JP2013123074A5 - - Google Patents

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Publication number
JP2013123074A5
JP2013123074A5 JP2013018260A JP2013018260A JP2013123074A5 JP 2013123074 A5 JP2013123074 A5 JP 2013123074A5 JP 2013018260 A JP2013018260 A JP 2013018260A JP 2013018260 A JP2013018260 A JP 2013018260A JP 2013123074 A5 JP2013123074 A5 JP 2013123074A5
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JP
Japan
Prior art keywords
layer
compound semiconductor
type iii
surface layer
gate electrode
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JP2013018260A
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English (en)
Japanese (ja)
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JP2013123074A (ja
JP6096523B2 (ja
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Priority to JP2013018260A priority Critical patent/JP6096523B2/ja
Priority claimed from JP2013018260A external-priority patent/JP6096523B2/ja
Publication of JP2013123074A publication Critical patent/JP2013123074A/ja
Publication of JP2013123074A5 publication Critical patent/JP2013123074A5/ja
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Publication of JP6096523B2 publication Critical patent/JP6096523B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2013018260A 2013-02-01 2013-02-01 半導体装置とその製造方法 Expired - Fee Related JP6096523B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013018260A JP6096523B2 (ja) 2013-02-01 2013-02-01 半導体装置とその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013018260A JP6096523B2 (ja) 2013-02-01 2013-02-01 半導体装置とその製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2010050058A Division JP5221577B2 (ja) 2010-03-08 2010-03-08 半導体装置とその製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2015092719A Division JP6185508B2 (ja) 2015-04-30 2015-04-30 半導体装置とその製造方法

Publications (3)

Publication Number Publication Date
JP2013123074A JP2013123074A (ja) 2013-06-20
JP2013123074A5 true JP2013123074A5 (enExample) 2013-12-05
JP6096523B2 JP6096523B2 (ja) 2017-03-15

Family

ID=48774840

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013018260A Expired - Fee Related JP6096523B2 (ja) 2013-02-01 2013-02-01 半導体装置とその製造方法

Country Status (1)

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JP (1) JP6096523B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017126610A (ja) 2016-01-12 2017-07-20 トヨタ自動車株式会社 スイッチング素子

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0624208B2 (ja) * 1982-07-29 1994-03-30 日本電気株式会社 半導体装置
JPH0415929A (ja) * 1990-05-10 1992-01-21 Fujitsu Ltd 高電子移動度トランジスタ
JP2000068498A (ja) * 1998-08-21 2000-03-03 Nippon Telegr & Teleph Corp <Ntt> 絶縁性窒化物膜およびそれを用いた半導体装置
JP4906023B2 (ja) * 2001-08-14 2012-03-28 古河電気工業株式会社 ＧａＮ系半導体装置
JP2004273486A (ja) * 2003-03-05 2004-09-30 Mitsubishi Electric Corp 半導体装置およびその製造方法
JP4041075B2 (ja) * 2004-02-27 2008-01-30 株式会社東芝 半導体装置

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