JP2009037023A5 - - Google Patents

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Publication number
JP2009037023A5
JP2009037023A5 JP2007201570A JP2007201570A JP2009037023A5 JP 2009037023 A5 JP2009037023 A5 JP 2009037023A5 JP 2007201570 A JP2007201570 A JP 2007201570A JP 2007201570 A JP2007201570 A JP 2007201570A JP 2009037023 A5 JP2009037023 A5 JP 2009037023A5
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JP
Japan
Prior art keywords
ray
resin layer
photosensitive resin
ultraviolet
absorbing metal
Prior art date
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Granted
Application number
JP2007201570A
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English (en)
Japanese (ja)
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JP2009037023A (ja
JP4642818B2 (ja
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Priority to JP2007201570A priority Critical patent/JP4642818B2/ja
Priority claimed from JP2007201570A external-priority patent/JP4642818B2/ja
Publication of JP2009037023A publication Critical patent/JP2009037023A/ja
Publication of JP2009037023A5 publication Critical patent/JP2009037023A5/ja
Application granted granted Critical
Publication of JP4642818B2 publication Critical patent/JP4642818B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2007201570A 2007-08-02 2007-08-02 回折格子の製造方法 Expired - Fee Related JP4642818B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007201570A JP4642818B2 (ja) 2007-08-02 2007-08-02 回折格子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007201570A JP4642818B2 (ja) 2007-08-02 2007-08-02 回折格子の製造方法

Publications (3)

Publication Number Publication Date
JP2009037023A JP2009037023A (ja) 2009-02-19
JP2009037023A5 true JP2009037023A5 (https=) 2010-09-24
JP4642818B2 JP4642818B2 (ja) 2011-03-02

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ID=40438991

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007201570A Expired - Fee Related JP4642818B2 (ja) 2007-08-02 2007-08-02 回折格子の製造方法

Country Status (1)

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JP (1) JP4642818B2 (https=)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2443491B1 (en) * 2009-06-16 2020-03-04 Koninklijke Philips N.V. Tilted gratings and method for production of tilted gratings
US8999435B2 (en) * 2009-08-31 2015-04-07 Canon Kabushiki Kaisha Process of producing grating for X-ray image pickup apparatus
JP5773624B2 (ja) * 2010-01-08 2015-09-02 キヤノン株式会社 微細構造体の製造方法
JP2015178683A (ja) * 2010-01-08 2015-10-08 キヤノン株式会社 金属吸収格子及びタルボ干渉計
JP5660910B2 (ja) * 2010-03-30 2015-01-28 富士フイルム株式会社 放射線画像撮影用グリッドの製造方法
DE102010017426A1 (de) * 2010-06-17 2011-12-22 Karlsruher Institut für Technologie Gitter aus mindestens zwei Materialien für die Röntgenbildgebung
EP2657722B1 (en) 2010-12-21 2019-08-28 Konica Minolta, Inc. Method for manufacturing metal grating structure
JP5893252B2 (ja) * 2011-02-15 2016-03-23 キヤノン株式会社 微細構造体の製造方法
JP5804726B2 (ja) * 2011-02-24 2015-11-04 キヤノン株式会社 微細構造体の製造方法
JP5656726B2 (ja) * 2011-04-15 2015-01-21 株式会社日立ハイテクサイエンス Ｘ線タルボ干渉計用位相型回折格子の製造方法
JP5860613B2 (ja) * 2011-05-26 2016-02-16 株式会社オプトニクス精密 Ｘ線干渉計用の回折格子及びその製造方法
US20140241493A1 (en) 2011-07-27 2014-08-28 Mitsuru Yokoyama Metal Lattice Production Method, Metal Lattice, X-Ray Imaging Device, and Intermediate Product for Metal Lattice
JP5871549B2 (ja) * 2011-07-29 2016-03-01 キヤノン株式会社 Ｘ線遮蔽格子の製造方法
JP6245794B2 (ja) * 2011-07-29 2017-12-13 キヤノン株式会社 遮蔽格子の製造方法
KR101306185B1 (ko) 2011-12-28 2013-09-17 단국대학교 산학협력단 엑스선 간섭계의 나노 격자 제조 방법
JP6667215B2 (ja) 2014-07-24 2020-03-18 キヤノン株式会社 Ｘ線遮蔽格子、構造体、トールボット干渉計、ｘ線遮蔽格子の製造方法
JP7059545B2 (ja) * 2017-09-20 2022-04-26 大日本印刷株式会社 構造体の製造方法、および構造体
JP7319106B2 (ja) * 2019-06-28 2023-08-01 株式会社ミツトヨ 格子部品およびその製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61174502A (ja) * 1985-01-29 1986-08-06 Shimadzu Corp 軟ｘ線用光学素子
JP3253716B2 (ja) * 1992-12-24 2002-02-04 キヤノン株式会社 貴金属単結晶群の適用品及びその製造方法

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