PT3321973T - Célula solar cristalina com uma camada transparente e condutora entre os contactos de lado dianteiro e procedimento para fabrico de uma tal célula solar - Google Patents
Célula solar cristalina com uma camada transparente e condutora entre os contactos de lado dianteiro e procedimento para fabrico de uma tal célula solarInfo
- Publication number
- PT3321973T PT3321973T PT161979729T PT16197972T PT3321973T PT 3321973 T PT3321973 T PT 3321973T PT 161979729 T PT161979729 T PT 161979729T PT 16197972 T PT16197972 T PT 16197972T PT 3321973 T PT3321973 T PT 3321973T
- Authority
- PT
- Portugal
- Prior art keywords
- solar cell
- transparent
- manufacturing
- conductive layer
- front contacts
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022466—Electrodes made of transparent conductive layers, e.g. TCO, ITO layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02172—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/02274—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic System
- H01L21/28556—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic System by chemical means, e.g. CVD, LPCVD, PECVD, laser CVD
- H01L21/28562—Selective deposition
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
- H01L31/02168—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells the coatings being antireflective or having enhancing optical properties for the solar cells
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
- H01L31/022441—Electrode arrangements specially adapted for back-contact solar cells
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022466—Electrodes made of transparent conductive layers, e.g. TCO, ITO layers
- H01L31/022475—Electrodes made of transparent conductive layers, e.g. TCO, ITO layers composed of indium tin oxide [ITO]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022466—Electrodes made of transparent conductive layers, e.g. TCO, ITO layers
- H01L31/022483—Electrodes made of transparent conductive layers, e.g. TCO, ITO layers composed of zinc oxide [ZnO]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
- H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
- H01L31/1868—Passivation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1884—Manufacture of transparent electrodes, e.g. TCO, ITO
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP16197972.9A EP3321973B1 (de) | 2016-11-09 | 2016-11-09 | Kristalline solarzelle mit einer transparenten, leitfähigen schicht zwischen den vorderseitenkontakten und verfahren zur herstellung einer solchen solarzelle |
Publications (1)
Publication Number | Publication Date |
---|---|
PT3321973T true PT3321973T (pt) | 2021-03-16 |
Family
ID=57256201
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PT161979729T PT3321973T (pt) | 2016-11-09 | 2016-11-09 | Célula solar cristalina com uma camada transparente e condutora entre os contactos de lado dianteiro e procedimento para fabrico de uma tal célula solar |
Country Status (10)
Country | Link |
---|---|
US (1) | US11444211B2 (pt) |
EP (1) | EP3321973B1 (pt) |
JP (1) | JP7149281B2 (pt) |
KR (1) | KR102271715B1 (pt) |
CN (1) | CN110249433B (pt) |
ES (1) | ES2864687T3 (pt) |
MY (1) | MY185556A (pt) |
PT (1) | PT3321973T (pt) |
TW (1) | TWI750255B (pt) |
WO (1) | WO2018087201A1 (pt) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI705572B (zh) * | 2019-07-03 | 2020-09-21 | 太極能源科技股份有限公司 | 具有氮氧化矽鈍化層的太陽電池及其製造方法 |
EP3770975B1 (en) * | 2019-07-26 | 2021-11-24 | Meyer Burger (Germany) GmbH | Photovoltaic device and method for manufacturing the same |
CN110504045A (zh) * | 2019-08-09 | 2019-11-26 | 江苏国瓷泓源光电科技有限公司 | 一种高拉力的晶硅太阳能电池perc铝浆及其制备方法 |
CN111640823B (zh) * | 2020-06-11 | 2022-05-17 | 常州时创能源股份有限公司 | 一种n型钝化接触电池及其制备方法 |
Family Cites Families (30)
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DE3831857A1 (de) * | 1988-09-20 | 1990-03-22 | Meinhard Prof Dr Ing Knoll | Verfahren zur herstellung eines lichtdurchlaessigen dielektrikums aus einer dotierten silizium-verbindung bei einer inversionsschicht-solarzelle |
US5356488A (en) * | 1991-12-27 | 1994-10-18 | Rudolf Hezel | Solar cell and method for its manufacture |
KR100974220B1 (ko) * | 2006-12-13 | 2010-08-06 | 엘지전자 주식회사 | 태양전지 |
TW200929575A (en) | 2007-12-28 | 2009-07-01 | Ind Tech Res Inst | A passivation layer structure of the solar cell and the method of the fabricating |
TW201005963A (en) | 2008-07-17 | 2010-02-01 | Big Sun Energy Technology Inc | Solar cell with high photon utilization and method of manufacturing the same |
