KR20120040257A - 기판의 결함을 검출하고 분류하기 위한 방법 및 시스템 - Google Patents

기판의 결함을 검출하고 분류하기 위한 방법 및 시스템 Download PDF

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Publication number
KR20120040257A
KR20120040257A KR1020127005244A KR20127005244A KR20120040257A KR 20120040257 A KR20120040257 A KR 20120040257A KR 1020127005244 A KR1020127005244 A KR 1020127005244A KR 20127005244 A KR20127005244 A KR 20127005244A KR 20120040257 A KR20120040257 A KR 20120040257A
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KR
South Korea
Prior art keywords
substrate
unit
image
image forming
illumination unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1020127005244A
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English (en)
Korean (ko)
Inventor
장-필립 슈바이처
후이펀 리
샤오펑 린
샤오펑 꾸오
펑 꾸오
샤오웨이 쑨
Original Assignee
쌩-고벵 글래스 프랑스
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Filing date
Publication date
Priority claimed from CN2009101611073A external-priority patent/CN101988908A/zh
Priority claimed from CN200910246381.0A external-priority patent/CN102081047B/zh
Application filed by 쌩-고벵 글래스 프랑스 filed Critical 쌩-고벵 글래스 프랑스
Publication of KR20120040257A publication Critical patent/KR20120040257A/ko
Withdrawn legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G01N2021/8967—Discriminating defects on opposite sides or at different depths of sheet or rod

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  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
KR1020127005244A 2009-07-31 2010-02-26 기판의 결함을 검출하고 분류하기 위한 방법 및 시스템 Withdrawn KR20120040257A (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
CN200910161107.3 2009-07-31
CN2009101611073A CN101988908A (zh) 2009-07-31 2009-07-31 用于对基板的缺陷进行区分的方法和系统
CN200910246381.0A CN102081047B (zh) 2009-11-27 2009-11-27 用于对基板的缺陷进行区分的方法和系统
CN200910246381.0 2009-11-27

Publications (1)

Publication Number Publication Date
KR20120040257A true KR20120040257A (ko) 2012-04-26

Family

ID=43528732

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020127005244A Withdrawn KR20120040257A (ko) 2009-07-31 2010-02-26 기판의 결함을 검출하고 분류하기 위한 방법 및 시스템

Country Status (5)

Country Link
US (1) US20120133762A1 (https=)
EP (1) EP2459989A4 (https=)
JP (1) JP2013501211A (https=)
KR (1) KR20120040257A (https=)
WO (1) WO2011011988A1 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101435621B1 (ko) * 2012-11-09 2014-08-29 와이즈플래닛(주) 복수의 촬상 장치를 이용한 검사대상 위치 판단장치
KR20220022510A (ko) * 2020-08-18 2022-02-28 삼성디스플레이 주식회사 디스플레이 장치의 제조 방법

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101324015B1 (ko) * 2011-08-18 2013-10-31 바슬러 비전 테크놀로지스 에이지 유리기판 표면 불량 검사 장치 및 검사 방법
KR102368587B1 (ko) 2015-10-21 2022-03-02 삼성전자주식회사 검사 장치, 그를 포함하는 반도체 소자의 제조 시스템, 및 반도체 소자의 제조 방법
US10677739B2 (en) * 2016-11-02 2020-06-09 Corning Incorporated Method and apparatus for inspecting defects on transparent substrate
CN110050184B (zh) 2016-11-02 2023-06-13 康宁股份有限公司 检查透明基材上的缺陷的方法和设备及发射入射光的方法
WO2021090827A1 (ja) * 2019-11-05 2021-05-14 株式会社小糸製作所 検査装置
US20240426761A1 (en) * 2023-06-24 2024-12-26 John Le Method and optical system for imaging optical defect
CN117782823A (zh) * 2024-02-23 2024-03-29 易事特智能化系统集成有限公司 一种光伏材料检测设备

Family Cites Families (11)

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Publication number Priority date Publication date Assignee Title
US3225651A (en) * 1964-11-12 1965-12-28 Wallace A Clay Methods of stereoscopic reproduction of images
JPS63163152A (ja) * 1986-12-24 1988-07-06 Hitachi Condenser Co Ltd 透明基材又は半透明基材の検査方法とその検査装置
JPH07113757A (ja) * 1993-10-14 1995-05-02 Asahi Glass Co Ltd 透光性物体の欠点検出方法
JP3994217B2 (ja) * 1998-05-28 2007-10-17 株式会社ニコン 画像処理による異常点位置検出システム
CA2252308C (en) * 1998-10-30 2005-01-04 Image Processing Systems, Inc. Glass inspection system
JP4151306B2 (ja) * 2002-05-16 2008-09-17 旭硝子株式会社 被検査物の検査方法
JP4124358B2 (ja) * 2003-12-17 2008-07-23 関東自動車工業株式会社 樹脂溶着部の撮像装置
WO2005072265A2 (en) * 2004-01-22 2005-08-11 Wintriss Engineering Corporation Illumination system for material inspection
KR100897223B1 (ko) * 2004-11-24 2009-05-14 아사히 가라스 가부시키가이샤 투명 판상체의 결함 검사 방법 및 장치
US7567344B2 (en) * 2006-05-12 2009-07-28 Corning Incorporated Apparatus and method for characterizing defects in a transparent substrate
JP5157471B2 (ja) * 2008-01-22 2013-03-06 旭硝子株式会社 欠陥検査装置、欠陥検査方法及び板状体の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101435621B1 (ko) * 2012-11-09 2014-08-29 와이즈플래닛(주) 복수의 촬상 장치를 이용한 검사대상 위치 판단장치
KR20220022510A (ko) * 2020-08-18 2022-02-28 삼성디스플레이 주식회사 디스플레이 장치의 제조 방법

Also Published As

Publication number Publication date
US20120133762A1 (en) 2012-05-31
JP2013501211A (ja) 2013-01-10
EP2459989A4 (en) 2017-03-29
EP2459989A1 (en) 2012-06-06
WO2011011988A1 (en) 2011-02-03

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PA0105 International application

Patent event date: 20120228

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid