JP2013250188A - 欠陥検出装置、欠陥検出方法、および欠陥検出プログラム - Google Patents

欠陥検出装置、欠陥検出方法、および欠陥検出プログラム Download PDF

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JP2013250188A
JP2013250188A JP2012125889A JP2012125889A JP2013250188A JP 2013250188 A JP2013250188 A JP 2013250188A JP 2012125889 A JP2012125889 A JP 2012125889A JP 2012125889 A JP2012125889 A JP 2012125889A JP 2013250188 A JP2013250188 A JP 2013250188A
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JP2013250188A5 (enExample
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Hiroaki Tsunoda
洋昭 角田
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Seiko Epson Corp
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Seiko Epson Corp
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JP2012125889A 2012-06-01 2012-06-01 欠陥検出装置、欠陥検出方法、および欠陥検出プログラム Withdrawn JP2013250188A (ja)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015169564A (ja) * 2014-03-07 2015-09-28 株式会社ダイヘン 画像検査装置及び画像検査方法
US9429779B2 (en) 2014-08-19 2016-08-30 Samsung Electronics Co., Ltd. Electro-optic modulator including composite materials and testing apparatus including the same
CN109900707A (zh) * 2019-03-20 2019-06-18 湖南华曙高科技有限责任公司 一种铺粉质量检测方法、设备以及可读存储介质
KR20220094593A (ko) * 2020-12-29 2022-07-06 부산대학교 산학협력단 표면결함검출 스캐너를 위한 이미지 데이터 저장 장치 및 방법
CN116973311A (zh) * 2023-09-22 2023-10-31 成都中嘉微视科技有限公司 一种膜上膜下异物的检测装置及检测方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09145638A (ja) * 1995-11-24 1997-06-06 Kawasaki Steel Corp 表面欠陥検査方法及び装置
JP2000329699A (ja) * 1999-05-20 2000-11-30 Kobe Steel Ltd 欠陥検査方法及びその装置
JP2008004085A (ja) * 2006-05-23 2008-01-10 Matsushita Electric Ind Co Ltd 画像処理装置、画像処理方法、プログラム、記録媒体および集積回路
JP2008070242A (ja) * 2006-09-14 2008-03-27 Seiko Epson Corp ノイズ除去方法および装置、ムラ欠陥検査方法および装置
JP2009216475A (ja) * 2008-03-08 2009-09-24 Kanto Auto Works Ltd 表面検査システム及びこれを用いた表面検査方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09145638A (ja) * 1995-11-24 1997-06-06 Kawasaki Steel Corp 表面欠陥検査方法及び装置
JP2000329699A (ja) * 1999-05-20 2000-11-30 Kobe Steel Ltd 欠陥検査方法及びその装置
JP2008004085A (ja) * 2006-05-23 2008-01-10 Matsushita Electric Ind Co Ltd 画像処理装置、画像処理方法、プログラム、記録媒体および集積回路
JP2008070242A (ja) * 2006-09-14 2008-03-27 Seiko Epson Corp ノイズ除去方法および装置、ムラ欠陥検査方法および装置
JP2009216475A (ja) * 2008-03-08 2009-09-24 Kanto Auto Works Ltd 表面検査システム及びこれを用いた表面検査方法

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015169564A (ja) * 2014-03-07 2015-09-28 株式会社ダイヘン 画像検査装置及び画像検査方法
US9429779B2 (en) 2014-08-19 2016-08-30 Samsung Electronics Co., Ltd. Electro-optic modulator including composite materials and testing apparatus including the same
CN109900707A (zh) * 2019-03-20 2019-06-18 湖南华曙高科技有限责任公司 一种铺粉质量检测方法、设备以及可读存储介质
CN109900707B (zh) * 2019-03-20 2021-07-02 湖南华曙高科技有限责任公司 一种铺粉质量检测方法、设备以及可读存储介质
KR20220094593A (ko) * 2020-12-29 2022-07-06 부산대학교 산학협력단 표면결함검출 스캐너를 위한 이미지 데이터 저장 장치 및 방법
KR102595278B1 (ko) * 2020-12-29 2023-10-27 부산대학교 산학협력단 표면결함검출 스캐너를 위한 이미지 데이터 저장 장치 및 방법
US11961217B2 (en) 2020-12-29 2024-04-16 Pusan National University Industry—University Cooperation Foundation Device and method for storing image data for surface defect detection scanner
CN116973311A (zh) * 2023-09-22 2023-10-31 成都中嘉微视科技有限公司 一种膜上膜下异物的检测装置及检测方法
CN116973311B (zh) * 2023-09-22 2023-12-12 成都中嘉微视科技有限公司 一种膜上膜下异物的检测装置及检测方法

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