JP2013207104A - Inspection stage apparatus and substrate inspection apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent a substrate from sticking on an inspection stage where the substrate is to be mounted on.SOLUTION: An inspection stage apparatus comprises a stage 2. The stage 2 includes substrate holding parts 201 to 214 whose substrate mounting surfaces are irregular and having pool-like concave parts 241 to 251. The pool-like concave parts 241 to 251 are provided with vacuum suction holes 24 and air pressure holes 25, so that a substrate contacts the substrate mounting surface at a minimum area as far as possible. In addition, the air pressure holes for releasing a vacuum state are provided apart from the vacuum suction holes, so that the substrate can be efficiently prevented from sticking on the concave parts. The concave parts are provided on a part of the substrate holding part, and concave grooves having both sides in a same hight with the concave parts are provided on the rest of the substrate holding part. The concave parts are provided at four corners, in a way to fit a size of the substrate. Pin relief holes are arranged in a zigzag pattern, so that various sizes of glass substrates can be accepted.

Description

  The present invention relates to an inspection stage apparatus and a substrate inspection apparatus for mounting a substrate used for manufacturing a display panel and the like, and more particularly to an inspection stage apparatus and a substrate inspection apparatus in which a stage portion on which a substrate is placed is improved.

  Conventionally, as a stage apparatus for mounting a glass substrate, a plurality of concave grooves having through-holes are formed in parallel on the bottom surface of the suction surface of the stage body to solve the problem of suction failure occurring on the suction surface. 1 is known.

JP 09-090308 A

  An inspection stage device for inspecting a substrate is generally made of a metal such as aluminum. As described in Patent Document 1, when a suction hole is arranged on the contact surface of the glass substrate and the stage device, the contact surface in the vicinity of the suction hole is obtained by repeating the operations of mounting and removing the glass substrate on the stage device. There is a possibility that the glass substrate is damaged due to friction and the glass substrate sticks to the contact surface of the stage device, and the glass substrate is damaged. In addition, a glass substrate for FPD (Flat Panel Display) may be adsorbed on the stage device due to a residue or static electricity after WET cleaning. When the substrate is adsorbed, an error such as a crack may occur when the substrate is transported. The stage apparatus described in Patent Document 1 does not consider a problem with respect to the sticking phenomenon of the glass substrate due to such contact between the glass substrate and the contact surface of the inspection stage.

  The present invention has been made in view of the above points, and an object of the present invention is to provide an inspection stage apparatus and a substrate inspection apparatus that can prevent the substrate placed on the inspection stage from sticking.

  A first feature of the inspection stage apparatus according to the present invention is that a plurality of rod-like convex substrate holding portions on which a substrate is placed and concave inspection region portions having a plurality of pin relief holes are alternately arranged at equal intervals in a predetermined direction. An uneven stage means configured by disposing a pool-shaped depression having a vacuum suction hole for vacuum suction and a compressed air hole for releasing a vacuum state on the substrate holding part. A plurality of inspection stage means provided at predetermined locations on the mounting surface; and a plurality of lift pin means for lifting the substrate away from the substrate holding portion by passing through the pin relief holes and contacting and raising the lower surface of the substrate; It is in having. This is because the contact area between the substrate and the mounting surface is provided by providing a pool-like depression on the substrate mounting surface of the substrate holding portion of the uneven stage means, and providing a vacuum suction hole and a pressurized air hole there. In addition, a pressure air hole for releasing the vacuum state is separately provided and the substrate can be effectively prevented from sticking to the recess.

  A second feature of the inspection stage device according to the present invention is the inspection stage device according to the first feature, wherein the hollow portion is provided in a part of the substrate holding portion, and the substrate holding portion other than the hollow portion is held. The mounting surface along the longitudinal direction of the portion is provided with a concave groove formed on both sides so as to have the same height as the recess. Providing a pool-like depression having a vacuum suction hole and a pressure air hole over the entire substrate holding part is a great burden both technically and in terms of cost. Provided in a part of the holding part, and in other places, a concave groove part formed so that both sides have the same height as the recessed part was provided.

