミッタ層との電気的接続が提供される、請求項7から請求項9のいずれか1項に記載の方法。 - 前記前面コンタクト及び前記裏面コンタクトを同時焼成するステップは、さらに、前記前面コンタクト及び前記裏面コンタクトの同時焼成中に、前記p型ベース層の裏面と前記裏面コンタクトとの界面において液相エピタキシャル再成長によってアルミニウムドープp+シリコン層を形成するステップを含み、前記裏面コンタクトは、前記アルミニウムドープp+シリコン層との電気的接続を提供する、請求項9又は請求項10に記載の方法。
- 前記第1及び第2の領域にドーパントを導入するステップを、単一の注入工程中に行う、請求項1から請求項11のいずれか1項に記載の方法。
- 太陽電池であって、
p型ベース層を含むシリコン基板と、
イオン注入によって前記p型ベース層の上に形成されるn型エミッタ層であって、1つ以上の第1のドープ領域と、1つ以上の第2のドープ領域とを有する選択エミッタであり、前記1つ以上の第2のドープ領域は、前記1つ以上の第1のドープ領域よりも高濃度にドープされる、n型エミッタ層と、
前記p型ベース層と前記エミッタ層との界面におけるp−n接合と、
前記エミッタ層の前面に形成される不動態化酸化物層であって、前記p−n接合及び前記不動態化酸化物層は、単一のアニールサイクル中に形成される、不動態化酸化物層と、を備える太陽電池。 - 前記不動態化酸化物層の前面に形成される反射防止層をさらに備える、請求項13に記載の太陽電池。
- 前記反射防止層は、非晶質窒化シリコン層を含む、請求項14に記載の太陽電池。
- 前記反射防止層の前面に形成されて、前記反射防止層を通じて前記エミッタ層と電気通信関係にある1つ以上のスクリーン印刷された前面コンタクトと、前記p型ベース層の裏面に形成される1つ以上のスクリーン印刷された裏面コンタクトとをさらに備える、請求項14又は請求項15に記載の太陽電池。
- 前記p型ベース層の裏面と前記1つ以上の裏面コンタクトとの界面において液相エピタキシャル再成長によって形成されるアルミニウムドープp+シリコン層をさらに備え、前記1つ以上の裏面コンタクトは、前記アルミニウムドープp+シリコン層と電気通信関係にある、請求項16に記載の太陽電池。
- 前記1つ以上の前面コンタクトは、スクリーン印刷された銀ペーストから形成され、前記1つ以上の裏面コンタクトは、スクリーン印刷されたアルミニウムペーストから形成される、請求項16又は請求項17に記載の太陽電池。
- 前記1つ以上の前面コンタクトは、前記エミッタ層の前記より高濃度にドープされた1つ以上の第2のドープ領域と位置合わせされることで接触抵抗が減少する、請求項16から請求項18のいずれか1項に記載の太陽電池。
- 太陽電池であって、
p型ベース層を含む基板を提供するステップと、
イオン注入によって、前記p型ベース層の前面の少なくとも第1の領域にドーパントを導入するステップと、
イオン注入によって、前記p型ベース層の前面の少なくとも第2の領域にドーパントを導入するステップであって、前記第2の領域は、前記第1の領域よりも高濃度にドープされ、前記第1及び第2の領域に導入されるドーパントは、n型の伝導性である、ステップと、
前記基板をアニールするステップであって、該アニールするステップは、炉内で前記基板をある温度に加熱して
前記注入による損傷をアニールし、
前記第1及び第2の領域からのドーパントを活性化させ、
前記第1及び第2の領域からのドーパントを前記基板内のより深部に移動させ、前記p型ベース層の前面に選択エミッタ層を形成する、ステップと、
前記アニールするステップにおいて前記炉に酸素を導入するステップであって、前記選択エミッタ層の少なくとも前面に不動態化酸化物層を形成する、ステップと
によって製造される太陽電池。
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Families Citing this family (43)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5628931B2 (ja) * | 2009-10-30 | 2014-11-19 | メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフツングMerck Patent Gesellschaft mit beschraenkter Haftung | 選択エミッタを含む、ソーラーセルの製造方法 |
US8614115B2 (en) * | 2009-10-30 | 2013-12-24 | International Business Machines Corporation | Photovoltaic solar cell device manufacture |
US8614495B2 (en) * | 2010-04-23 | 2013-12-24 | Taiwan Semiconductor Manufacturing Company, Ltd. | Back side defect reduction for back side illuminated image sensor |
US8110431B2 (en) * | 2010-06-03 | 2012-02-07 | Suniva, Inc. | Ion implanted selective emitter solar cells with in situ surface passivation |
EP2398071B1 (en) * | 2010-06-17 | 2013-01-16 | Imec | Method for forming a doped region in a semiconductor layer of a substrate and use of such method |
KR101729304B1 (ko) | 2010-12-21 | 2017-04-21 | 엘지전자 주식회사 | 태양 전지 및 그 제조 방법 |
TWI455340B (zh) * | 2011-02-25 | 2014-10-01 | Gintech Energy Corp | 太陽能電池的製造方法 |
TW201246305A (en) * | 2011-05-11 | 2012-11-16 | Applied Materials Inc | Surface dose retention of dopants by pre-amorphization and post-implant passivation treatments |
