JP2013214737A - 基板処理方法及び基板処理装置 - Google Patents
基板処理方法及び基板処理装置 Download PDFInfo
- Publication number
- JP2013214737A JP2013214737A JP2013046158A JP2013046158A JP2013214737A JP 2013214737 A JP2013214737 A JP 2013214737A JP 2013046158 A JP2013046158 A JP 2013046158A JP 2013046158 A JP2013046158 A JP 2013046158A JP 2013214737 A JP2013214737 A JP 2013214737A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- gas
- pure water
- cleaning
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
- H01L21/02068—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers
- H01L21/02074—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers the processing being a planarization of conductive layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68728—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of separate clamping members, e.g. clamping fingers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68792—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the construction of the shaft
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
【解決手段】基板Wの表面に液体Dを供給しながら、基板Wの表面に供給された液体Dの表面上に、該表面を覆って大気中の酸素から液体を遮断するガスGのカーテン(ガスカーテン)が形成されるように、基板Wの表面に向けてガスGを供給する。
【選択図】図1
Description
図1は、本発明の第1実施形態の基板処理装置の概要を示す図である。図1に示す基板処理装置は、例えばダマシン法によって基板表面に銅配線を形成する時に使用される。ダマシン法では、化学機械研磨(CMP)を行って不要な銅めっき膜を除去し、薬液で洗浄した後の基板表面を、防食剤を含まない純水(脱イオン水)を使用したリンス液でリンス処理する。
まず、モータ415により基板Wおよび回転カバー450を一体に回転させる。この状態で、純水供給ノズル454および純水供給ノズル463から純水を基板Wの表面および裏面に供給し、基板Wの全面を純水でリンスする。基板Wに供給された純水は、遠心力により基板Wの表面および裏面全体に広がり、これにより基板Wの全体がリンスされる。このリンス時に、純水供給ノズル454から基板Wの表面にガス(CO2ガス)を同時に供給し、これによって、前述と同様に、基板の表面の全面に拡がる純水の表面を一様に覆って空気中の酸素を遮断するガスのカーテン(ガスカーテン)を形成する。回転する基板Wから振り落とされた純水は、回転カバー450に捕らえられ、液体排出孔451に流れ込む。基板Wのリンス処理の間、2つの流体ノズル460,461は、基板Wから離れた所定の待機位置にある。
まず、ロードポート12内の基板カセットから取り出した基板の表面を、研磨ユニット14a〜14dのいずれかに搬送して研磨する。そして、研磨後の基板を第1洗浄ユニット16に搬送する。
16 第1洗浄ユニット(基板処理装置)
18 第2洗浄ユニット(基板処理装置)
20 乾燥ユニット(基板処理装置)
40 洗浄槽
44 揺動アーム
46 2流体ノズル
60 ペンシル型洗浄具
62 純水供給ノズル(液体供給ノズル)
72 純水供給ライン
76 ガス供給ライン
102 定盤
104 純水供給ノズル(液体供給ノズル)
106 内管
108 外管
110 純水通路
112 ガス通路
120 純水供給ライン
128 ガス供給ライン
307,308 ロール洗浄部材
317 純水供給ノズル(液体供給ノズル)
332 純水供給ライン
336 ガス供給ライン
460,461 流体ノズル
454 純水供給ノズル(液体供給ノズル)
492 純水供給ライン
496 ガス供給ライン
502 揺動アーム
Claims (4)
- 基板表面に液体を供給しながら、基板表面に供給された液体の表面上に、該表面を覆って大気中の酸素を遮断するガスカーテンが形成されるように、基板表面に向けてガスを供給することを特徴とする基板処理方法。
- 前記ガスは、大気よりも比重の重いガスであることを特徴とする請求項1記載の基板処理方法。
- 基板表面に向けて配置され、内管と外管とを有する2重管構造の液体供給ノズルを備え、前記内管の内部は液体が通過する液体通路を構成し、前記内管と前記外管との隙間はガスが通過するガス通路を構成することを特徴とする基板処理装置。
- 前記ガスは、大気より重い比重のガスであることを特徴とする請求項3記載の基板処理装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013046158A JP2013214737A (ja) | 2012-03-09 | 2013-03-08 | 基板処理方法及び基板処理装置 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012052724 | 2012-03-09 | ||
JP2012052724 | 2012-03-09 | ||
JP2013046158A JP2013214737A (ja) | 2012-03-09 | 2013-03-08 | 基板処理方法及び基板処理装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2013214737A true JP2013214737A (ja) | 2013-10-17 |
Family
ID=49116869
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013046158A Pending JP2013214737A (ja) | 2012-03-09 | 2013-03-08 | 基板処理方法及び基板処理装置 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP2013214737A (ja) |
TW (1) | TW201342460A (ja) |
WO (1) | WO2013133401A1 (ja) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015103608A (ja) * | 2013-11-22 | 2015-06-04 | 株式会社荏原製作所 | 基板洗浄装置および基板処理装置 |
WO2015147237A1 (ja) * | 2014-03-28 | 2015-10-01 | 株式会社Screenホールディングス | 基板処理装置および基板処理方法 |
JP2017147334A (ja) * | 2016-02-17 | 2017-08-24 | 株式会社荏原製作所 | 基板の裏面を洗浄する装置および方法 |
US10090189B2 (en) | 2013-11-19 | 2018-10-02 | Ebara Corporation | Substrate cleaning apparatus comprising a second jet nozzle surrounding a first jet nozzle |
JP2019195109A (ja) * | 2016-05-09 | 2019-11-07 | 株式会社荏原製作所 | 基板洗浄装置 |
US10651057B2 (en) | 2017-05-01 | 2020-05-12 | Ebara Corporation | Apparatus and method for cleaning a back surface of a substrate |
JP2021002686A (ja) * | 2014-11-11 | 2021-01-07 | 株式会社荏原製作所 | 基板洗浄装置 |