  A third feature of the inspection stage device according to the present invention is that, in the inspection stage device according to the second feature, the depressions are respectively provided at positions that can be arranged at four corners corresponding to the size of the substrate. There is to be. This is because the dents can be arranged efficiently by arranging them corresponding to the four corners according to the size of the substrate.

  According to a fourth feature of the inspection stage apparatus according to the present invention, in the inspection stage apparatus according to the first, second, or third feature, the pin relief holes are partially arranged corresponding to the size of the substrate. It is in that. In this configuration, the pin clearance holes are arranged in a staggered manner so that the glass substrates of various sizes can be accommodated.

  The first feature of the substrate inspection apparatus according to the present invention is that a plurality of rod-like convex substrate holding portions for placing a substrate and concave inspection region portions having a plurality of pin relief holes are alternately arranged at equal intervals in a predetermined direction. An uneven stage means configured by disposing a pool-shaped depression having a vacuum suction hole for vacuum suction and a compressed air hole for releasing a vacuum state on the substrate holding part. A plurality of inspection stage means provided at predetermined locations on the mounting surface; and a plurality of lift pin means for lifting the substrate away from the substrate holding part by passing through the pin clearance holes and contacting and raising the lower surface of the substrate; And an optical system unit means for inspecting the surface of the rectangular substrate by shifting the upper side of the substrate placed on the inspection stage means in the X direction and the Y direction. This is an invention of a substrate inspection apparatus utilizing the first feature of the inspection stage apparatus.

  A second feature of the substrate inspection apparatus according to the present invention is the substrate inspection device according to the first feature, wherein the recess is provided in a part of the substrate holding portion, and the substrate other than the recess is provided. The mounting surface along the longitudinal direction of the holding part is provided with a concave groove part formed so that both sides have the same height as the depression part. This is an invention of a substrate inspection apparatus utilizing the second feature of the inspection stage apparatus.

  A third feature of the substrate inspection apparatus according to the present invention is that, in the substrate inspection device according to the second feature, the recesses are provided at positions that can be arranged at four corners corresponding to the size of the substrate. There is to be. This is an invention of a substrate inspection apparatus utilizing the third feature of the inspection stage apparatus.

  According to a fourth aspect of the substrate inspection apparatus of the present invention, in the substrate inspection apparatus according to the first, second, or third feature, the pin relief holes are partially arranged corresponding to the size of the substrate. It is in that. This is an invention of a substrate inspection apparatus utilizing the fourth feature of the inspection stage apparatus.

  According to the present invention, there is an effect that sticking of a substrate placed on an inspection stage can be effectively prevented.

It is the top view which looked at the board | substrate inspection apparatus which concerns on this invention from the upper side. It is the side view which looked at the board | substrate inspection apparatus of FIG. 1 from the paper surface front side. It is a top view which shows the detail of the inspection stage of FIG.1 and FIG.2. It is a figure which expands and shows the upper half of the inspection stage of FIG. It is an enlarged view which shows the detail of the pool-shaped hollow in FIG. 4, FIG. 5 (A) is a top view, FIG. 5 (B) is AA sectional drawing. It is a figure which shows the 1st modification of the glass substrate holding part of a test | inspection stage. It is a figure which shows the 2nd modification of the glass substrate holding part of a test | inspection stage.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a top view of the substrate inspection apparatus according to the present invention as viewed from above, and FIG. 2 is a side view of the substrate inspection apparatus of FIG. 1 as viewed from the front side of the drawing. The glass substrate inspection apparatus 100 is roughly divided into a base frame 1, an inspection stage 2, an optical unit 3, and lift pins 9.

