JP2013216560A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2013216560A5 JP2013216560A5 JP2012193841A JP2012193841A JP2013216560A5 JP 2013216560 A5 JP2013216560 A5 JP 2013216560A5 JP 2012193841 A JP2012193841 A JP 2012193841A JP 2012193841 A JP2012193841 A JP 2012193841A JP 2013216560 A5 JP2013216560 A5 JP 2013216560A5
- Authority
- JP
- Japan
- Prior art keywords
- forming material
- film
- alcohol
- material solution
- film forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims 8
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims 3
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-Ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 claims 2
- XNWFRZJHXBZDAG-UHFFFAOYSA-N ethylene glycol monomethyl ether Chemical group COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 2
- 239000003960 organic solvent Substances 0.000 claims 2
- 125000004430 oxygen atoms Chemical group O* 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 125000003158 alcohol group Chemical group 0.000 claims 1
- 125000004429 atoms Chemical group 0.000 claims 1
- 150000001875 compounds Chemical class 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N titanium Chemical group [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012193841A JP6116834B2 (ja) | 2011-09-05 | 2012-09-04 | Ｉｖ族金属酸化物膜の作製方法 |
Applications Claiming Priority (9)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011192739 | 2011-09-05 | ||
| JP2011192739 | 2011-09-05 | ||
| JP2011218284 | 2011-09-30 | ||
| JP2011218284 | 2011-09-30 | ||
| JP2012026203 | 2012-02-09 | ||
| JP2012026203 | 2012-02-09 | ||
| JP2012058232 | 2012-03-15 | ||
| JP2012058232 | 2012-03-15 | ||
| JP2012193841A JP6116834B2 (ja) | 2011-09-05 | 2012-09-04 | Ｉｖ族金属酸化物膜の作製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013216560A JP2013216560A (ja) | 2013-10-24 |
| JP2013216560A5 true JP2013216560A5 (es) | 2015-10-08 |
| JP6116834B2 JP6116834B2 (ja) | 2017-04-19 |
Family
ID=49589149
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012193841A Active JP6116834B2 (ja) | 2011-09-05 | 2012-09-04 | Ｉｖ族金属酸化物膜の作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6116834B2 (es) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6213173B2 (ja) * | 2013-11-14 | 2017-10-18 | 東ソー株式会社 | チタン酸化物膜の製造方法及びチタン酸化物膜 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4585256B2 (ja) * | 2004-09-06 | 2010-11-24 | 日本曹達株式会社 | チタン化合物の微粒子を含む分散体の製造方法 |
| JP2006096577A (ja) * | 2004-09-28 | 2006-04-13 | Tokyo Institute Of Technology | 金属酸化物膜、金属酸化物膜の製造方法および成形品 |
| JP5537986B2 (ja) * | 2010-02-18 | 2014-07-02 | 住友化学株式会社 | アモルファス酸化チタン分散液およびその製造方法 |
-
2012
- 2012-09-04 JP JP2012193841A patent/JP6116834B2/ja active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| WO2015116297A3 (en) | Sequential processing with vapor treatment of thin films of organic-inorganic perovskite materials | |
| JP2011205089A5 (ja) | 半導体膜の作製方法 | |
| JP2008290071A5 (es) | ||
| JP2011135095A5 (es) | ||
| NI201400015A (es) | Película fotocatalítica para la fumigación de suelos | |
| JP2014523389A5 (es) | ||
| JP2013194055A5 (es) | ||
| JP2016530134A5 (es) | ||
| JP2015061952A5 (es) | ||
| JP2012162804A5 (es) | ||
| JP2016503113A5 (es) | ||
| JP2013028864A5 (ja) | 銀ナノ粒子を製造するプロセスおよび導電性要素を製造するプロセス | |
| JP2010034523A5 (es) | ||
| BR112014016101A2 (pt) | derivados da heteroarilpiperidina e heteroarilpiperazina como fungicidas | |
| JP2012009432A5 (ja) | 蓄電装置の作製方法 | |
| JP2014521346A5 (es) | ||
| JP2014241409A5 (ja) | 酸化物半導体膜の作製方法 | |
| JP2016065297A5 (es) | ||
| JP2015115404A5 (es) | ||
| AR090940A1 (es) | Procedimiento para la fabricacion de una forma farmaceutica que comprende nifedipino y candesartan cilexetilo | |
| JP2014503783A5 (es) | ||
| JP2014518867A5 (es) | ||
| DE112011102835T8 (de) | Wasserreaktives, Al-basiertes Verbundsmaterial, wasserreaktiver, Al-basierter,thermisch gespritzter Film, Verfahren für die Herstellung eines solchen Al-basierten, thermisch gespritzten Films und Bestandteil für eine Filmbildungskammer | |
| JP2011148247A5 (es) | ||
| JP2015143162A5 (ja) | 酸化グラフェン及びグラフェン |