KR20120137821A (ko) * | 2011-06-13 | 2012-12-24 | 엘지전자 주식회사 | 태양전지 |
KR20130062775A (ko) | 2011-12-05 | 2013-06-13 | 엘지전자 주식회사 | 태양 전지 및 이의 제조 방법 |
KR101902887B1 (ko) * | 2011-12-23 | 2018-10-01 | 엘지전자 주식회사 | 태양 전지의 제조 방법 |
KR101958819B1 (ko) * | 2012-01-27 | 2019-03-15 | 엘지전자 주식회사 | 양면 수광형 태양전지의 제조 방법 |
KR20130096822A (ko) * | 2012-02-23 | 2013-09-02 | 엘지전자 주식회사 | 태양 전지 및 그 제조 방법 |
US9412895B2 (en) * | 2012-04-04 | 2016-08-09 | Samsung Sdi Co., Ltd. | Method of manufacturing photoelectric device |
US9312420B2 (en) | 2012-04-17 | 2016-04-12 | Lg Electronics Inc. | Solar cell and method for manufacturing the same |
NL2008755C2 (en) * | 2012-05-04 | 2013-11-06 | Tempress Ip B V | Method of manufacturing a solar cell and equipment therefore. |
FR2990563B1 (fr) * | 2012-05-11 | 2014-05-09 | Apollon Solar | Cellule solaire a base de silicium dope de type n |
CN102664217A (zh) * | 2012-05-14 | 2012-09-12 | 杨正刚 | 晶体硅双面太阳电池生产工艺 |
KR101850326B1 (ko) | 2012-05-21 | 2018-04-19 | 엘지전자 주식회사 | 태양 전지 및 이의 제조 방법 |
KR20140003693A (ko) * | 2012-06-22 | 2014-01-10 | 엘지전자 주식회사 | 태양 전지의 불순물층 형성용 마스크 및 이의 제조 방법, 그리고 이를 이용한 태양 전지용 불순물층의 제조 방법 |
CN102856436A (zh) * | 2012-09-05 | 2013-01-02 | 友达光电股份有限公司 | 太阳能电池及其制作方法 |
CN102881772B (zh) * | 2012-10-15 | 2015-10-07 | 浙江正泰太阳能科技有限公司 | 一种选择性发射极太阳能电池的制备方法 |
CN103811582A (zh) * | 2012-11-08 | 2014-05-21 | 上海神舟新能源发展有限公司 | 离子注入制作超低表面掺杂浓度的低方阻硅太阳电池方法 |
WO2014098016A1 (ja) * | 2012-12-18 | 2014-06-26 | PVG Solutions株式会社 | 太陽電池セル及びその製造方法 |
KR20140082050A (ko) * | 2012-12-21 | 2014-07-02 | 삼성전자주식회사 | 태양 전지 및 그 제조 방법 |
CN104966766B (zh) * | 2013-04-01 | 2017-01-18 | 南通大学 | 太阳能电池的选择性掺杂方法 |
CN103165758B (zh) * | 2013-04-01 | 2015-08-26 | 南通大学 | 一种基于逆扩散的太阳能电池选择性掺杂方法 |
KR102010390B1 (ko) * | 2013-05-28 | 2019-08-13 | 엘지전자 주식회사 | 태양 전지의 제조 방법 및 불순물 영역의 형성 방법 |
CN103515483A (zh) * | 2013-09-09 | 2014-01-15 | 中电电气(南京)光伏有限公司 | 一种晶体硅太阳能电池发射结的制备方法 |
TW201517133A (zh) * | 2013-10-07 | 2015-05-01 | Applied Materials Inc | 使用熱佈植與奈秒退火致使銦鋁鎵氮化物材料系統中摻雜劑的高活化 |
US9577134B2 (en) | 2013-12-09 | 2017-02-21 | Sunpower Corporation | Solar cell emitter region fabrication using self-aligned implant and cap |
US9722129B2 (en) | 2014-02-12 | 2017-08-01 | Varian Semiconductor Equipment Associates, Inc. | Complementary traveling masks |
FR3018391B1 (fr) | 2014-03-07 | 2016-04-01 | Commissariat Energie Atomique | Procede de realisation d’une cellule photovoltaique a dopage selectif |
PT3321973T (pt) * | 2016-11-09 | 2021-03-16 | Meyer Burger Germany Ag | Célula solar cristalina com uma camada transparente e condutora entre os contactos de lado dianteiro e procedimento para fabrico de uma tal célula solar |
DE102018001057A1 (de) * | 2018-02-07 | 2019-08-08 | Aic Hörmann Gmbh & Co. Kg | Verfahren zur Verbesserung des ohmschen Kontaktverhaltens zwischen einem Kontaktgitter und einer Ermitterschicht einer Siliziumsolarzelle |
