JP2013217670A5 - - Google Patents
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- Publication number
- JP2013217670A5 JP2013217670A5 JP2012085895A JP2012085895A JP2013217670A5 JP 2013217670 A5 JP2013217670 A5 JP 2013217670A5 JP 2012085895 A JP2012085895 A JP 2012085895A JP 2012085895 A JP2012085895 A JP 2012085895A JP 2013217670 A5 JP2013217670 A5 JP 2013217670A5
- Authority
- JP
- Japan
- Prior art keywords
- signal
- interference
- light
- measurement
- processing unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000005259 measurement Methods 0.000 claims description 32
- 238000012545 processing Methods 0.000 claims description 20
- 230000003287 optical effect Effects 0.000 claims description 5
- 238000012937 correction Methods 0.000 claims 12
- 238000000691 measurement method Methods 0.000 claims 4
- 238000000034 method Methods 0.000 claims 3
- 238000013461 design Methods 0.000 claims 2
- 230000035559 beat frequency Effects 0.000 claims 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012085895A JP2013217670A (ja) | 2012-04-04 | 2012-04-04 | 計測装置及び計測方法 |
| EP13158297.5A EP2648044A3 (en) | 2012-04-04 | 2013-03-08 | Measurement apparatus and measurement method |
| US13/804,006 US20130268225A1 (en) | 2012-04-04 | 2013-03-14 | Measurement apparatus and measurement method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012085895A JP2013217670A (ja) | 2012-04-04 | 2012-04-04 | 計測装置及び計測方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2013217670A JP2013217670A (ja) | 2013-10-24 |
| JP2013217670A5 true JP2013217670A5 (enExample) | 2015-05-21 |
Family
ID=47827075
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012085895A Withdrawn JP2013217670A (ja) | 2012-04-04 | 2012-04-04 | 計測装置及び計測方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20130268225A1 (enExample) |
| EP (1) | EP2648044A3 (enExample) |
| JP (1) | JP2013217670A (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014109481A (ja) * | 2012-11-30 | 2014-06-12 | Canon Inc | 計測方法及び計測装置 |
| WO2016154780A1 (zh) * | 2015-03-27 | 2016-10-06 | 浙江理工大学 | 激光干涉波长杠杆式绝对距离测量装置与方法 |
| JP7293078B2 (ja) * | 2019-10-08 | 2023-06-19 | 株式会社ミツトヨ | 解析装置、解析方法、干渉測定システム、およびプログラム |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5828454A (en) * | 1996-07-29 | 1998-10-27 | Gust; Gary R. | Optical heterodyne interferometer for measurement of ocular displacement |
| US6147755A (en) * | 1999-04-01 | 2000-11-14 | Trw Inc. | Dynamic optical phase state detector |
| US7428685B2 (en) * | 2002-07-08 | 2008-09-23 | Zygo Corporation | Cyclic error compensation in interferometry systems |
| EP1543291A4 (en) * | 2002-09-26 | 2006-05-10 | Prime Photonics Inc | STABILIZATION OF THE ACTIVE Q POINT FOR LINEAR INTERFEROMETER SENSORS |
| US7640140B2 (en) * | 2003-03-07 | 2009-12-29 | Sensys Medical, Inc. | Method of processing noninvasive spectra |
| CN101015124B (zh) * | 2004-09-08 | 2011-04-20 | 富士通半导体股份有限公司 | Pll频率合成器 |
| JP4465451B2 (ja) | 2004-12-15 | 2010-05-19 | 独立行政法人産業技術総合研究所 | 光干渉計の周期誤差低減方法および装置 |
| US7576868B2 (en) * | 2007-06-08 | 2009-08-18 | Zygo Corporation | Cyclic error compensation in interferometry systems |
| US7956630B1 (en) * | 2008-04-15 | 2011-06-07 | Veeco Instruments, Inc. | Real-time effective-wavelength error correction for HDVSI |
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2012
- 2012-04-04 JP JP2012085895A patent/JP2013217670A/ja not_active Withdrawn
-
2013
- 2013-03-08 EP EP13158297.5A patent/EP2648044A3/en not_active Withdrawn
- 2013-03-14 US US13/804,006 patent/US20130268225A1/en not_active Abandoned