JP2013197425A5 - - Google Patents
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- Publication number
- JP2013197425A5 JP2013197425A5 JP2012064655A JP2012064655A JP2013197425A5 JP 2013197425 A5 JP2013197425 A5 JP 2013197425A5 JP 2012064655 A JP2012064655 A JP 2012064655A JP 2012064655 A JP2012064655 A JP 2012064655A JP 2013197425 A5 JP2013197425 A5 JP 2013197425A5
- Authority
- JP
- Japan
- Prior art keywords
- grinding
- sic substrate
- substrate
- sic
- laminate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 description 10
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000009719 polyimide resin Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012064655A JP2013197425A (ja) | 2012-03-22 | 2012-03-22 | 炭化珪素基板の平坦化研削加工方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012064655A JP2013197425A (ja) | 2012-03-22 | 2012-03-22 | 炭化珪素基板の平坦化研削加工方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2013197425A JP2013197425A (ja) | 2013-09-30 |
| JP2013197425A5 true JP2013197425A5 (enExample) | 2013-11-28 |
Family
ID=49395977
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012064655A Pending JP2013197425A (ja) | 2012-03-22 | 2012-03-22 | 炭化珪素基板の平坦化研削加工方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2013197425A (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6935224B2 (ja) * | 2017-04-25 | 2021-09-15 | 株式会社ディスコ | ウエーハの生成方法 |
| JP7537434B2 (ja) | 2019-07-25 | 2024-08-21 | Ａｇｃ株式会社 | 積層部材 |
| CN114127032B (zh) * | 2019-07-25 | 2023-04-28 | Ａｇｃ株式会社 | 层叠构件 |
| KR20230022408A (ko) * | 2020-06-10 | 2023-02-15 | 에이지씨 가부시키가이샤 | 적층 부재 |
| JPWO2021251246A1 (enExample) | 2020-06-10 | 2021-12-16 | ||
| JP7589507B2 (ja) * | 2020-11-06 | 2024-11-26 | 住友金属鉱山株式会社 | 板状成形体の製造方法 |
| JP7589508B2 (ja) * | 2020-11-06 | 2024-11-26 | 住友金属鉱山株式会社 | 板状成形体の製造方法 |
| TW202237395A (zh) | 2021-01-20 | 2022-10-01 | 日商Ａｇｃ股份有限公司 | 積層構件 |
-
2012
- 2012-03-22 JP JP2012064655A patent/JP2013197425A/ja active Pending
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