JP2013250188A5 - - Google Patents
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- JP2013250188A5 JP2013250188A5 JP2012125889A JP2012125889A JP2013250188A5 JP 2013250188 A5 JP2013250188 A5 JP 2013250188A5 JP 2012125889 A JP2012125889 A JP 2012125889A JP 2012125889 A JP2012125889 A JP 2012125889A JP 2013250188 A5 JP2013250188 A5 JP 2013250188A5
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- 238000007689 inspection Methods 0.000 claims description 31
- 230000007547 defect Effects 0.000 claims description 17
- 230000000737 periodic effect Effects 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims 10
- 238000003384 imaging method Methods 0.000 claims 4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012125889A JP2013250188A (ja) | 2012-06-01 | 2012-06-01 | 欠陥検出装置、欠陥検出方法、および欠陥検出プログラム |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012125889A JP2013250188A (ja) | 2012-06-01 | 2012-06-01 | 欠陥検出装置、欠陥検出方法、および欠陥検出プログラム |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2013250188A JP2013250188A (ja) | 2013-12-12 |
| JP2013250188A5 true JP2013250188A5 (enExample) | 2015-06-18 |
Family
ID=49849007
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012125889A Withdrawn JP2013250188A (ja) | 2012-06-01 | 2012-06-01 | 欠陥検出装置、欠陥検出方法、および欠陥検出プログラム |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2013250188A (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6329397B2 (ja) * | 2014-03-07 | 2018-05-23 | 株式会社ダイヘン | 画像検査装置及び画像検査方法 |
| KR101711192B1 (ko) | 2014-08-19 | 2017-03-14 | 삼성전자 주식회사 | 전기-광학 변조기, 및 그 전기-광학 변조기를 포함한 검사 장치 |
| CN109900707B (zh) * | 2019-03-20 | 2021-07-02 | 湖南华曙高科技有限责任公司 | 一种铺粉质量检测方法、设备以及可读存储介质 |
| KR102595278B1 (ko) | 2020-12-29 | 2023-10-27 | 부산대학교 산학협력단 | 표면결함검출 스캐너를 위한 이미지 데이터 저장 장치 및 방법 |
| CN116973311B (zh) * | 2023-09-22 | 2023-12-12 | 成都中嘉微视科技有限公司 | 一种膜上膜下异物的检测装置及检测方法 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09145638A (ja) * | 1995-11-24 | 1997-06-06 | Kawasaki Steel Corp | 表面欠陥検査方法及び装置 |
| JP2000329699A (ja) * | 1999-05-20 | 2000-11-30 | Kobe Steel Ltd | 欠陥検査方法及びその装置 |
| JP5147287B2 (ja) * | 2006-05-23 | 2013-02-20 | パナソニック株式会社 | 画像処理装置、画像処理方法、プログラム、記録媒体および集積回路 |
| JP2008070242A (ja) * | 2006-09-14 | 2008-03-27 | Seiko Epson Corp | ノイズ除去方法および装置、ムラ欠陥検査方法および装置 |
| JP4820971B2 (ja) * | 2008-03-08 | 2011-11-24 | 関東自動車工業株式会社 | 表面検査方法 |
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2012
- 2012-06-01 JP JP2012125889A patent/JP2013250188A/ja not_active Withdrawn