JP2013160612A5 - - Google Patents

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Publication number
JP2013160612A5
JP2013160612A5 JP2012022189A JP2012022189A JP2013160612A5 JP 2013160612 A5 JP2013160612 A5 JP 2013160612A5 JP 2012022189 A JP2012022189 A JP 2012022189A JP 2012022189 A JP2012022189 A JP 2012022189A JP 2013160612 A5 JP2013160612 A5 JP 2013160612A5
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JP
Japan
Prior art keywords
aperture plate
slit
pitch
array type
confocal
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JP2012022189A
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English (en)
Japanese (ja)
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JP2013160612A (ja
JP5955574B2 (ja
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Priority claimed from JP2012022189A external-priority patent/JP5955574B2/ja
Priority to JP2012022189A priority Critical patent/JP5955574B2/ja
Priority to US13/610,052 priority patent/US9041940B2/en
Priority to TW101136679A priority patent/TWI507659B/zh
Priority to KR1020120118657A priority patent/KR101409644B1/ko
Priority to CN201210487146.4A priority patent/CN103245302B/zh
Publication of JP2013160612A publication Critical patent/JP2013160612A/ja
Publication of JP2013160612A5 publication Critical patent/JP2013160612A5/ja
Publication of JP5955574B2 publication Critical patent/JP5955574B2/ja
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Anticipated expiration legal-status Critical

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JP2012022189A 2012-02-03 2012-02-03 立体形状計測装置 Active JP5955574B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2012022189A JP5955574B2 (ja) 2012-02-03 2012-02-03 立体形状計測装置
US13/610,052 US9041940B2 (en) 2012-02-03 2012-09-11 Three-dimensional shape measuring apparatus
TW101136679A TWI507659B (zh) 2012-02-03 2012-10-04 三維形狀測量裝置
KR1020120118657A KR101409644B1 (ko) 2012-02-03 2012-10-24 입체 형상 계측 장치
CN201210487146.4A CN103245302B (zh) 2012-02-03 2012-11-26 三维形状测量装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012022189A JP5955574B2 (ja) 2012-02-03 2012-02-03 立体形状計測装置

Publications (3)

Publication Number Publication Date
JP2013160612A JP2013160612A (ja) 2013-08-19
JP2013160612A5 true JP2013160612A5 (enExample) 2015-02-12
JP5955574B2 JP5955574B2 (ja) 2016-07-20

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Family Applications (1)

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JP2012022189A Active JP5955574B2 (ja) 2012-02-03 2012-02-03 立体形状計測装置

Country Status (5)

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US (1) US9041940B2 (enExample)
JP (1) JP5955574B2 (enExample)
KR (1) KR101409644B1 (enExample)
CN (1) CN103245302B (enExample)
TW (1) TWI507659B (enExample)

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