JP2013165284A - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- JP2013165284A JP2013165284A JP2013081431A JP2013081431A JP2013165284A JP 2013165284 A JP2013165284 A JP 2013165284A JP 2013081431 A JP2013081431 A JP 2013081431A JP 2013081431 A JP2013081431 A JP 2013081431A JP 2013165284 A JP2013165284 A JP 2013165284A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 142
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 13
- 239000000758 substrate Substances 0.000 claims abstract description 24
- 230000000873 masking effect Effects 0.000 claims abstract description 17
- 239000012535 impurity Substances 0.000 claims abstract description 10
- 238000000034 method Methods 0.000 abstract description 15
- 238000009413 insulation Methods 0.000 abstract 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 17
- 229910052710 silicon Inorganic materials 0.000 description 17
- 239000010703 silicon Substances 0.000 description 17
- 230000015556 catabolic process Effects 0.000 description 11
- 230000002093 peripheral effect Effects 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
- H01L29/872—Schottky diodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/0619—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE] with a supplementary region doped oppositely to or in rectifying contact with the semiconductor containing or contacting region, e.g. guard rings with PN or Schottky junction
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
【解決手段】半導体装置の製造方法は、第1導電型の半導体基板の第1主面に、半導体基板と比べて不純物濃度が低い第1導電型の第1半導体領域を形成する工程と、開口部を有した第1のマスキングを第1半導体領域の表面領域に施す工程と、開口部から第1半導体領域に不純物を導入して、第1半導体領域とPN接合する第2導電型の第2半導体領域を形成した後、第1のマスキングを除去する工程と、電気的なコンタクト領域となる第1半導体領域及び第2半導体領域の少なくとも一部領域を覆う第2のマスキングを施し、第1半導体領域の表面に絶縁層を形成した後、第2のマスキングを除去する工程と、少なくともコンタクト領域の第1半導体領域及び第2半導体領域と接触する第1電極を形成する工程と、半導体基板の第2主面に第2電極を形成する工程とを有する。
【選択図】図1
Description
102 低濃度N型半導体領域
103 P型半導体領域
104 絶縁層
105 アノード電極
106 カソード電極
Claims (1)
- 第1導電型の半導体基板の第1主面に、前記半導体基板と比べて不純物濃度が低い第1導電型の第1半導体領域を形成する工程と、
開口部を有した第1のマスキングを前記第1半導体領域の表面領域に施す工程と、
前記開口部から前記第1半導体領域に不純物を導入して、前記第1半導体領域とPN接合する第2導電型の第2半導体領域を形成した後、前記第1のマスキングを除去する工程と、
電気的なコンタクト領域となる前記第1半導体領域及び前記第2半導体領域の少なくとも一部領域を覆う第2のマスキングを施し、前記第1半導体領域の表面に絶縁層を形成した後、前記第2のマスキングを除去する工程と、
少なくとも前記コンタクト領域の前記第1半導体領域及び前記第2半導体領域と接触する第1電極を形成する工程と、
前記半導体基板の第2主面に第2電極を形成する工程と、を有し、
前記開口部は、間隔を空けて列をなした複数の第1領域と、前記複数の第1領域の各終端を相互に接続する第2領域とから構成された第2領域と、から構成された形状であることを特徴とする半導体装置の製造方法。
Priority Applications (1)
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JP2013081431A JP2013165284A (ja) | 2013-04-09 | 2013-04-09 | 半導体装置の製造方法 |
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JP2013081431A JP2013165284A (ja) | 2013-04-09 | 2013-04-09 | 半導体装置の製造方法 |
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JP2007314817A Division JP2009141062A (ja) | 2007-12-05 | 2007-12-05 | 半導体装置及びその製造方法 |
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JP2013165284A true JP2013165284A (ja) | 2013-08-22 |
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JP2013081431A Ceased JP2013165284A (ja) | 2013-04-09 | 2013-04-09 | 半導体装置の製造方法 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10483110B2 (en) | 2016-07-26 | 2019-11-19 | Mitsubishi Electric Corporation | Semiconductor device and method of manufacturing semiconductor device |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58127330A (ja) * | 1982-01-25 | 1983-07-29 | Nippon Telegr & Teleph Corp <Ntt> | 半導体装置の製造方法 |
JPH05136015A (ja) * | 1991-03-29 | 1993-06-01 | Shindengen Electric Mfg Co Ltd | 半導体装置 |
JP2003188391A (ja) * | 2001-12-21 | 2003-07-04 | Sanken Electric Co Ltd | 半導体素子及びその製造方法 |
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2013
- 2013-04-09 JP JP2013081431A patent/JP2013165284A/ja not_active Ceased
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58127330A (ja) * | 1982-01-25 | 1983-07-29 | Nippon Telegr & Teleph Corp <Ntt> | 半導体装置の製造方法 |
JPH05136015A (ja) * | 1991-03-29 | 1993-06-01 | Shindengen Electric Mfg Co Ltd | 半導体装置 |
JP2003188391A (ja) * | 2001-12-21 | 2003-07-04 | Sanken Electric Co Ltd | 半導体素子及びその製造方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10483110B2 (en) | 2016-07-26 | 2019-11-19 | Mitsubishi Electric Corporation | Semiconductor device and method of manufacturing semiconductor device |
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