JP2013516328A5 - - Google Patents

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Publication number
JP2013516328A5
JP2013516328A5 JP2012547232A JP2012547232A JP2013516328A5 JP 2013516328 A5 JP2013516328 A5 JP 2013516328A5 JP 2012547232 A JP2012547232 A JP 2012547232A JP 2012547232 A JP2012547232 A JP 2012547232A JP 2013516328 A5 JP2013516328 A5 JP 2013516328A5
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JP
Japan
Prior art keywords
polishing
main surface
polishing pad
elements
substantially perpendicular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2012547232A
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English (en)
Japanese (ja)
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JP2013516328A (ja
JP5671554B2 (ja
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Priority claimed from PCT/US2010/062205 external-priority patent/WO2011082156A2/en
Publication of JP2013516328A publication Critical patent/JP2013516328A/ja
Publication of JP2013516328A5 publication Critical patent/JP2013516328A5/ja
Application granted granted Critical
Publication of JP5671554B2 publication Critical patent/JP5671554B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2012547232A 2009-12-30 2010-12-28 有機微粒子装填研磨パッド、並びにその製造及び使用方法 Expired - Fee Related JP5671554B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US29118209P 2009-12-30 2009-12-30
US61/291,182 2009-12-30
PCT/US2010/062205 WO2011082156A2 (en) 2009-12-30 2010-12-28 Organic particulate loaded polishing pads and method of making and using the same

Publications (3)

Publication Number Publication Date
JP2013516328A JP2013516328A (ja) 2013-05-13
JP2013516328A5 true JP2013516328A5 (enrdf_load_stackoverflow) 2014-02-06
JP5671554B2 JP5671554B2 (ja) 2015-02-18

Family

ID=44227136

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012547232A Expired - Fee Related JP5671554B2 (ja) 2009-12-30 2010-12-28 有機微粒子装填研磨パッド、並びにその製造及び使用方法

Country Status (7)

Country Link
US (1) US20130102231A1 (enrdf_load_stackoverflow)
JP (1) JP5671554B2 (enrdf_load_stackoverflow)
KR (1) KR20120112662A (enrdf_load_stackoverflow)
CN (1) CN102686361A (enrdf_load_stackoverflow)
SG (1) SG181889A1 (enrdf_load_stackoverflow)
TW (1) TW201143984A (enrdf_load_stackoverflow)
WO (1) WO2011082156A2 (enrdf_load_stackoverflow)

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