  The base frame 1 is composed of a welded structure of a plurality of square pipes, and is installed on the floor by having legs at the bottom. The inspection stage 2 is fixed near the substrate insertion port on the upper part of the base frame 1. The optical unit 3 has a gate-type gantry structure, and is mounted on the linear guides 7a and 7b arranged in parallel along the glass substrate loading direction at the top of the base frame 1. ing. The optical unit 3 reciprocates in the X direction, which is the glass substrate loading direction, by an optical unit X driving unit (not shown) provided on the side surface of the base frame 1. The optical heads 4a and 4b are for inspecting defects and foreign matters on the surface of the glass substrate, and according to guides 8a and 8b provided along the side surface Y direction of the optical unit 3, an optical unit Y driving unit (not shown). ), The shift operation is performed in the Y direction, which is perpendicular to the X direction. This inspection is performed by irradiating the surface or inside of the glass substrate with inspection light and receiving the scattered light. At this time, the optical heads 4 a and 4 b can inspect the surface and the inside of the glass substrate only in the recessed portion between the mounting bars of the inspection stage 2. Therefore, once scanning is completed, the glass substrate is shifted in the Y direction and the remaining portion is inspected. The entire surface of the glass substrate can be inspected by the reciprocating operation in the X direction and the Y direction shifting operation of the optical unit 3 and the shifting operation in the Y direction of the glass substrate by the lift pins 9.

  As shown in FIG. 2, linear guides 12a and 12b are installed inside the base frame 1 in parallel in the Y direction, and a first lifter vertical base on which a pin Y drive unit 11 and a pin vertical drive unit 10 are mounted. A table 13 is installed. The inspection stage 2 is provided with a plurality of holes for allowing the lift pins 9 for lifting the glass substrate to pass therethrough. A plurality of lift pins 9 are installed on the upper surface side of the lifter unit base 14 mounted on the pin vertical drive unit 10. The lift pins 9 are raised when the glass substrate is received and lowered after the glass substrate is received, thereby delivering the glass substrate to the inspection stage 2. Further, the lift pins 9 are lifted to lift the glass substrate and perform a shift operation in the Y direction.

  The lifter unit base 14 rides on a ball bearing 16 on the second lifter upper and lower base 15 and is freely movable in the X direction and the Y direction. The movement in the X direction and the Y direction is performed by driving an X direction alignment motor and a Y direction alignment motor mounted on the lifter upper and lower base 15 (not shown). The lifter vertical base 15 is moved in the vertical direction by driving the pin vertical drive unit 10. By raising the lifter upper / lower base 15, the lifter unit base 14 and the lift pin 9 are also raised, and the glass substrate on the inspection stage 2 is lifted away from the mounting bar constituting the inspection stage 2, and alignment and inspection operations are performed. It is possible to shift the glass substrate at the time.

  FIG. 3 is a top view showing details of the inspection stage of FIGS. 1 and 2. The inspection stage 2 has irregularities formed by strip-shaped mounting bars along the X direction. The mounting bars are arranged in a plurality of rows at equal intervals (50 to 100 mm intervals) in the Y direction of the inspection stage 2. In other words, in the inspection stage 2, convex glass substrate holding portions 201 to 214 serving as mounting bars and inspection concave portions 221 to 233 serving as inspection regions are sequentially arranged at equal intervals in the Y direction. In the inspection stage 2, a pin relief hole 26 is arranged over the entire surface of the inspection recesses 221 to 233 so that the lift pin 9 can be raised. The pin relief hole 26 is disposed at a symmetrical position from the center of the inspection stage 2. The pin clearance holes 26 are partly arranged in a staggered manner so as to be compatible with glass substrates of various sizes (multi-glass size). Specifically, the pin clearance holes of the inspection recess 222 and the pin clearance holes of the inspection recesses 221 and 223 adjacent thereto are in a staggered arrangement. The pin clearance holes of the inspection recesses 225 to 229 adjacent to each other are also staggered. Further, the pin clearance holes of the inspection recess 232 and the pin clearance holes of the inspection recesses 231 and 233 adjacent thereto are also arranged in a staggered manner. Further, the pin clearance hole opened across the glass substrate holding portions 205 and 210 can move the position of the pin so that it can correspond to the size of the glass substrate and the position of the glass substrate loading robot hand. It has become.