US10991602B2 (en) | 2016-05-09 | 2021-04-27 | Ebara Corporation | Substrate washing device |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6341035B2 (ja) * | 2014-09-25 | 2018-06-13 | 東京エレクトロン株式会社 | 基板液処理方法、基板液処理装置、及び記憶媒体 |
US11728185B2 (en) | 2021-01-05 | 2023-08-15 | Applied Materials, Inc. | Steam-assisted single substrate cleaning process and apparatus |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10209103A (ja) * | 1997-01-17 | 1998-08-07 | Kaijo Corp | 基板洗浄装置 |
JPH10209104A (ja) * | 1997-01-17 | 1998-08-07 | Kaijo Corp | 超音波シャワー装置 |
JP2010258125A (ja) * | 2009-04-23 | 2010-11-11 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006120817A (ja) * | 2004-10-21 | 2006-05-11 | Dainippon Screen Mfg Co Ltd | 基板処理装置および基板処理方法 |
-
2013
- 2013-03-08 WO PCT/JP2013/056413 patent/WO2013133401A1/ja active Application Filing
- 2013-03-08 JP JP2013046158A patent/JP2013214737A/ja active Pending
- 2013-03-11 TW TW102108420A patent/TW201342460A/zh unknown
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10209103A (ja) * | 1997-01-17 | 1998-08-07 | Kaijo Corp | 基板洗浄装置 |
JPH10209104A (ja) * | 1997-01-17 | 1998-08-07 | Kaijo Corp | 超音波シャワー装置 |
JP2010258125A (ja) * | 2009-04-23 | 2010-11-11 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10090189B2 (en) | 2013-11-19 | 2018-10-02 | Ebara Corporation | Substrate cleaning apparatus comprising a second jet nozzle surrounding a first jet nozzle |
JP2015103608A (ja) * | 2013-11-22 | 2015-06-04 | 株式会社荏原製作所 | 基板洗浄装置および基板処理装置 |
JP2018101790A (ja) * | 2013-11-22 | 2018-06-28 | 株式会社荏原製作所 | 基板洗浄装置および基板処理装置 |
WO2015147237A1 (ja) * | 2014-03-28 | 2015-10-01 | 株式会社Screenホールディングス | 基板処理装置および基板処理方法 |
JP2015192088A (ja) * | 2014-03-28 | 2015-11-02 | 株式会社Screenホールディングス | 基板処理装置および基板処理方法 |
JP2021002686A (ja) * | 2014-11-11 | 2021-01-07 | 株式会社荏原製作所 | 基板洗浄装置 |
JP7050875B2 (ja) | 2014-11-11 | 2022-04-08 | 株式会社荏原製作所 | 基板洗浄装置 |
JP2017147334A (ja) * | 2016-02-17 | 2017-08-24 | 株式会社荏原製作所 | 基板の裏面を洗浄する装置および方法 |
JP2019195109A (ja) * | 2016-05-09 | 2019-11-07 | 株式会社荏原製作所 | 基板洗浄装置 |
US10991602B2 (en) | 2016-05-09 | 2021-04-27 | Ebara Corporation | Substrate washing device |
TWI772294B (zh) * | 2016-05-09 | 2022-08-01 | 日商荏原製作所股份有限公司 | 基板清洗裝置 |
US10651057B2 (en) | 2017-05-01 | 2020-05-12 | Ebara Corporation | Apparatus and method for cleaning a back surface of a substrate |
Also Published As
Publication number | Publication date |
---|---|
TW201342460A (zh) | 2013-10-16 |
WO2013133401A1 (ja) | 2013-09-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5866227B2 (ja) | 基板洗浄方法 | |
JP2013214737A (ja) | 基板処理方法及び基板処理装置 | |
US11676827B2 (en) | Substrate cleaning apparatus, substrate cleaning method, substrate processing apparatus, and substrate drying apparatus | |
JP5712061B2 (ja) | 基板処理方法及び基板処理ユニット | |
US20140083468A1 (en) | Substrate processing apparatus | |
TWI705493B (zh) | 基板洗淨裝置 | |
US20130098397A1 (en) | Substrate cleaning method and substrate cleaning apparatus | |
JP6502430B2 (ja) | 基板処理装置 | |
WO2018030254A1 (ja) | 化学機械研磨後の基板洗浄技術 | |
US10991602B2 (en) | Substrate washing device | |
KR20140120838A (ko) | 기판 처리 방법 | |
JP7290695B2 (ja) | 超音波洗浄装置および洗浄具のクリーニング装置 | |
JP2015099851A (ja) | 基板洗浄装置および基板処理装置 | |
KR20140086846A (ko) | 기판 세정 장치 및 기판 세정 방법 | |
JP2015015284A (ja) | 基板洗浄装置および基板洗浄方法 | |
JP6345393B2 (ja) | 基板洗浄装置および基板洗浄方法 | |
JP6339351B2 (ja) | 基板洗浄装置および基板処理装置 | |
JP6934918B2 (ja) | 基板洗浄装置 | |
US20230005762A1 (en) | Substrate drying device and substrate drying method | |
JP6431159B2 (ja) | 基板洗浄装置 | |
JP2017204495A (ja) | 基板洗浄装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20151202 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20160920 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20161117 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20170106 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20170124 |