EP3550611A1 (en) | 2018-04-06 | 2019-10-09 | Total Solar International | Method for manufacturing a photovoltaic device |
US20190348548A1 (en) | 2018-05-09 | 2019-11-14 | International Business Machines Corporation | Solar cell with reduced surface recombination |
EP3579284A1 (en) | 2018-06-08 | 2019-12-11 | Total SA | Method to obtain a photovoltaic device |
EP3579285A1 (en) | 2018-06-08 | 2019-12-11 | Total SA | Method to obtain a photovoltaic device |
EP3648174A1 (en) | 2018-10-31 | 2020-05-06 | Total SA | Photovoltaic assembly |
KR20210010095A (ko) * | 2019-07-19 | 2021-01-27 | 엘지전자 주식회사 | 태양 전지 및 이의 제조 방법 |
CN110931598A (zh) * | 2019-11-12 | 2020-03-27 | 浙江爱旭太阳能科技有限公司 | 一种二次退火的单晶硅se-perc电池的制造方法 |
CN111952417A (zh) * | 2020-08-24 | 2020-11-17 | 晶科绿能(上海)管理有限公司 | 一种太阳能电池及其制备方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4676845A (en) * | 1986-02-18 | 1987-06-30 | Spire Corporation | Passivated deep p/n junction |
JPH05183184A (ja) * | 1991-12-26 | 1993-07-23 | Fujitsu Ltd | 固体撮像装置の製造方法 |
JPH10233518A (ja) * | 1996-12-20 | 1998-09-02 | Mitsubishi Electric Corp | 太陽電池の製造方法及び太陽電池並びに半導体装置の製造方法 |
JP2000323735A (ja) * | 1999-05-10 | 2000-11-24 | Mitsubishi Electric Corp | 光起電力装置の製造方法及び光起電力装置 |
WO2009111665A2 (en) * | 2008-03-05 | 2009-09-11 | Varian Semiconductor Equipment Associates | Use of chained implants in solar cells |
WO2009152375A1 (en) * | 2008-06-11 | 2009-12-17 | Solar Implant Technologies Inc. | Solar cell fabrication using implantation |
Family Cites Families (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6091021A (en) | 1996-11-01 | 2000-07-18 | Sandia Corporation | Silicon cells made by self-aligned selective-emitter plasma-etchback process |
KR100446591B1 (ko) * | 1997-02-17 | 2005-05-16 | 삼성전자주식회사 | 태양전지용실리콘박막및그제조방법 |
KR100366350B1 (ko) * | 2001-01-15 | 2002-12-31 | 삼성에스디아이 주식회사 | 태양 전지 및 그 제조 방법 |
JP2004193350A (ja) | 2002-12-11 | 2004-07-08 | Sharp Corp | 太陽電池セルおよびその製造方法 |
US20050118802A1 (en) * | 2003-12-02 | 2005-06-02 | Chang-Sheng Tsao | Method for implementing poly pre-doping in deep sub-micron process |
US20050252544A1 (en) * | 2004-05-11 | 2005-11-17 | Ajeet Rohatgi | Silicon solar cells and methods of fabrication |
US8076570B2 (en) * | 2006-03-20 | 2011-12-13 | Ferro Corporation | Aluminum-boron solar cell contacts |
DE602008003218D1 (de) | 2007-05-07 | 2010-12-09 | Georgia Tech Res Inst | Herstellung eines hochwertigen rückseitigen kontakts mit lokaler rückseitiger siebdruckfläche |
WO2009029900A1 (en) * | 2007-08-31 | 2009-03-05 | Applied Materials, Inc. | Improved methods of emitter formation in solar cells |
US7820460B2 (en) | 2007-09-07 | 2010-10-26 | Varian Semiconductor Equipment Associates, Inc. | Patterned assembly for manufacturing a solar cell and a method thereof |
US20090101202A1 (en) * | 2007-10-17 | 2009-04-23 | Industrial Technology Research Institute | Method of fast hydrogen passivation to solar cells made of crystalline silicon |