  4 is an enlarged view of the upper half of the inspection stage of FIG. The glass substrate holders 202 to 207 are provided with pool-shaped depressions 241 to 251 each having a vacuum suction hole 24 and a pressure air hole 25 on the bottom surface. The pool-shaped depressions 241 to 251 are provided at positions that can be arranged at four corners with respect to the representative glass substrate sizes of the respective generations so as to correspond to the multi-size glass substrates. The arrangement of the pool-like depressions 241 to 251 is symmetrical from the center of the inspection stage 2. The vacuum suction has a structure in which the area can be switched depending on the glass substrate size.

  5 is an enlarged view showing details of the pool-like depression in FIG. 4, FIG. 5 (A) is a top view, and FIG. 5 (B) is a cross-sectional view along AA. A concave groove along the longitudinal direction is formed on the surface of the glass substrate holding part 201. Both sides of the concave groove are very narrow, so that the contact area between the inspection stage 2 and the glass substrate can be reduced as much as possible, and the glass substrate can be prevented from sticking. The pool-shaped depression 242 has a periphery that is the same height as both ends of the concave groove, and a vacuum suction hole 24 and a compressed air hole 25 are provided on the bottom surface. Both the vacuum suction hole 24 and the compressed air hole 25 have the same cross-sectional shape.

  When receiving such a glass substrate, the inspection stage 2 instantly vacuum-sucks the glass substrate through the vacuum suction hole 24 to fix the glass substrate and correct the warp. In the present invention, the glass substrate is adsorbed by the vacuum adsorbing hole 24 provided on the bottom surface of the pool-like depression 242. This makes it possible to increase the area for adsorbing the glass substrate and to reduce the contact area between the inspection stage 2 and the glass substrate near the vacuum adsorption portion as much as possible. At that time, the vacuum pressure is managed using a vacuum pressure controller so as to prevent contact between the inspection stage 2 and the glass substrate. This makes it possible to effectively prevent sticking in the vicinity of the suction portion that occurs when the glass substrate is sucked in a structure in which a vacuum hole is provided on the contact surface with the conventional glass substrate. When the glass substrate is lifted by raising the lift pins 9, vacuum breakage is performed by the compressed air hole 25 provided on the bottom surface of the pool-like depression 242. By providing the vacuum suction hole 24 and the pressure air hole 25 separately, it is possible to instantaneously break the vacuum. By the above, sticking of a glass substrate and an inspection stage is suppressed, and it becomes possible to prevent damage to a glass substrate.

  FIG. 6 is a view showing a first modification of the glass substrate holding part of the inspection stage. In this modification, two implantation holes 27 a and 27 b and a vacuum suction hole 28 are provided on the surface of the glass substrate holding part in the inspection stage 2. Pads made of resin are driven into the driving holes 27a and 27b. It becomes possible to securely hold the glass substrate by the resin portion driven into the driving holes 27a and 27b. In addition, it is possible to easily replace the pad due to wear of the resin portion.

  FIG. 7 is a view showing a second modification of the glass substrate holding part of the inspection stage. A plurality of convex pin-shaped patterns 29 regularly arranged on the entire surface of the glass substrate holding portion in the inspection stage 2 are provided, and a circular pattern 31 having a vacuum suction and pressure hole 30 is provided near the center thereof. By making the surface shape of the glass substrate holding portion the pin-shaped pattern 29, the contact area can be greatly reduced. Note that the vacuum suction and pressure air holes 30 can be arranged at four corners with respect to the representative glass substrate sizes of the respective generations so as to be compatible with multi-size glass substrates, like the above-described pool-shaped depressions. It may be provided. Further, the pool-like depressions of FIG. 5 may be arranged at four corners with respect to the glass substrate size, and the pin-like pattern of FIG. 7 may be provided on the surface of the glass substrate holding part other than the pool-like depressions. That is, in FIG. 7, a pool-like depression may be provided instead of the vacuum suction and pressure air hole 30. Thus, the vacuum break can be instantaneously performed by the vacuum suction hole 24 and the pressure air hole 25. Further, in this case, the pin-shaped pattern of FIG. In FIG. 7, the size of the pin-shaped pattern 29 is preferably a convex shape having a diameter of about 1 to 3 [mm] and a height of 0.2 to 0.5 [mm], and its mounting pitch is 20 to 50 [mm]. ] Is preferable. The size of the circular pattern 31 is preferably about 4 to 8 [mm] in diameter, and the size of the vacuum suction and compressed air hole 30 is preferably about 1 to 3 [mm] in diameter. As a result, the amount of deflection of the glass substrate placed on the glass substrate holding portion can be reduced, and the planar accuracy of the glass substrate can be sufficiently maintained, and the sticking of the substrate can be effectively prevented. You can also In addition, in FIG. 5, you may make it provide the pin-shaped pattern of FIG. 7 in places other than the both sides of a pool-shaped hollow part and a concave groove part.

