JP2013104754A5 - - Google Patents

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Publication number
JP2013104754A5
JP2013104754A5 JP2011248027A JP2011248027A JP2013104754A5 JP 2013104754 A5 JP2013104754 A5 JP 2013104754A5 JP 2011248027 A JP2011248027 A JP 2011248027A JP 2011248027 A JP2011248027 A JP 2011248027A JP 2013104754 A5 JP2013104754 A5 JP 2013104754A5
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JP
Japan
Prior art keywords
diaphragm
outer peripheral
physical quantity
peripheral portion
holding member
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Pending
Application number
JP2011248027A
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English (en)
Japanese (ja)
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JP2013104754A (ja
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Priority to JP2011248027A priority Critical patent/JP2013104754A/ja
Priority claimed from JP2011248027A external-priority patent/JP2013104754A/ja
Publication of JP2013104754A publication Critical patent/JP2013104754A/ja
Publication of JP2013104754A5 publication Critical patent/JP2013104754A5/ja
Pending legal-status Critical Current

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JP2011248027A 2011-11-11 2011-11-11 物理量検出器および物理量検出器の製造方法 Pending JP2013104754A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011248027A JP2013104754A (ja) 2011-11-11 2011-11-11 物理量検出器および物理量検出器の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011248027A JP2013104754A (ja) 2011-11-11 2011-11-11 物理量検出器および物理量検出器の製造方法

Publications (2)

Publication Number Publication Date
JP2013104754A JP2013104754A (ja) 2013-05-30
JP2013104754A5 true JP2013104754A5 (enExample) 2014-12-25

Family

ID=48624400

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011248027A Pending JP2013104754A (ja) 2011-11-11 2011-11-11 物理量検出器および物理量検出器の製造方法

Country Status (1)

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JP (1) JP2013104754A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9605989B2 (en) 2013-01-16 2017-03-28 Seiko Epson Corporation Liquid pressure meter, liquid level meter, and warning system
JP6437267B2 (ja) * 2014-10-15 2018-12-12 大和製衡株式会社 ロードセル
EP4660601A2 (en) * 2019-02-27 2025-12-10 Kistler Holding AG Sensor

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005037310A (ja) * 2003-07-18 2005-02-10 Fuji Koki Corp 圧力センサ
JP2006194736A (ja) * 2005-01-13 2006-07-27 Denso Corp 圧力検出装置およびその製造方法
JP2009186209A (ja) * 2008-02-04 2009-08-20 Toyota Motor Corp 圧力センサ
JP2010019828A (ja) * 2008-06-11 2010-01-28 Epson Toyocom Corp 圧力センサー用ダイアフラムおよび圧力センサー
JP5187529B2 (ja) * 2008-07-22 2013-04-24 セイコーエプソン株式会社 圧力センサー
JP2011149708A (ja) * 2010-01-19 2011-08-04 Seiko Epson Corp 力検出ユニット、及び力検出器

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