JP2013140852A - 液体噴射装置 - Google Patents
液体噴射装置 Download PDFInfo
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- JP2013140852A JP2013140852A JP2011289977A JP2011289977A JP2013140852A JP 2013140852 A JP2013140852 A JP 2013140852A JP 2011289977 A JP2011289977 A JP 2011289977A JP 2011289977 A JP2011289977 A JP 2011289977A JP 2013140852 A JP2013140852 A JP 2013140852A
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- Prior art keywords
- voltage
- piezoelectric
- piezoelectric layer
- polarization
- piezoelectric element
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Images
Classifications
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- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
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- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/04588—Control methods or devices therefor, e.g. driver circuits, control circuits using a specific waveform
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
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- B—PERFORMING OPERATIONS; TRANSPORTING
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Abstract
【解決手段】圧電体層および圧電体層に設けられた電極を備えた圧電素子と、圧電素子を駆動する駆動波形を圧電素子に供給する駆動手段と、を有してノズル開口から液体を吐出する液体噴射装置であって、圧電体層は、ビスマス、鉄、バリウム及びチタンを含むペロブスカイト構造の複合酸化物からなり、駆動波形200が、抗電圧以上の第一電圧Vmを引加して分極状態とする分極工程P01と、第一電圧Vmの印加状態から第一電圧Vmとは逆極性の電圧V1を印加して圧電体層の分極を緩和させる緩和工程P02と、逆極性の電圧V1の印加状態から第一電圧Vmより大きな電圧P05を印加して液体を吐出する吐出工程P03とを有する。
【選択図】図11
Description
かかる態様では、抗電圧以上の第一電圧を引加して分極状態とする分極工程と、前記第一電圧の印加状態から当該第一電圧とは逆極性の電圧を印加して前記圧電体層の分極を緩和させる緩和工程とを付与することにより、分極緩和を促進し、その状態から第一電圧より大きな電圧を印加することにより、大きな変位量を得ることができる。また、圧電材料を、非鉛系、すなわち、鉛を含有しないまたは鉛含有の少ないものとしているため、環境への負荷が小さい。
かかる態様では、抗電圧以上の第一電圧を引加して分極状態とする分極工程と、第一電圧とは同極性で大きな電圧を印加する工程とに続いて、前記大きな電圧の印加状態から当該電圧とは逆極性の電圧を印加して圧電体層の分極を緩和させることにより、分極緩和を促進し、大きな変位を得ることができる。
図1は、本発明にかかる液体噴射装置の一例であるインクジェット式記録装置の一例を示す概略図である。図1に示すように、インクジェット式記録装置IIにおいて、インクジェット式記録ヘッドを有する記録ヘッドユニット1A及び1Bは、インク供給手段を構成するカートリッジ2A及び2Bが着脱可能に設けられ、この記録ヘッドユニット1A及び1Bを搭載したキャリッジ3は、装置本体4に取り付けられたキャリッジ軸5に軸方向移動可能に設けられている。この記録ヘッドユニット1A及び1Bは、例えば、それぞれブラックインク組成物及びカラーインク組成物を吐出するものとしている。
(0<x<0.40)
(Bi1−xBax)(Fe1−xTix)O3 (1’)
(0<x<0.40)
(0<x<0.40、0.01<y<0.10)
(Bi1−xBax)((Fe1−yMy)1−xTix)O3 (2’)
(0<x<0.40、0.01<y<0.10)
