JP2013501375A5 - - Google Patents

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Publication number
JP2013501375A5
JP2013501375A5 JP2012523602A JP2012523602A JP2013501375A5 JP 2013501375 A5 JP2013501375 A5 JP 2013501375A5 JP 2012523602 A JP2012523602 A JP 2012523602A JP 2012523602 A JP2012523602 A JP 2012523602A JP 2013501375 A5 JP2013501375 A5 JP 2013501375A5
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JP
Japan
Prior art keywords
field
pattern
template
polymerizable material
substrate
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Application number
JP2012523602A
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English (en)
Japanese (ja)
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JP2013501375A (ja
JP5728478B2 (ja
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Priority claimed from US12/846,211 external-priority patent/US20110031650A1/en
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Publication of JP2013501375A publication Critical patent/JP2013501375A/ja
Publication of JP2013501375A5 publication Critical patent/JP2013501375A5/ja
Application granted granted Critical
Publication of JP5728478B2 publication Critical patent/JP5728478B2/ja
Active legal-status Critical Current
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JP2012523602A 2009-08-04 2010-07-30 隣接するフィールドのアラインメント方法 Active JP5728478B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US23118209P 2009-08-04 2009-08-04
US61/231,182 2009-08-04
US12/846,211 US20110031650A1 (en) 2009-08-04 2010-07-29 Adjacent Field Alignment
US12/846,211 2010-07-29
PCT/US2010/002136 WO2011016849A2 (en) 2009-08-04 2010-07-30 Adjacent field alignment

Publications (3)

Publication Number Publication Date
JP2013501375A JP2013501375A (ja) 2013-01-10
JP2013501375A5 true JP2013501375A5 (https=) 2013-08-15
JP5728478B2 JP5728478B2 (ja) 2015-06-03

Family

ID=43534207

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012523602A Active JP5728478B2 (ja) 2009-08-04 2010-07-30 隣接するフィールドのアラインメント方法

Country Status (6)

Country Link
US (2) US20110031650A1 (https=)
EP (1) EP2462487B8 (https=)
JP (1) JP5728478B2 (https=)
KR (1) KR101762213B1 (https=)
TW (1) TWI556941B (https=)
WO (1) WO2011016849A2 (https=)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1768846B1 (en) * 2004-06-03 2010-08-11 Molecular Imprints, Inc. Fluid dispensing and drop-on-demand dispensing for nano-scale manufacturing
JP5238742B2 (ja) * 2010-03-19 2013-07-17 株式会社東芝 加工方法および加工装置
JP5599356B2 (ja) * 2011-03-31 2014-10-01 富士フイルム株式会社 シミュレーション方法、プログラムおよびそれを記録した記録媒体、並びに、それらを利用した液滴配置パターンの作成方法、ナノインプリント方法、パターン化基板の製造方法およびインクジェット装置。
US10549313B2 (en) * 2016-10-31 2020-02-04 Canon Kabushiki Kaisha Edge field imprint lithography
KR102730502B1 (ko) * 2017-01-23 2024-11-14 에스케이하이닉스 주식회사 임프린트 패턴 형성 방법
US11209730B2 (en) * 2019-03-14 2021-12-28 Canon Kabushiki Kaisha Methods of generating drop patterns, systems for shaping films with the drop pattern, and methods of manufacturing an article with the drop pattern
US11429022B2 (en) * 2019-10-23 2022-08-30 Canon Kabushiki Kaisha Systems and methods for curing a shaped film
US11474441B2 (en) * 2020-06-25 2022-10-18 Canon Kabushiki Kaisha Systems and methods for generating drop patterns
WO2022027925A1 (zh) * 2020-08-05 2022-02-10 上海鲲游光电科技有限公司 一体成型的树脂匀光元件和doe及其制造方法
US11567417B2 (en) 2021-01-20 2023-01-31 Applied Materials, Inc. Anti-slippery stamp landing ring
JP7799461B2 (ja) * 2021-12-03 2026-01-15 キヤノン株式会社 インプリント方法、パターン形成方法、インプリント装置および物品の製造方法
US12136558B2 (en) 2022-06-30 2024-11-05 Canon Kabushiki Kaisha Generating edge adjusted drop patterns

