JP2013147426A - Iii族窒化物結晶 - Google Patents
Iii族窒化物結晶 Download PDFInfo
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- 239000013078 crystal Substances 0.000 title claims abstract description 517
- 150000004767 nitrides Chemical class 0.000 title claims abstract description 240
- 239000000758 substrate Substances 0.000 claims abstract description 292
- 238000004519 manufacturing process Methods 0.000 claims abstract description 45
- 238000000034 method Methods 0.000 claims description 47
- 238000005520 cutting process Methods 0.000 claims description 18
- 229910052739 hydrogen Inorganic materials 0.000 claims description 7
- 238000005092 sublimation method Methods 0.000 claims description 7
- 229910002601 GaN Inorganic materials 0.000 description 147
- 238000005259 measurement Methods 0.000 description 15
- 125000004429 atom Chemical group 0.000 description 13
- 239000007789 gas Substances 0.000 description 9
- 239000012535 impurity Substances 0.000 description 9
- 238000002248 hydride vapour-phase epitaxy Methods 0.000 description 8
- 125000004430 oxygen atom Chemical group O* 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 238000005498 polishing Methods 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 6
- 230000002159 abnormal effect Effects 0.000 description 6
- 238000000227 grinding Methods 0.000 description 6
- 125000004432 carbon atom Chemical group C* 0.000 description 5
- 229910052594 sapphire Inorganic materials 0.000 description 5
- 239000010980 sapphire Substances 0.000 description 5
- 239000012808 vapor phase Substances 0.000 description 5
- 229910021480 group 4 element Inorganic materials 0.000 description 4
- 239000007791 liquid phase Substances 0.000 description 4
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 238000005136 cathodoluminescence Methods 0.000 description 3
- 238000007716 flux method Methods 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- 229910021098 KOH—NaOH Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- QZPSXPBJTPJTSZ-UHFFFAOYSA-N aqua regia Chemical compound Cl.O[N+]([O-])=O QZPSXPBJTPJTSZ-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000003776 cleavage reaction Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000007017 scission Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000010897 surface acoustic wave method Methods 0.000 description 1
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- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
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Abstract
【解決手段】本III族窒化物結晶の製造方法は、{0001}以外の任意に特定される面方位の主面20mを有するIII族窒化物結晶20の製造方法であって、III族窒化物バルク結晶1から、その特定される面方位の主面10pm,10qmを有する複数のIII族窒化物結晶基板10p,10qを切り出す工程と、それらの基板10p,10qの主面10pm,10qmが互いに平行で、かつ、それらの基板10p,10qの[0001]方向が同一になるように、横方向にそれらの基板10p,10qを互いに隣接させて配置する工程と、それらの基板10p,10qの主面10pm,10qm上に、III族窒化物結晶20を成長させる工程と、を含む。
【選択図】図1
Description
本願発明にかかるIII族窒化物結晶の製造方法に用いられるIII族窒化物バルク結晶であるGaNバルク結晶を、図2を参照して、以下の方法で作製した。
まず、図3(a)を参照して、GaNバルク結晶(III族窒化物バルク結晶1)の両主面である(0001)面および(000−1)面を、研削および研磨加工して、両主面の平均粗さRaを5nmとした。ここで、表面の平均粗さRaの測定は、AFMにより行なった。