下記実施例1の組成の圧電体層70を具備する圧電素子300に、図12に示す駆動波形を基本として用い、当該駆動波形のΔV=35Vと一定として、Vm及びVminを変化させた波形を、200ms間隔と十分なディレイタイムをとった状態で印加し、圧電素子300の変位量を求めた結果を図13に示す。変位量は、グラフテック社製のレーザードップラー振動計で計測した速度データを、デクロイ社製のオシロスコープにて時間積分することにより、算出している(25℃)。測定サンプルは図3の形状に加工され、キャビティーが形成されているセグメントを使用し、各駆動波形を印加して測定した。なお、各変量は、VmおよびVmin=0の場合を100として規格化して表した。
まず、(110)単結晶シリコン(Si)基板の表面に熱酸化により膜厚1200nmの酸化シリコン(SiO2)膜を形成した。次に、SiO2膜上にDCスパッター法により膜厚400nmのジルコニウム膜を作成し、これを酸素雰囲気下で熱処理(RTA)することによりジルコニア層を形成した。このジルコニア層に密着層としてDCスパッタ法によりジルコニウムを40nmを形成した後、同じくDCスパッタ法により(111)面に配向し厚さ100nmの白金膜(第1電極60)を形成した。
酢酸鉛3水和物(Pb(CH3COO)2・3H2O)、チタニウムイソプロポキシド(Ti[OCH(CH3)2]4)、ジルコニウムアセチルアセトナート(Zr(CH3COCHCOCH3)4)を主原料とし、ブチルセロソルブ(C6H14O6)を溶媒とし、ジエタノールアミン(C4H11NO2)を安定剤とし、ポリエチレングリコール(C2H6O6)を増粘剤として混合して得た前駆体溶液を用い、圧電体層を形成した。
前駆体溶液を下記の組成とし、圧電体層70の組成の異なる圧電素子について、試験例1と同様に測定した結果を図14に示す。
サンプル1: BFO/BT=79/21
サンプル2: BFO/BT=77/23
サンプル3: BFO/BT=75/25
サンプル4: BFO/BT=73/27
サンプル5: BFO/BT=71/29
サンプル6: BFO/BT=67/33
第2電極を白金とした以外は、試験例2と同様にしてサンプル1(Pt)〜サンプル5(Pt)とし、試験例1と同様に測定した結果を図15に示す。
なお、以上説明した駆動波形については、正負を逆にしても効果は同じである。
以上、本発明の一実施形態を説明したが、本発明の基本的構成は上述したものに限定されるものではない。例えば、上述した実施形態では、流路形成基板10として、シリコン単結晶基板を例示したが、特にこれに限定されず、例えば、SOI基板、ガラス等の材料を用いるようにしてもよい。
Claims (3)
- 圧電体層および該圧電体層に設けられた電極を備えた圧電素子と、前記圧電素子を駆動する駆動波形を前記圧電素子に供給する駆動手段と、を有する液体噴射装置であって、
前記圧電体層は、ビスマス、鉄、バリウム及びチタンを含むペロブスカイト構造の複合酸化物からなり、
前記駆動波形が、前記圧電体層の抗電圧以上の第一電圧を引加して分極状態とする分極工程と、前記第一電圧の印加状態から当該第一電圧とは逆極性の電圧を印加して前記圧電体層の分極を緩和させる緩和工程と、該逆極性の電圧の印加状態から前記第一電圧より大きな電圧を印加して液体を吐出する吐出工程と、を有することを特徴とする液体噴射装置。 - 前記第一電圧が、前記圧電素子の待機状態において印加される中間電圧であることを特徴とする液体噴射装置。
- 液体を吐出するノズル開口に連通する圧力発生室と、
圧電体層および該圧電体層に設けられた電極を備えた圧電素子と、前記圧電素子を駆動する駆動波形を前記圧電素子に供給する駆動手段と、を有する液体噴射装置であって、
前記圧電体層は、ビスマス、鉄、バリウム及びチタンを含むペロブスカイト構造の複合酸化物からなり、
前記駆動波形が、前記圧電体層の抗電圧以上の第一電圧を印加して分極状態とする分極工程と、前記第一電圧の印加状態から当該第一電圧とは同極性で大きな電圧を印加する工程と、前記大きな電圧の印加状態から当該電圧とは逆極性の電圧を印加して前記圧電体層の分極を緩和させて液体を吐出する吐出工程とを有する
ことを特徴とする液体噴射装置。
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US13/726,839 US9162455B2 (en) | 2011-12-28 | 2012-12-26 | Liquid ejecting apparatus |
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JP2015039825A (ja) * | 2013-08-21 | 2015-03-02 | セイコーエプソン株式会社 | 液体噴射装置及び液体噴射ヘッドの駆動方法 |
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US9662880B2 (en) | 2015-09-11 | 2017-05-30 | Xerox Corporation | Integrated thin film piezoelectric printhead |
JP2022126445A (ja) | 2021-02-18 | 2022-08-30 | 東芝テック株式会社 | 液体吐出ヘッド及び液体吐出装置 |
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