US20090142875A1 (en) * | 2007-11-30 | 2009-06-04 | Applied Materials, Inc. | Method of making an improved selective emitter for silicon solar cells |
US20090227095A1 (en) | 2008-03-05 | 2009-09-10 | Nicholas Bateman | Counterdoping for solar cells |
US8461032B2 (en) | 2008-03-05 | 2013-06-11 | Varian Semiconductor Equipment Associates, Inc. | Use of dopants with different diffusivities for solar cell manufacture |
US20090227061A1 (en) | 2008-03-05 | 2009-09-10 | Nicholas Bateman | Establishing a high phosphorus concentration in solar cells |
US20090317937A1 (en) | 2008-06-20 | 2009-12-24 | Atul Gupta | Maskless Doping Technique for Solar Cells |
TWI368999B (en) * | 2008-07-15 | 2012-07-21 | Mosel Vitelic Inc | Method for manufacturing solar cell |
US7838400B2 (en) | 2008-07-17 | 2010-11-23 | Applied Materials, Inc. | Rapid thermal oxide passivated solar cell with improved junction |
US7897434B2 (en) * | 2008-08-12 | 2011-03-01 | International Business Machines Corporation | Methods of fabricating solar cell chips |
WO2010030645A2 (en) | 2008-09-10 | 2010-03-18 | Varian Semiconductor Equipment Associates, Inc. | Techniques for manufacturing solar cells |
US7846762B2 (en) * | 2008-09-22 | 2010-12-07 | Applied Materials, Inc. | Integrated emitter formation and passivation |
US7816239B2 (en) | 2008-11-20 | 2010-10-19 | Varian Semiconductor Equipment Associates, Inc. | Technique for manufacturing a solar cell |
US8685846B2 (en) | 2009-01-30 | 2014-04-01 | Varian Semiconductor Equipment Associates, Inc. | Technique for processing a substrate |
US8900982B2 (en) | 2009-04-08 | 2014-12-02 | Varian Semiconductor Equipment Associates, Inc. | Techniques for processing a substrate |
US9076914B2 (en) | 2009-04-08 | 2015-07-07 | Varian Semiconductor Equipment Associates, Inc. | Techniques for processing a substrate |
US9006688B2 (en) | 2009-04-08 | 2015-04-14 | Varian Semiconductor Equipment Associates, Inc. | Techniques for processing a substrate using a mask |
US8330128B2 (en) | 2009-04-17 | 2012-12-11 | Varian Semiconductor Equipment Associates, Inc. | Implant mask with moveable hinged mask segments |
US9000446B2 (en) | 2009-05-22 | 2015-04-07 | Varian Semiconductor Equipment Associates, Inc. | Techniques for processing a substrate |
US8101927B2 (en) | 2009-06-08 | 2012-01-24 | Varian Semiconductor Equipment Associates, Inc. | Masking apparatus for an ion implanter |
US8008176B2 (en) | 2009-08-11 | 2011-08-30 | Varian Semiconductor Equipment Associates, Inc. | Masked ion implant with fast-slow scan |
US8603900B2 (en) | 2009-10-27 | 2013-12-10 | Varian Semiconductor Equipment Associates, Inc. | Reducing surface recombination and enhancing light trapping in solar cells |
US8465909B2 (en) | 2009-11-04 | 2013-06-18 | Varian Semiconductor Equipment Associates, Inc. | Self-aligned masking for solar cell manufacture |
