JP2013247113A5 - - Google Patents
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- Publication number
- JP2013247113A5 JP2013247113A5 JP2013102688A JP2013102688A JP2013247113A5 JP 2013247113 A5 JP2013247113 A5 JP 2013247113A5 JP 2013102688 A JP2013102688 A JP 2013102688A JP 2013102688 A JP2013102688 A JP 2013102688A JP 2013247113 A5 JP2013247113 A5 JP 2013247113A5
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- ctf
- phase plate
- phase
- phase shift
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims 25
- 230000010363 phase shift Effects 0.000 claims 16
- 238000010894 electron beam technology Methods 0.000 claims 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 2
- 229910021389 graphene Inorganic materials 0.000 claims 2
- 238000003384 imaging method Methods 0.000 claims 2
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP12168997.0 | 2012-05-23 | ||
| EP20120168997 EP2667399A1 (en) | 2012-05-23 | 2012-05-23 | Improved phase plate for a TEM |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013247113A JP2013247113A (ja) | 2013-12-09 |
| JP2013247113A5 true JP2013247113A5 (cg-RX-API-DMAC7.html) | 2016-03-31 |
| JP6027942B2 JP6027942B2 (ja) | 2016-11-16 |
Family
ID=46149231
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013102688A Active JP6027942B2 (ja) | 2012-05-23 | 2013-05-15 | Ｔｅｍ用位相板 |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US8772716B2 (cg-RX-API-DMAC7.html) |
| EP (1) | EP2667399A1 (cg-RX-API-DMAC7.html) |
| JP (1) | JP6027942B2 (cg-RX-API-DMAC7.html) |
| CN (1) | CN103560067B (cg-RX-API-DMAC7.html) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2667399A1 (en) * | 2012-05-23 | 2013-11-27 | FEI Company | Improved phase plate for a TEM |
| EP2690648B1 (en) * | 2012-07-26 | 2014-10-15 | Fei Company | Method of preparing and imaging a lamella in a particle-optical apparatus |
| TWI544513B (zh) * | 2012-12-18 | 2016-08-01 | 中央研究院 | 可釋出電荷的晶片式薄膜哲尼克相位板及用其觀察有機材料的方法 |
| JP6286270B2 (ja) | 2013-04-25 | 2018-02-28 | エフ イー アイ カンパニＦｅｉ Ｃｏｍｐａｎｙ | 透過型電子顕微鏡内で位相版を用いる方法 |
| DE102013019297A1 (de) | 2013-11-19 | 2015-05-21 | Fei Company | Phasenplatte für ein Transmissionselektronenmikroskop |
| EP2881970A1 (en) | 2013-12-04 | 2015-06-10 | Fei Company | Method of producing a freestanding thin film of nano-crystalline carbon |
| US9953802B2 (en) * | 2014-01-21 | 2018-04-24 | Ramot At Tel-Aviv University Ltd. | Method and device for manipulating particle beam |
| JP2016110767A (ja) * | 2014-12-04 | 2016-06-20 | 日本電子株式会社 | 荷電粒子ビーム装置および画像取得方法 |
| JP2016170951A (ja) * | 2015-03-12 | 2016-09-23 | 日本電子株式会社 | 位相板およびその製造方法、ならびに電子顕微鏡 |
| US10109453B2 (en) * | 2015-03-18 | 2018-10-23 | Battelle Memorial Institute | Electron beam masks for compressive sensors |
| US10170274B2 (en) | 2015-03-18 | 2019-01-01 | Battelle Memorial Institute | TEM phase contrast imaging with image plane phase grating |
| US10580614B2 (en) | 2016-04-29 | 2020-03-03 | Battelle Memorial Institute | Compressive scanning spectroscopy |
| US10535497B2 (en) * | 2016-08-22 | 2020-01-14 | Hitachi High-Technologies Corporation | Electron microscope and imaging method |
| US10295677B2 (en) | 2017-05-08 | 2019-05-21 | Battelle Memorial Institute | Systems and methods for data storage and retrieval |
| JP7051591B2 (ja) * | 2018-06-05 | 2022-04-11 | 株式会社日立製作所 | 透過電子顕微鏡 |
| WO2020243268A1 (en) | 2019-05-28 | 2020-12-03 | The Board Of Trustees Of The Leland Stanford Junior University | Optically-addressed phase modulator for electron beams |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3773389B2 (ja) * | 2000-03-27 | 2006-05-10 | 日本電子株式会社 | 位相差電子顕微鏡用薄膜位相板並びに位相差電子顕微鏡及び位相板帯電防止法 |
| JP4328044B2 (ja) * | 2001-09-25 | 2009-09-09 | 日本電子株式会社 | 差分コントラスト電子顕微鏡および電子顕微鏡像のデータ処理方法 |
| DE10200645A1 (de) * | 2002-01-10 | 2003-07-24 | Leo Elektronenmikroskopie Gmbh | Elektronenmikroskop mit ringförmiger Beleuchtungsapertur |
| US7737412B2 (en) * | 2004-07-12 | 2010-06-15 | The Regents Of The University Of California | Electron microscope phase enhancement |
| JP4625317B2 (ja) * | 2004-12-03 | 2011-02-02 | ナガヤマ アイピー ホールディングス リミテッド ライアビリティ カンパニー | 位相差電子顕微鏡用位相板及びその製造方法並びに位相差電子顕微鏡 |
| DE102005040267B4 (de) * | 2005-08-24 | 2007-12-27 | Universität Karlsruhe | Verfahren zum Herstellen einer mehrschichtigen elektrostatischen Linsenanordnung, insbesondere einer Phasenplatte und derartige Phasenplatte |
| EP2091062A1 (en) | 2008-02-13 | 2009-08-19 | FEI Company | TEM with aberration corrector and phase plate |
| EP2131385A1 (en) * | 2008-06-05 | 2009-12-09 | FEI Company | Hybrid phase plate |
| US7977633B2 (en) * | 2008-08-27 | 2011-07-12 | Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E. V. | Phase plate, in particular for an electron microscope |
| JP4896106B2 (ja) * | 2008-09-30 | 2012-03-14 | 株式会社日立ハイテクノロジーズ | 電子顕微鏡 |
| EP2400522A1 (en) | 2010-06-24 | 2011-12-28 | Fei Company | Blocking member for use in the diffraction plane of a TEM |
| CN102971824B (zh) | 2010-07-14 | 2016-01-13 | Fei公司 | 用于扫描共焦电子显微镜的改进对比度 |
| EP2485239A1 (en) * | 2011-02-07 | 2012-08-08 | FEI Company | Method for centering an optical element in a TEM comprising a contrast enhancing element |
| EP2667399A1 (en) * | 2012-05-23 | 2013-11-27 | FEI Company | Improved phase plate for a TEM |
| EP2704178B1 (en) | 2012-08-30 | 2014-08-20 | Fei Company | Imaging a sample in a TEM equipped with a phase plate |
-
2012
- 2012-05-23 EP EP20120168997 patent/EP2667399A1/en not_active Withdrawn
-
2013
- 2013-05-15 JP JP2013102688A patent/JP6027942B2/ja active Active
- 2013-05-16 US US13/896,103 patent/US8772716B2/en active Active
- 2013-05-23 CN CN201310194422.2A patent/CN103560067B/zh active Active
-
2014
- 2014-05-07 US US14/271,828 patent/US9006652B2/en active Active
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