JP2013217786A - 熱型電磁波検出素子、熱型電磁波検出素子の製造方法、熱型電磁波検出装置および電子機器 - Google Patents

熱型電磁波検出素子、熱型電磁波検出素子の製造方法、熱型電磁波検出装置および電子機器 Download PDF

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JP2013217786A
JP2013217786A JP2012089060A JP2012089060A JP2013217786A JP 2013217786 A JP2013217786 A JP 2013217786A JP 2012089060 A JP2012089060 A JP 2012089060A JP 2012089060 A JP2012089060 A JP 2012089060A JP 2013217786 A JP2013217786 A JP 2013217786A
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electromagnetic wave
substrate
wave detection
detection element
thermal electromagnetic
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JP2013217786A5 (enExample
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Takashi Noda
貴史 野田
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Seiko Epson Corp
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Seiko Epson Corp
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  • Radiation Pyrometers (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
JP2012089060A 2012-04-10 2012-04-10 熱型電磁波検出素子、熱型電磁波検出素子の製造方法、熱型電磁波検出装置および電子機器 Withdrawn JP2013217786A (ja)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016149443A (ja) * 2015-02-12 2016-08-18 株式会社日立製作所 放射線検出素子、放射線検出器および核医学診断装置ならびに放射線検出素子の製造方法
JP2023033863A (ja) * 2021-08-30 2023-03-13 Tdk株式会社 構造体及び電磁波センサ

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63223531A (ja) * 1987-03-13 1988-09-19 Taiyo Yuden Co Ltd 赤外線検出器
EP1653205A1 (fr) * 2004-10-28 2006-05-03 Commissariat A L'energie Atomique Détecteur bolométrique à isolation thermique par constriction
WO2007129547A1 (ja) * 2006-05-10 2007-11-15 Murata Manufacturing Co., Ltd. 赤外線センサおよびその製造方法
JP2008064516A (ja) * 2006-09-06 2008-03-21 Hioki Ee Corp 赤外線センサおよび赤外線センサの製造方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63223531A (ja) * 1987-03-13 1988-09-19 Taiyo Yuden Co Ltd 赤外線検出器
EP1653205A1 (fr) * 2004-10-28 2006-05-03 Commissariat A L'energie Atomique Détecteur bolométrique à isolation thermique par constriction
FR2877492A1 (fr) * 2004-10-28 2006-05-05 Commissariat Energie Atomique Detecteur bolometrique a isolation thermique par constriction et dispositif de detection infrarouge mettant en oeuvre un tel detecteur bolometrique
JP2006126203A (ja) * 2004-10-28 2006-05-18 Commiss Energ Atom 収縮による熱分離を有する放射検出器およびその放射検出器を用いた赤外線検出装置
US20070205364A1 (en) * 2004-10-28 2007-09-06 Commissariat A L'energie Atomique Bolometric detector with thermal isolation by constriction and device for detecting infrared radiation that uses such a bolometric detector
WO2007129547A1 (ja) * 2006-05-10 2007-11-15 Murata Manufacturing Co., Ltd. 赤外線センサおよびその製造方法
US20090050808A1 (en) * 2006-05-10 2009-02-26 Murata Manufacturing Co., Ltd. Infrared sensor and method for producing same
JP2008064516A (ja) * 2006-09-06 2008-03-21 Hioki Ee Corp 赤外線センサおよび赤外線センサの製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016149443A (ja) * 2015-02-12 2016-08-18 株式会社日立製作所 放射線検出素子、放射線検出器および核医学診断装置ならびに放射線検出素子の製造方法
JP2023033863A (ja) * 2021-08-30 2023-03-13 Tdk株式会社 構造体及び電磁波センサ
JP7718914B2 (ja) 2021-08-30 2025-08-05 Tdk株式会社 構造体及び電磁波センサ

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