US8153456B2 (en) | 2010-01-20 | 2012-04-10 | Varian Semiconductor Equipment Associates, Inc. | Bifacial solar cell using ion implantation |
US20110180131A1 (en) | 2010-01-27 | 2011-07-28 | Varian Semiconductor Equipment Associates, Inc. | Method for attaching contacts to a solar cell without cell efficiency loss |
US8110431B2 (en) * | 2010-06-03 | 2012-02-07 | Suniva, Inc. | Ion implanted selective emitter solar cells with in situ surface passivation |
-
2010
- 2010-06-03 US US12/793,363 patent/US8110431B2/en not_active Expired - Fee Related
-
2011
- 2011-05-16 CN CN2011800381169A patent/CN103238220A/zh active Pending
- 2011-05-16 WO PCT/US2011/036602 patent/WO2011152982A2/en active Application Filing
- 2011-05-16 JP JP2013513195A patent/JP2013527625A/ja active Pending
- 2011-05-16 KR KR1020127033781A patent/KR101579854B1/ko not_active IP Right Cessation
- 2011-05-16 EP EP11721926.1A patent/EP2577745A2/en not_active Withdrawn
- 2011-06-02 TW TW100119445A patent/TWI523251B/zh not_active IP Right Cessation
-
2012
- 2012-01-09 US US13/346,354 patent/US9153728B2/en not_active Expired - Fee Related
-
2015
- 2015-02-09 JP JP2015023245A patent/JP2015111721A/ja active Pending
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4676845A (en) * | 1986-02-18 | 1987-06-30 | Spire Corporation | Passivated deep p/n junction |
JPH05183184A (ja) * | 1991-12-26 | 1993-07-23 | Fujitsu Ltd | 固体撮像装置の製造方法 |
JPH10233518A (ja) * | 1996-12-20 | 1998-09-02 | Mitsubishi Electric Corp | 太陽電池の製造方法及び太陽電池並びに半導体装置の製造方法 |
JP2000323735A (ja) * | 1999-05-10 | 2000-11-24 | Mitsubishi Electric Corp | 光起電力装置の製造方法及び光起電力装置 |
WO2009111665A2 (en) * | 2008-03-05 | 2009-09-11 | Varian Semiconductor Equipment Associates | Use of chained implants in solar cells |
WO2009152375A1 (en) * | 2008-06-11 | 2009-12-17 | Solar Implant Technologies Inc. | Solar cell fabrication using implantation |
WO2009152378A1 (en) * | 2008-06-11 | 2009-12-17 | Solar Implant Technologies Inc. | Formation of solar cell-selective emitter using implant and anneal method |
Non-Patent Citations (1)
Title |
---|
JPN6013057902; J. A. Minnucci et al.: 'Tailored Emitter, Low-Resistivity, Ion-Implanted Silicon Solar Cells' IEEE TRANSACTIONS ON ELECTRON DEVICES Vol.ED-27, No.4, 198004, pp.802-806 * |
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CN103238220A (zh) | 2013-08-07 |
TWI523251B (zh) | 2016-02-21 |
US9153728B2 (en) | 2015-10-06 |
WO2011152982A3 (en) | 2012-10-26 |
KR101579854B1 (ko) | 2015-12-23 |
TW201208104A (en) | 2012-02-16 |
WO2011152982A2 (en) | 2011-12-08 |
JP2015111721A (ja) | 2015-06-18 |
US8110431B2 (en) | 2012-02-07 |
KR20130038307A (ko) | 2013-04-17 |
US20120107998A1 (en) | 2012-05-03 |
EP2577745A2 (en) | 2013-04-10 |
US20110139230A1 (en) | 2011-06-16 |
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