JP2013254736A5 - - Google Patents

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Publication number
JP2013254736A5
JP2013254736A5 JP2013119000A JP2013119000A JP2013254736A5 JP 2013254736 A5 JP2013254736 A5 JP 2013254736A5 JP 2013119000 A JP2013119000 A JP 2013119000A JP 2013119000 A JP2013119000 A JP 2013119000A JP 2013254736 A5 JP2013254736 A5 JP 2013254736A5
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JP
Japan
Prior art keywords
condenser lens
deflector
magnetic
emitter
field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2013119000A
Other languages
English (en)
Japanese (ja)
Other versions
JP5779614B2 (ja
JP2013254736A (ja
Filing date
Publication date
Priority claimed from EP12171023.0A external-priority patent/EP2672502B1/en
Application filed filed Critical
Publication of JP2013254736A publication Critical patent/JP2013254736A/ja
Publication of JP2013254736A5 publication Critical patent/JP2013254736A5/ja
Application granted granted Critical
Publication of JP5779614B2 publication Critical patent/JP5779614B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2013119000A 2012-06-06 2013-06-05 可動コンデンサーレンズを備えた高輝度電子銃 Active JP5779614B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP12171023.0A EP2672502B1 (en) 2012-06-06 2012-06-06 electron beam optical system comprising high brightness electron gun with moving axis condenser lens
EP12171023.0 2012-06-06

Publications (3)

Publication Number Publication Date
JP2013254736A JP2013254736A (ja) 2013-12-19
JP2013254736A5 true JP2013254736A5 (https=) 2015-07-02
JP5779614B2 JP5779614B2 (ja) 2015-09-16

Family

ID=46506137

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013119000A Active JP5779614B2 (ja) 2012-06-06 2013-06-05 可動コンデンサーレンズを備えた高輝度電子銃

Country Status (4)

Country Link
US (1) US8921804B2 (https=)
EP (1) EP2672502B1 (https=)
JP (1) JP5779614B2 (https=)
TW (1) TWI539481B (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112014006978B4 (de) 2014-10-20 2022-01-27 Hitachi High-Tech Corporation Rasterelektronenmikroskop
US9799484B2 (en) * 2014-12-09 2017-10-24 Hermes Microvision, Inc. Charged particle source
WO2019224895A1 (ja) * 2018-05-22 2019-11-28 株式会社日立ハイテクノロジーズ 荷電粒子線装置及びその軸調整方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0485643A (ja) 1990-07-30 1992-03-18 Matsushita Electric Ind Co Ltd 情報処理装置
JPH0485643U (https=) * 1990-11-30 1992-07-24
JPH09223475A (ja) * 1996-02-19 1997-08-26 Nikon Corp 電磁偏向器、及び該偏向器を用いた荷電粒子線転写装置
JPH09245703A (ja) * 1996-03-13 1997-09-19 Jeol Ltd 荷電粒子ビームの軸合わせ装置
JPH1097979A (ja) * 1996-09-25 1998-04-14 Nikon Corp 縮小投影装置
US5793048A (en) * 1996-12-18 1998-08-11 International Business Machines Corporation Curvilinear variable axis lens correction with shifted dipoles
US5708274A (en) * 1996-12-18 1998-01-13 International Business Machines Corporation Curvilinear variable axis lens correction with crossed coils
EP1046185B1 (en) * 1998-09-09 2003-11-26 Koninklijke Philips Electronics N.V. Projection lithography device utilizing charged particles
JP2004134388A (ja) * 2002-08-13 2004-04-30 Leo Elektronenmikroskopie Gmbh 粒子光学装置、電子顕微鏡システムおよび電子リソグラフィーシステム
EP1777730B1 (en) * 2005-10-19 2018-05-30 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Arrangement and method for compensating emitter tip vibrations
US8101911B2 (en) * 2008-11-04 2012-01-24 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Method and device for improved alignment of a high brightness charged particle gun
JP5504277B2 (ja) * 2009-11-26 2014-05-28 株式会社日立ハイテクノロジーズ 走査電子顕微鏡
EP2444990B1 (en) * 2010-10-19 2014-06-25 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Simplified particle emitter and method of operating thereof

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