図3(a)を参照して、GaNバルク結晶(III族窒化物バルク結晶1)の両主面である(0001)面および(000−1)面を、研削および研磨加工して、両主面の平均粗さRaを50nmとしたこと以外は、実施例1と同様にして、複数のGaN結晶基板(III族窒化物結晶基板10p,10q)を切り出し、各GaN結晶基板の研削および研磨加工されていない4面を研削および研磨加工して、これら4面の平均粗さRaを5nmとした。複数のGaN結晶基板の中には、その主面の面方位が{1−100}と完全に一致していないGaN結晶基板もあったが、かかるGaN結晶基板のいずれについても、その主面の面方位は{1−100}に対するオフ角が5°以下であった。
まず、図5(a)を参照して、GaNバルク結晶(III族窒化物バルク結晶1)の両主面である(0001)面および(000−1)面を、研削および研磨加工して、両主面の平均粗さRaを5nmとした。
まず、図6(a)を参照して、GaNバルク結晶(III族窒化物バルク結晶1)の両主面である(0001)面および(000−1)面を、研削加工して、両主面の平均粗さRaを50nmとした。
まず、図7(a)を参照して、GaNバルク結晶(III族窒化物バルク結晶1)の両主面である(0001)面および(000−1)面を、研削加工して、両主面の平均粗さRaを50nmとした。
まず、図8(a)を参照して、GaNバルク結晶(III族窒化物バルク結晶1)の両主面である(0001)面および(000−1)面を、研削および研磨加工して、両主面の平均粗さRaを5nmとした。
まず、図9(a)を参照して、GaNバルク結晶(III族窒化物バルク結晶1)の両主面である(0001)面および(000−1)面を、研削および研磨加工して、両主面の平均粗さRaを5nmとした。
本願発明にかかるIII族窒化物結晶の製造方法に用いられるIII族窒化物バルク結晶であるAlNバルク結晶を以下の方法で作製した。
まず、図3(a)を参照して、AlNバルク結晶(III族窒化物バルク結晶1)の両主面である(0001)面および(000−1)面を、研削および研磨加工して、両主面の平均粗さRaを5nmとした。
まず、図3(a)を参照して、AlNバルク結晶の両主面である(0001)面および(000−1)面を、研削および研磨加工して、両主面の平均粗さRaを50nmとした。
まず、図3(a)を参照して、AlNバルク結晶(III族窒化物バルク結晶1)の両主面である(0001)面および(000−1)面を、研削および研磨加工して、両主面の平均粗さRaを5nmとした。
まず、図3(a)を参照して、AlNバルク結晶の両主面である(0001)面および(000−1)面を、研削および研磨加工して、両主面の平均粗さRaを50nmとした。
Claims (7)
- {0001}以外の任意に特定される面方位の主面を有するIII族窒化物結晶の製造方法であって、
III族窒化物バルク結晶から、前記特定される面方位の主面を有する複数のIII族窒化物結晶基板を切り出す工程と、
前記基板の前記主面が互いに平行で、かつ、前記基板の[0001]方向が同一になるように、横方向に前記基板を互いに隣接させて配置する工程と、
前記基板の前記主面上に、前記III族窒化物結晶を成長させる工程と、を含むIII族窒化物結晶の製造方法。 - 前記特定される面方位は、{1−10X}(ここで、Xは0以上の整数)、{11−2Y}(ここで、Yは0以上の整数)および{HK−(H+K)0}(ここで、HおよびKは0以外の整数)からなる群から選ばれるいずれかの結晶幾何学的に等価な面方位に対するオフ角が5°以下である請求項1に記載のIII族窒化物結晶の製造方法。
- 前記特定される面方位は、{1−100}、{11−20}、{1−102}および{11−22}からなる群から選ばれるいずれかの結晶幾何学的に等価な面方位に対するオフ角が5°以下である請求項1に記載のIII族窒化物結晶の製造方法。
- 前記特定される面方位は、{1−100}に対するオフ角が5°以下である請求項1に記載のIII族窒化物結晶の製造方法。
- 前記基板が互いに隣接する面の平均粗さRaが、50nm以下である請求項1から請求項4までのいずれか一項に記載のIII族窒化物結晶の製造方法。
- 前記III族窒化物結晶を成長させる温度が、2000℃以上である請求項1から請求項5までのいずれか一項に記載のIII族窒化物結晶の製造方法。
- 前記III族窒化物結晶を成長させる方法が、昇華法である請求項1から請求項6までのいずれか一項に記載のIII族窒化物結晶の製造方法。
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JP6031733B2 (ja) * | 2010-09-27 | 2016-11-24 | 住友電気工業株式会社 | GaN結晶の製造方法 |
WO2016121853A1 (ja) * | 2015-01-29 | 2016-08-04 | 日本碍子株式会社 | 自立基板、機能素子およびその製造方法 |
CN105483833A (zh) * | 2015-11-24 | 2016-04-13 | 北京华进创威电子有限公司 | 一种氮化铝单晶的位错腐蚀方法 |
JP6731590B2 (ja) * | 2016-05-02 | 2020-07-29 | 国立大学法人大阪大学 | 窒化物結晶基板の製造方法 |
CN108166059A (zh) * | 2017-12-21 | 2018-06-15 | 北京华进创威电子有限公司 | 一种氮化铝衬底制备及扩径生长方法 |
CN108085745A (zh) * | 2017-12-28 | 2018-05-29 | 北京华进创威电子有限公司 | 一种氮化铝晶体生长用同质衬底制备及扩径生长方法 |
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JP2002029897A (ja) * | 2000-07-10 | 2002-01-29 | Sumitomo Electric Ind Ltd | 単結晶GaN基板の製造方法と単結晶GaN基板 |
JP2006315947A (ja) * | 2005-04-11 | 2006-11-24 | Nichia Chem Ind Ltd | 窒化物半導体ウエハ及びその製造方法 |
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JPH0375298A (ja) * | 1989-05-22 | 1991-03-29 | Sumitomo Electric Ind Ltd | 高圧相物質単結晶の製造方法 |
JPH06227896A (ja) * | 1993-02-05 | 1994-08-16 | Sumitomo Electric Ind Ltd | ダイヤモンドの合成方法 |
JP2002029897A (ja) * | 2000-07-10 | 2002-01-29 | Sumitomo Electric Ind Ltd | 単結晶GaN基板の製造方法と単結晶GaN基板 |
JP2006315947A (ja) * | 2005-04-11 | 2006-11-24 | Nichia Chem Ind Ltd | 窒化物半導体ウエハ及びその製造方法 |
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