JP2013207838A5 - - Google Patents
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- Publication number
- JP2013207838A5 JP2013207838A5 JP2012071561A JP2012071561A JP2013207838A5 JP 2013207838 A5 JP2013207838 A5 JP 2013207838A5 JP 2012071561 A JP2012071561 A JP 2012071561A JP 2012071561 A JP2012071561 A JP 2012071561A JP 2013207838 A5 JP2013207838 A5 JP 2013207838A5
- Authority
- JP
- Japan
- Prior art keywords
- flat plate
- recess
- cooling
- inlet
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001816 cooling Methods 0.000 description 11
- 239000000498 cooling water Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000000638 solvent extraction Methods 0.000 description 2
- 238000005192 partition Methods 0.000 description 1
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012071561A JP5859361B2 (ja) | 2012-03-27 | 2012-03-27 | リニアモータ冷却構造 |
| TW102108225A TWI499173B (zh) | 2012-03-27 | 2013-03-08 | Linear motor cooling structure |
| EP13001522.5A EP2645547A3 (en) | 2012-03-27 | 2013-03-25 | Linear motor cooling structure |
| US13/850,441 US9325222B2 (en) | 2012-03-27 | 2013-03-26 | Linear motor cooling structure |
| KR1020130032261A KR101535331B1 (ko) | 2012-03-27 | 2013-03-26 | 리니어모터 냉각구조 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012071561A JP5859361B2 (ja) | 2012-03-27 | 2012-03-27 | リニアモータ冷却構造 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013207838A JP2013207838A (ja) | 2013-10-07 |
| JP2013207838A5 true JP2013207838A5 (enExample) | 2013-11-21 |
| JP5859361B2 JP5859361B2 (ja) | 2016-02-10 |
Family
ID=48050382
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012071561A Active JP5859361B2 (ja) | 2012-03-27 | 2012-03-27 | リニアモータ冷却構造 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9325222B2 (enExample) |
| EP (1) | EP2645547A3 (enExample) |
| JP (1) | JP5859361B2 (enExample) |
| KR (1) | KR101535331B1 (enExample) |
| TW (1) | TWI499173B (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2808986B1 (de) * | 2013-05-27 | 2016-03-09 | Etel S. A.. | Kühlkörper für einen Linearmotor |
| EP2884638B1 (de) * | 2013-12-11 | 2021-05-26 | Etel S.A. | Kühlkörper für einen linearmotor |
| JPWO2015141591A1 (ja) * | 2014-03-19 | 2017-04-06 | 日立金属株式会社 | リニアモータ |
| EP3107195A1 (de) | 2015-06-16 | 2016-12-21 | InDriveTec AG | Linearmotorantriebssystem |
| JP6482401B2 (ja) * | 2015-06-19 | 2019-03-13 | 住友重機械工業株式会社 | リニアモータの冷却ユニット |
| WO2020061173A1 (en) | 2018-09-19 | 2020-03-26 | Hyperloop Technologies, Inc. | Homopolar linear synchronous machine |
| AT523101A1 (de) * | 2019-10-31 | 2021-05-15 | B & R Ind Automation Gmbh | Transporteinrichtung in Form eines Langstatorlinearmotors |
| AT523102A1 (de) * | 2019-10-31 | 2021-05-15 | B & R Ind Automation Gmbh | Transporteinrichtung in Form eines Langstatorlinearmotors |
| KR102831087B1 (ko) | 2023-11-20 | 2025-07-07 | 이노로보틱스 주식회사 | 수냉식 모터의 신뢰성 테스트를 수행하는 시스템 |
Family Cites Families (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4819744B1 (enExample) * | 1967-02-07 | 1973-06-15 | ||
| US4315300A (en) * | 1979-01-29 | 1982-02-09 | The United States Of America As Represented By The Secretary Of The Navy | Cooling arrangement for plug-in module assembly |
| US4306616A (en) * | 1980-02-04 | 1981-12-22 | Duke Manufacturing Co. | Refrigerated shelf for a food display counter |
