JP2013165289A5 - - Google Patents

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Publication number
JP2013165289A5
JP2013165289A5 JP2013089607A JP2013089607A JP2013165289A5 JP 2013165289 A5 JP2013165289 A5 JP 2013165289A5 JP 2013089607 A JP2013089607 A JP 2013089607A JP 2013089607 A JP2013089607 A JP 2013089607A JP 2013165289 A5 JP2013165289 A5 JP 2013165289A5
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JP
Japan
Prior art keywords
identification symbol
dicing sheet
printed
ring frame
adhesive layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2013089607A
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English (en)
Japanese (ja)
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JP2013165289A (ja
JP5469271B2 (ja
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Priority to JP2013089607A priority Critical patent/JP5469271B2/ja
Priority claimed from JP2013089607A external-priority patent/JP5469271B2/ja
Publication of JP2013165289A publication Critical patent/JP2013165289A/ja
Publication of JP2013165289A5 publication Critical patent/JP2013165289A5/ja
Application granted granted Critical
Publication of JP5469271B2 publication Critical patent/JP5469271B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2013089607A 2013-04-22 2013-04-22 識別記号付ダイシングシートおよびその製造方法 Active JP5469271B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013089607A JP5469271B2 (ja) 2013-04-22 2013-04-22 識別記号付ダイシングシートおよびその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013089607A JP5469271B2 (ja) 2013-04-22 2013-04-22 識別記号付ダイシングシートおよびその製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2007179264A Division JP5324065B2 (ja) 2007-07-09 2007-07-09 識別記号付ダイシングシートおよびその製造方法

Publications (3)

Publication Number Publication Date
JP2013165289A JP2013165289A (ja) 2013-08-22
JP2013165289A5 true JP2013165289A5 (enExample) 2013-10-31
JP5469271B2 JP5469271B2 (ja) 2014-04-16

Family

ID=49176430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013089607A Active JP5469271B2 (ja) 2013-04-22 2013-04-22 識別記号付ダイシングシートおよびその製造方法

Country Status (1)

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JP (1) JP5469271B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7401284B2 (ja) * 2019-12-12 2023-12-19 東京エレクトロン株式会社 基板処理装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63244852A (ja) * 1987-03-31 1988-10-12 Toshiba Corp 半導体装置の製造方法
JPH04146649A (ja) * 1990-10-08 1992-05-20 Tokyo Seimitsu Co Ltd 半導体チップの製造方法及びその装置
JP2003041014A (ja) * 2001-07-30 2003-02-13 Sun A Kaken Co Ltd 表面保護フィルム
JP2004072040A (ja) * 2002-08-09 2004-03-04 Lintec Corp 属性表示付ダイシングテープおよびその製造方法
JP2005183691A (ja) * 2003-12-19 2005-07-07 Kawasaki Microelectronics Kk 半導体チップの製造方法
JP2006045297A (ja) * 2004-08-03 2006-02-16 Ishii Toshiaki 貼付シート及びその製造方法
JP2006156753A (ja) * 2004-11-30 2006-06-15 Furukawa Electric Co Ltd:The ウエハ加工用テープ
JP2006203133A (ja) * 2005-01-24 2006-08-03 Lintec Corp チップ体の製造方法、デバイスの製造方法およびチップ体固着用粘接着シート
JP2006269601A (ja) * 2005-03-23 2006-10-05 Furukawa Electric Co Ltd:The ウエハ加工用テープ
JP2006326961A (ja) * 2005-05-25 2006-12-07 Sun A Kaken Co Ltd 表面保護フィルム
JP5157208B2 (ja) * 2006-03-20 2013-03-06 日立化成株式会社 ダイボンドダイシングシート

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