JP2013243209A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP2013243209A JP2013243209A JP2012114599A JP2012114599A JP2013243209A JP 2013243209 A JP2013243209 A JP 2013243209A JP 2012114599 A JP2012114599 A JP 2012114599A JP 2012114599 A JP2012114599 A JP 2012114599A JP 2013243209 A JP2013243209 A JP 2013243209A
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- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
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- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45117—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
- H01L2224/45124—Aluminium (Al) as principal constituent
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45144—Gold (Au) as principal constituent
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- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/4847—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/491—Disposition
- H01L2224/4912—Layout
- H01L2224/4917—Crossed wires
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- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/161—Cap
- H01L2924/1615—Shape
- H01L2924/16195—Flat cap [not enclosing an internal cavity]
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Abstract
【解決手段】 絶縁基板1と、絶縁基板1に設けられた接続パッド2と、複数の電極3aを有しており、絶縁基板1に搭載された半導体素子3と、複数の接続パッド2と複数の電極3aとをそれぞれに接続する複数のボンディングワイヤ4とを備えており、複数のボンディングワイヤ4は、平面視において互いに交差し合う第1のボンディングワイヤ4aおよび第2のボンディングワイヤ4bを含んでおり、第1および第2のボンディングワイヤ4a、4bは、それぞれのループ形状が互いに異なっているとともに、平面視において交差し合う部分において上下に離間している半導体装置9である。第1および第2のボンディングワイヤ4a、4bは、ループ形状が互いに異なるため上下方向の離間が容易であり、電気的な短絡が抑制される。
【選択図】 図1
Description
し合う第1のボンディングワイヤおよび第2のボンディングワイヤを含んでおり、前記第1のボンディングワイヤおよび前記第2のボンディングワイヤは、それぞれのループ形状が互いに異なっているとともに、平面視において交差し合う部分において上下に離間していることを特徴とする。
位の供給が行なわれる。以下の説明において、信号用、接地用および電源用の電極は、特に区別することなく、単に電極3aとして示している。
くするために蓋体6を省略している。
2のボンディングワイヤ4a、4bを含むのは、例えば次のような場合である。なお、この段落における以下の説明については図示せず、各部位の符号も省略する。一般に、複数の電極を有する半導体が絶縁基板に搭載されるとき、絶縁基板における各電極と対応する位置(複数の電極とそれぞれに隣り合う位置等)に接続パッドが設けられる。そのため、複数の接続パッドと複数の電極とをそれぞれに接続する複数のボンディングワイヤは、平面視において互いに重ならない。しかし、例えば、互いに電極の配置が異なる複数の半導体素子が、接続パッドの位置が同じである一つのタイプの半導体素子搭載用基板(例えば上記のように、絶縁基板1および接続パッド2を有するもの)に搭載できれば、複数のタイプの半導体素子搭載用基板を準備する必要がない。そのため、半導体装置としての生産性および経済性等の点で有利になる。
)からなる場合であれば、約10〜30μmに設定すればよい。
1a・・搭載部
2・・・接続パッド
3・・・半導体素子
3a・・電極
4・・・ボンディングワイヤ
4a・・第1のボンディングワイヤ
4b・・第2のボンディングワイヤ
5・・・接続導体
6・・・蓋体
7・・・金属層
9・・・半導体装置
Claims (3)
- 絶縁基板と、
該絶縁基板に設けられた複数の接続パッドと、
複数の電極を有しており、前記絶縁基板に搭載された半導体素子と、
前記複数の接続パッドと前記複数の電極とをそれぞれに接続する複数のボンディングワイヤとを備える半導体装置であって、
前記複数のボンディングワイヤは、平面視において互いに交差し合う第1のボンディングワイヤおよび第2のボンディングワイヤを含んでおり、
前記第1のボンディングワイヤおよび前記第2のボンディングワイヤは、それぞれのループ形状が互いに異なっているとともに、平面視において交差し合う部分において上下に離間していることを特徴とする半導体装置。 - 前記第1のボンディングワイヤは最高位置が前記電極に近いループ形状であり、前記第2のボンディングワイヤは最高位置が前記接続パッドに近いループ形状であることを特徴とする請求項1記載の半導体装置。
- 前記第2のボンディングワイヤは、金属層を介して前記電極に接続されていることを特徴とする請求項2記載の半導体装置。
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JP2012114599A JP2013243209A (ja) | 2012-05-18 | 2012-05-18 | 半導体装置 |
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JP2012114599A JP2013243209A (ja) | 2012-05-18 | 2012-05-18 | 半導体装置 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016058441A (ja) * | 2014-09-05 | 2016-04-21 | 国立大学法人横浜国立大学 | 超伝導集積回路装置 |
US11335661B2 (en) * | 2018-03-22 | 2022-05-17 | Nippon Telegraph And Telephone Corporation | Wire bonding structure |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003068780A (ja) * | 2001-08-30 | 2003-03-07 | Matsushita Electric Ind Co Ltd | 半導体装置 |
JP2008034567A (ja) * | 2006-07-27 | 2008-02-14 | Fujitsu Ltd | 半導体装置及びその製造方法 |
-
2012
- 2012-05-18 JP JP2012114599A patent/JP2013243209A/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003068780A (ja) * | 2001-08-30 | 2003-03-07 | Matsushita Electric Ind Co Ltd | 半導体装置 |
JP2008034567A (ja) * | 2006-07-27 | 2008-02-14 | Fujitsu Ltd | 半導体装置及びその製造方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016058441A (ja) * | 2014-09-05 | 2016-04-21 | 国立大学法人横浜国立大学 | 超伝導集積回路装置 |
US11335661B2 (en) * | 2018-03-22 | 2022-05-17 | Nippon Telegraph And Telephone Corporation | Wire bonding structure |
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