US8049862B2 (en) * | 2008-08-08 | 2011-11-01 | Apple Inc. | Indium tin oxide (ITO) layer forming |
KR101139443B1 (ko) * | 2009-09-04 | 2012-04-30 | 엘지전자 주식회사 | 이종접합 태양전지와 그 제조방법 |
DE102009044052A1 (de) * | 2009-09-18 | 2011-03-24 | Schott Solar Ag | Kristalline Solarzelle, Verfahren zur Herstellung einer solchen sowie Verfahren zur Herstellung eines Solarzellenmoduls |
WO2011066300A1 (en) * | 2009-11-25 | 2011-06-03 | E. I. Du Pont De Nemours And Company | Process for the formation of a silver back electrode of a passivated emitter and rear contact silicon solar cell |
US20130233378A1 (en) * | 2009-12-09 | 2013-09-12 | Solexel, Inc. | High-efficiency photovoltaic back-contact solar cell structures and manufacturing methods using semiconductor wafers |
TW201123481A (en) * | 2009-12-29 | 2011-07-01 | Auria Solar Co Ltd | Solar cell and manufacturing method thereof |
US20110162706A1 (en) * | 2010-01-04 | 2011-07-07 | Applied Materials, Inc. | Passivated polysilicon emitter solar cell and method for manufacturing the same |
US20110132444A1 (en) * | 2010-01-08 | 2011-06-09 | Meier Daniel L | Solar cell including sputtered reflective layer and method of manufacture thereof |
WO2011119910A2 (en) | 2010-03-26 | 2011-09-29 | Tetrasun, Inc. | Shielded electrical contact and doping through a passivating dielectric layer in a high-efficiency crystalline solar cell, including structure and methods of manufacture |
JP5424270B2 (ja) | 2010-05-11 | 2014-02-26 | 国立大学法人東京農工大学 | 半導体ソーラーセル |
US20110277825A1 (en) * | 2010-05-14 | 2011-11-17 | Sierra Solar Power, Inc. | Solar cell with metal grid fabricated by electroplating |
US8110431B2 (en) * | 2010-06-03 | 2012-02-07 | Suniva, Inc. | Ion implanted selective emitter solar cells with in situ surface passivation |
KR20120088029A (ko) * | 2010-10-18 | 2012-08-08 | 엘지전자 주식회사 | 태양 전지 및 그 제조 방법 |
DE102011002280A1 (de) * | 2011-04-27 | 2012-10-31 | Solarworld Innovations Gmbh | Solarzellen und Verfahren zum Herstellen einer Solarzelle |
US20150034141A1 (en) * | 2011-12-14 | 2015-02-05 | Dow Corning Corporation | Photovoltaic Cell And An Article Including An Isotropic Or Anisotropic Electrically Conductive Layer |
CN202855746U (zh) * | 2012-08-20 | 2013-04-03 | 江苏格林保尔光伏有限公司 | 一种高转化率的太阳能组件 |
TWI525642B (zh) * | 2012-09-13 | 2016-03-11 | 達泰科技股份有限公司 | 導電漿料及其用於製造光伏元件之用途 |
KR20140046617A (ko) * | 2012-10-09 | 2014-04-21 | 삼성코닝정밀소재 주식회사 | 산화아연 전구체 및 이를 이용한 산화아연계 박막 증착방법 |
CN103094394B (zh) * | 2013-01-18 | 2015-10-07 | 厦门大学 | 一种下转换晶体硅太阳能电池及其制备方法 |
KR101541415B1 (ko) * | 2013-07-25 | 2015-08-03 | 한국에너지기술연구원 | 성능이 향상된 기판을 포함하는 태양전지 및 그 제조 방법 |
KR20150021829A (ko) * | 2013-08-21 | 2015-03-03 | 현대중공업 주식회사 | 태양전지의 제조방법 |
CN104465799B (zh) * | 2013-09-25 | 2017-04-05 | 比亚迪股份有限公司 | 一种晶体硅太阳能电池及其制备方法 |
DE102013219561A1 (de) * | 2013-09-27 | 2015-04-02 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zum Herstellen einer photovoltaischen Solarzelle mit zumindest einem Heteroübergang |
JP2016012590A (ja) | 2014-06-27 | 2016-01-21 | 国立大学法人東京農工大学 | 半導体材料のパッシベーション方法 |
US20180062008A1 (en) * | 2016-08-23 | 2018-03-01 | Solarcity Corporation | Method and system for manufacturing electrical contact for photovoltaic structures |
-
2016
- 2016-11-09 EP EP16197972.9A patent/EP3321973B1/de active Active
- 2016-11-09 PT PT161979729T patent/PT3321973T/pt unknown
- 2016-11-09 ES ES16197972T patent/ES2864687T3/es active Active
-
2017
- 2017-11-09 TW TW106138807A patent/TWI750255B/zh active
- 2017-11-09 WO PCT/EP2017/078699 patent/WO2018087201A1/de active Application Filing
- 2017-11-09 JP JP2019546075A patent/JP7149281B2/ja active Active
- 2017-11-09 MY MYPI2019002471A patent/MY185556A/en unknown
- 2017-11-09 US US16/348,510 patent/US11444211B2/en active Active
- 2017-11-09 CN CN201780080604.3A patent/CN110249433B/zh active Active
- 2017-11-09 KR KR1020197015610A patent/KR102271715B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
ES2864687T3 (es) | 2021-10-14 |
US20200058806A1 (en) | 2020-02-20 |
EP3321973B1 (de) | 2021-01-06 |
TWI750255B (zh) | 2021-12-21 |
TW201830715A (zh) | 2018-08-16 |
EP3321973A1 (de) | 2018-05-16 |
CN110249433B (zh) | 2022-03-25 |
KR20190092412A (ko) | 2019-08-07 |
US11444211B2 (en) | 2022-09-13 |
WO2018087201A1 (de) | 2018-05-17 |
CN110249433A (zh) | 2019-09-17 |
JP7149281B2 (ja) | 2022-10-06 |
MY185556A (en) | 2021-05-20 |
KR102271715B1 (ko) | 2021-06-30 |
JP2019534582A (ja) | 2019-11-28 |
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