JP2013501211A5 - - Google Patents

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Publication number
JP2013501211A5
JP2013501211A5 JP2012521936A JP2012521936A JP2013501211A5 JP 2013501211 A5 JP2013501211 A5 JP 2013501211A5 JP 2012521936 A JP2012521936 A JP 2012521936A JP 2012521936 A JP2012521936 A JP 2012521936A JP 2013501211 A5 JP2013501211 A5 JP 2013501211A5
Authority
JP
Japan
Prior art keywords
substrate
defect
light
images
illumination unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2012521936A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013501211A (ja
Filing date
Publication date
Priority claimed from CN2009101611073A external-priority patent/CN101988908A/zh
Priority claimed from CN200910246381.0A external-priority patent/CN102081047B/zh
Application filed filed Critical
Priority claimed from PCT/CN2010/070791 external-priority patent/WO2011011988A1/en
Publication of JP2013501211A publication Critical patent/JP2013501211A/ja
Publication of JP2013501211A5 publication Critical patent/JP2013501211A5/ja
Pending legal-status Critical Current

Links

JP2012521936A 2009-07-31 2010-02-26 基板の欠陥を検出及び分類する方法及びシステム Pending JP2013501211A (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
CN200910161107.3 2009-07-31
CN2009101611073A CN101988908A (zh) 2009-07-31 2009-07-31 用于对基板的缺陷进行区分的方法和系统
CN200910246381.0A CN102081047B (zh) 2009-11-27 2009-11-27 用于对基板的缺陷进行区分的方法和系统
CN200910246381.0 2009-11-27
PCT/CN2010/070791 WO2011011988A1 (en) 2009-07-31 2010-02-26 Method and system for detecting and classifying defects of substrate

Publications (2)

Publication Number Publication Date
JP2013501211A JP2013501211A (ja) 2013-01-10
JP2013501211A5 true JP2013501211A5 (https=) 2013-04-04

Family

ID=43528732

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012521936A Pending JP2013501211A (ja) 2009-07-31 2010-02-26 基板の欠陥を検出及び分類する方法及びシステム

Country Status (5)

Country Link
US (1) US20120133762A1 (https=)
EP (1) EP2459989A4 (https=)
JP (1) JP2013501211A (https=)
KR (1) KR20120040257A (https=)
WO (1) WO2011011988A1 (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101324015B1 (ko) * 2011-08-18 2013-10-31 바슬러 비전 테크놀로지스 에이지 유리기판 표면 불량 검사 장치 및 검사 방법
KR101435621B1 (ko) * 2012-11-09 2014-08-29 와이즈플래닛(주) 복수의 촬상 장치를 이용한 검사대상 위치 판단장치
KR102368587B1 (ko) 2015-10-21 2022-03-02 삼성전자주식회사 검사 장치, 그를 포함하는 반도체 소자의 제조 시스템, 및 반도체 소자의 제조 방법
US10677739B2 (en) * 2016-11-02 2020-06-09 Corning Incorporated Method and apparatus for inspecting defects on transparent substrate
CN110050184B (zh) 2016-11-02 2023-06-13 康宁股份有限公司 检查透明基材上的缺陷的方法和设备及发射入射光的方法
WO2021090827A1 (ja) * 2019-11-05 2021-05-14 株式会社小糸製作所 検査装置
KR102927634B1 (ko) * 2020-08-18 2026-02-13 삼성디스플레이 주식회사 디스플레이 장치의 제조 방법
US20240426761A1 (en) * 2023-06-24 2024-12-26 John Le Method and optical system for imaging optical defect
CN117782823A (zh) * 2024-02-23 2024-03-29 易事特智能化系统集成有限公司 一种光伏材料检测设备

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3225651A (en) * 1964-11-12 1965-12-28 Wallace A Clay Methods of stereoscopic reproduction of images
JPS63163152A (ja) * 1986-12-24 1988-07-06 Hitachi Condenser Co Ltd 透明基材又は半透明基材の検査方法とその検査装置
JPH07113757A (ja) * 1993-10-14 1995-05-02 Asahi Glass Co Ltd 透光性物体の欠点検出方法
JP3994217B2 (ja) * 1998-05-28 2007-10-17 株式会社ニコン 画像処理による異常点位置検出システム
CA2252308C (en) * 1998-10-30 2005-01-04 Image Processing Systems, Inc. Glass inspection system
JP4151306B2 (ja) * 2002-05-16 2008-09-17 旭硝子株式会社 被検査物の検査方法
JP4124358B2 (ja) * 2003-12-17 2008-07-23 関東自動車工業株式会社 樹脂溶着部の撮像装置
WO2005072265A2 (en) * 2004-01-22 2005-08-11 Wintriss Engineering Corporation Illumination system for material inspection
KR100897223B1 (ko) * 2004-11-24 2009-05-14 아사히 가라스 가부시키가이샤 투명 판상체의 결함 검사 방법 및 장치
US7567344B2 (en) * 2006-05-12 2009-07-28 Corning Incorporated Apparatus and method for characterizing defects in a transparent substrate
JP5157471B2 (ja) * 2008-01-22 2013-03-06 旭硝子株式会社 欠陥検査装置、欠陥検査方法及び板状体の製造方法

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