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6873087B1 (en) * 1999-10-29 2005-03-29 Board Of Regents, The University Of Texas System High precision orientation alignment and gap control stages for imprint lithography processes
CN1696826A (zh) * 2000-08-01 2005-11-16 得克萨斯州大学系统董事会 用对激活光透明的模板在衬底上形成图案的方法及半导体器件
US7077992B2 (en) 2002-07-11 2006-07-18 Molecular Imprints, Inc. Step and repeat imprint lithography processes
US6932934B2 (en) * 2002-07-11 2005-08-23 Molecular Imprints, Inc. Formation of discontinuous films during an imprint lithography process
US6936194B2 (en) * 2002-09-05 2005-08-30 Molecular Imprints, Inc. Functional patterning material for imprint lithography processes
US8349241B2 (en) * 2002-10-04 2013-01-08 Molecular Imprints, Inc. Method to arrange features on a substrate to replicate features having minimal dimensional variability
US20040065252A1 (en) * 2002-10-04 2004-04-08 Sreenivasan Sidlgata V. Method of forming a layer on a substrate to facilitate fabrication of metrology standards
US7179396B2 (en) * 2003-03-25 2007-02-20 Molecular Imprints, Inc. Positive tone bi-layer imprint lithography method
US7396475B2 (en) * 2003-04-25 2008-07-08 Molecular Imprints, Inc. Method of forming stepped structures employing imprint lithography
US7157036B2 (en) * 2003-06-17 2007-01-02 Molecular Imprints, Inc Method to reduce adhesion between a conformable region and a pattern of a mold
DE10330456B9 (de) * 2003-07-05 2007-11-08 Erich Thallner Vorrichtung zum Erstellen einer Oberflächenstruktur auf einem Wafer
US8076386B2 (en) * 2004-02-23 2011-12-13 Molecular Imprints, Inc. Materials for imprint lithography
EP1768846B1 (en) * 2004-06-03 2010-08-11 Molecular Imprints, Inc. Fluid dispensing and drop-on-demand dispensing for nano-scale manufacturing
US7686970B2 (en) * 2004-12-30 2010-03-30 Asml Netherlands B.V. Imprint lithography
US20060266916A1 (en) * 2005-05-25 2006-11-30 Molecular Imprints, Inc. Imprint lithography template having a coating to reflect and/or absorb actinic energy
US20070005409A1 (en) * 2005-06-30 2007-01-04 International Business Machines Corporation Method and structure for overriding calendar entries based on context and business value
US8011916B2 (en) * 2005-09-06 2011-09-06 Canon Kabushiki Kaisha Mold, imprint apparatus, and process for producing structure
US7579137B2 (en) * 2005-12-24 2009-08-25 International Business Machines Corporation Method for fabricating dual damascene structures
KR101232051B1 (ko) * 2006-06-29 2013-02-12 엘지디스플레이 주식회사 게이트 펄스 변조신호 발생회로
US8707890B2 (en) * 2006-07-18 2014-04-29 Asml Netherlands B.V. Imprint lithography
JP4922774B2 (ja) * 2007-01-26 2012-04-25 株式会社東芝 パターン形成方法及びパターン形成用モールド
US20090014917A1 (en) * 2007-07-10 2009-01-15 Molecular Imprints, Inc. Drop Pattern Generation for Imprint Lithography
JP5274128B2 (ja) * 2007-08-03 2013-08-28 キヤノン株式会社 インプリント方法および基板の加工方法
JP5473266B2 (ja) * 2007-08-03 2014-04-16 キヤノン株式会社 インプリント方法および基板の加工方法、基板の加工方法による半導体デバイスの製造方法
JP4908369B2 (ja) * 2007-10-02 2012-04-04 株式会社東芝 インプリント方法及びインプリントシステム
US8119052B2 (en) * 2007-11-02 2012-02-21 Molecular Imprints, Inc. Drop pattern generation for imprint lithography
JP2010076219A (ja) * 2008-09-25 2010-04-08 Canon Inc ナノインプリントによる基板の加工方法

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