1 ... Base frame,
10: Pin vertical drive unit,
100: Glass substrate inspection device,
11: Pin Y drive unit,
7a, 7b, 12a, 12b ... linear guide,
13 ... first lifter upper and lower base,
14 ... Lifter unit base,
15 ... the second lifter upper and lower base,
16 ... Ball bearing,
2 ... Inspection stage,
201-214 ... Glass substrate holder,
221 to 233 ... inspection recess,
241 to 251 ... Pool-shaped depressions,
24, 28 ... Vacuum suction holes,
25 ... Hole for compressed air,
26 ... pin clearance hole,
27a, 27b ... driving holes,
29 ... Pin-shaped pattern,
3 Optical part,
30 ... Hole for vacuum suction and pressure,
31 ... Circular pattern,
4a, 4b ... optical head,
8a, 8b ... guide,
9 ... Lift pin

Claims (8)

It is a concavo-convex stage means configured by alternately arranging a plurality of rod-shaped convex substrate holding portions for placing a substrate and concave inspection region portions having a plurality of pin relief holes at equal intervals in a predetermined direction. An inspection stage means comprising a plurality of pool-shaped depressions having a vacuum suction hole for vacuum suction and a pressure air hole for releasing a vacuum state at a predetermined position of the substrate mounting surface of the substrate holding part;
An inspection stage apparatus comprising: a plurality of lift pin means for lifting the substrate away from the substrate holding portion by passing through the pin relief holes and coming into contact with the lower surface of the substrate and rising.   The inspection stage apparatus according to claim 1, wherein the recess is provided in a part of the substrate holding portion, and both sides of the mounting surface along the longitudinal direction of the substrate holding portion other than the recess are on both sides. An inspection stage apparatus comprising a concave groove formed so as to have the same height as the recess.   3. The inspection stage apparatus according to claim 2, wherein the recesses are provided at positions that can be arranged at four corners corresponding to the size of the substrate.   4. The inspection stage apparatus according to claim 1, wherein the pin relief holes are partially arranged in a staggered manner corresponding to the size of the substrate. It is a concavo-convex stage means configured by alternately arranging a plurality of rod-shaped convex substrate holding portions for placing a substrate and concave inspection region portions having a plurality of pin relief holes at equal intervals in a predetermined direction. An inspection stage means comprising a plurality of pool-shaped depressions having a vacuum suction hole for vacuum suction and a pressure air hole for releasing a vacuum state at a predetermined position of the substrate mounting surface of the substrate holding part;
A plurality of lift pin means for lifting the substrate away from the substrate holding portion by passing through the pin relief holes and coming into contact with the lower surface of the substrate and rising;
Optical system unit means for inspecting the surface of the rectangular substrate by shifting the upper side of the substrate placed on the inspection stage means in the X direction and the Y direction. apparatus.   6. The substrate inspection apparatus according to claim 5, wherein the hollow portion is provided in a part of the substrate holding portion, and both sides of the mounting surface along the longitudinal direction of the substrate holding portion other than the hollow portion are provided. A substrate inspection apparatus comprising a concave groove formed to have the same height as the recess.   7. The substrate inspection apparatus according to claim 6, wherein the recesses are provided at positions that can be arranged at four corners corresponding to the size of the substrate.   8. The board inspection apparatus according to claim 5, wherein the pin relief holes are partially arranged in a staggered manner corresponding to the size of the board.

Images