| US4393565A (en) * | 1980-05-09 | 1983-07-19 | Wilson Welding Company, Inc. | Method of making a water-cooled electrode holder |
| US4342878A (en) * | 1980-05-09 | 1982-08-03 | Wilson Welding Company, Inc. | Water-cooled electrode holder |
| US4401870A (en) * | 1981-11-10 | 1983-08-30 | Hydro-Quebec | Modular suction-gas-cooled magnetic blast circuit breaker |
| US4397234A (en) * | 1981-12-30 | 1983-08-09 | International Business Machines Corporation | Electromagnetic print hammer coil assembly |
| JPH06254734A (ja) * | 1993-03-02 | 1994-09-13 | Canon Inc | Xyステージ装置およびこれに用いるリニアモータ |
| US5723917A (en) * | 1994-11-30 | 1998-03-03 | Anorad Corporation | Flat linear motor |
| US5864187A (en) * | 1997-03-27 | 1999-01-26 | Ford Global Technologies, Inc. | Fully enclosed linear motor armature |
| JP3643273B2 (ja) * | 1999-10-28 | 2005-04-27 | 株式会社ソディック | リニアモータのコイル装置およびその製造方法 |
| KR100432243B1 (ko) * | 2001-07-06 | 2004-05-22 | 삼익Lms주식회사 | 방열구조를 가진 리니어모터 |
| KR20030025419A (ko) * | 2001-09-20 | 2003-03-29 | 주식회사 져스텍 | 리니어모터 |
| JP4038652B2 (ja) * | 2001-11-30 | 2008-01-30 | 株式会社安川電機 | リニアモータ電機子およびリニアモータ |
| JP3809381B2 (ja) * | 2002-01-28 | 2006-08-16 | キヤノン株式会社 | リニアモータ、ステージ装置、露光装置及びデバイス製造方法 |
| US6806594B2 (en) * | 2002-02-20 | 2004-10-19 | Sumitomo Heavy Industries, Ltd. | Coil unit for linear motor |
| JP2003333822A (ja) * | 2002-05-13 | 2003-11-21 | Canon Inc | リニアモータ、これを有するステージ装置及び露光装置 |
| WO2004091079A1 (ja) * | 2003-04-07 | 2004-10-21 | Kabushiki Kaisha Yaskawa Denki | キャンド・リニアモータ電機子およびキャンド・リニアモータ |
| US6956308B2 (en) * | 2003-07-15 | 2005-10-18 | Nikon Corporation | Dual flow circulation system for a mover |
| WO2006012408A2 (en) * | 2004-07-21 | 2006-02-02 | Newport Corporation | Improved cooling system for linear motors |
| JP2006121813A (ja) * | 2004-10-21 | 2006-05-11 | Yaskawa Electric Corp | リニアモータ電機子およびリニアモータ |
| US7635929B2 (en) * | 2005-10-18 | 2009-12-22 | Kabushiki Kaisha Yaskawa Denki | Canned linear motor armature and canned linear motor |
| TWM291649U (en) * | 2006-01-02 | 2006-06-01 | Hiwin Mikrosystem Corp | A thermolysis device for linear motors |
| DE102006012736A1 (de) * | 2006-03-17 | 2007-09-20 | Siemens Ag | Elektrische Maschine |
| US20070257563A1 (en) * | 2006-05-06 | 2007-11-08 | Lieh-Feng Huang | Heat Dissipating Arrangement for a Linear Motor |
| JP4819744B2 (ja) | 2007-05-08 | 2011-11-24 | 住友重機械工業株式会社 | リニアモータ冷却構造 |
| CN101657956B (zh) * | 2007-06-13 | 2013-01-16 | 株式会社安川电机 | 密封直线电动机电枢以及密封直线电动机 |
| JP2009060773A (ja) * | 2007-09-04 | 2009-03-19 | Canon Inc | 駆動装置およびそれを用いた平面モータおよびそれを用いた露光装置 |
| JP5598757B2 (ja) * | 2010-01-26 | 2014-10-01 | 株式会社安川電機 | 冷媒冷却リニアモータ |
| JP5582415B2 (ja) * | 2010-08-27 | 2014-09-03 | 株式会社安川電機 | リニアモータ電機子およびそれを備えたリニアモータ |
| US20120062866A1 (en) * | 2010-09-03 | 2012-03-15 | Nikon Corporation | Microchannel-cooled coils of electromagnetic actuators exhibiting reduced eddy-current drag |
-
2012
- 2012-03-27 JP JP2012071561A patent/JP5859361B2/ja active Active
-
2013
- 2013-03-08 TW TW102108225A patent/TWI499173B/zh active
- 2013-03-25 EP EP13001522.5A patent/EP2645547A3/en not_active Withdrawn
- 2013-03-26 US US13/850,441 patent/US9325222B2/en not_active Expired - Fee Related
- 2013-03-26 KR KR1020130032261A patent/KR101535331B1/ko active Active
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