JP2009222475A5 - - Google Patents

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Publication number
JP2009222475A5
JP2009222475A5 JP2008065383A JP2008065383A JP2009222475A5 JP 2009222475 A5 JP2009222475 A5 JP 2009222475A5 JP 2008065383 A JP2008065383 A JP 2008065383A JP 2008065383 A JP2008065383 A JP 2008065383A JP 2009222475 A5 JP2009222475 A5 JP 2009222475A5
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JP
Japan
Prior art keywords
arm
facing
composite sensor
sensor according
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2008065383A
Other languages
English (en)
Japanese (ja)
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JP2009222475A (ja
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Publication date
Application filed filed Critical
Priority to JP2008065383A priority Critical patent/JP2009222475A/ja
Priority claimed from JP2008065383A external-priority patent/JP2009222475A/ja
Publication of JP2009222475A publication Critical patent/JP2009222475A/ja
Publication of JP2009222475A5 publication Critical patent/JP2009222475A5/ja
Pending legal-status Critical Current

Links

JP2008065383A 2008-03-14 2008-03-14 複合センサ Pending JP2009222475A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008065383A JP2009222475A (ja) 2008-03-14 2008-03-14 複合センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008065383A JP2009222475A (ja) 2008-03-14 2008-03-14 複合センサ

Publications (2)

Publication Number Publication Date
JP2009222475A JP2009222475A (ja) 2009-10-01
JP2009222475A5 true JP2009222475A5 (enExample) 2011-03-31

Family

ID=41239429

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008065383A Pending JP2009222475A (ja) 2008-03-14 2008-03-14 複合センサ

Country Status (1)

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JP (1) JP2009222475A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5655501B2 (ja) * 2010-01-05 2015-01-21 セイコーエプソン株式会社 振動素子、振動子、および電子機器
JP5772286B2 (ja) 2011-06-24 2015-09-02 セイコーエプソン株式会社 屈曲振動片及び電子機器
JP2013024721A (ja) 2011-07-21 2013-02-04 Seiko Epson Corp 振動ジャイロ素子、ジャイロセンサー及び電子機器
US9840409B2 (en) * 2015-01-28 2017-12-12 Invensense, Inc. Translating Z axis accelerometer
JP6780467B2 (ja) * 2016-11-24 2020-11-04 セイコーエプソン株式会社 物理量センサー、電子機器及び移動体

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2869514B2 (ja) * 1993-10-29 1999-03-10 日本航空電子工業株式会社 １軸角速度／加速度センサ
JP2002243450A (ja) * 2001-02-16 2002-08-28 Victor Co Of Japan Ltd 角速度センサ、加速度センサ及び角速度／加速度兼用センサ
JP4774733B2 (ja) * 2004-12-03 2011-09-14 パナソニック株式会社 複合センサ
JP2007256235A (ja) * 2006-03-27 2007-10-04 Matsushita Electric Ind Co Ltd 慣性力センサ
JP2007256234A (ja) * 2006-03-27 2007-10-04 Matsushita Electric Ind Co Ltd 慣性力センサ

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