JP2013084743A5 - - Google Patents
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- Publication number
- JP2013084743A5 JP2013084743A5 JP2011223300A JP2011223300A JP2013084743A5 JP 2013084743 A5 JP2013084743 A5 JP 2013084743A5 JP 2011223300 A JP2011223300 A JP 2011223300A JP 2011223300 A JP2011223300 A JP 2011223300A JP 2013084743 A5 JP2013084743 A5 JP 2013084743A5
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- microlens
- length
- shape
- cross
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 20
- 238000012544 monitoring process Methods 0.000 claims description 14
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 238000005259 measurement Methods 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 claims description 2
- 238000006243 chemical reaction Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 230000002596 correlated effect Effects 0.000 description 1
- 230000000875 corresponding effect Effects 0.000 description 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011223300A JP5800662B2 (ja) | 2011-10-07 | 2011-10-07 | 半導体装置及びその製造方法 |
| US13/611,375 US9276028B2 (en) | 2011-10-07 | 2012-09-12 | Semiconductor device including pixels, microlenses, and a monitoring structure, and a method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011223300A JP5800662B2 (ja) | 2011-10-07 | 2011-10-07 | 半導体装置及びその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013084743A JP2013084743A (ja) | 2013-05-09 |
| JP2013084743A5 true JP2013084743A5 (https=) | 2014-11-20 |
| JP5800662B2 JP5800662B2 (ja) | 2015-10-28 |
Family
ID=48041540
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011223300A Expired - Fee Related JP5800662B2 (ja) | 2011-10-07 | 2011-10-07 | 半導体装置及びその製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US9276028B2 (https=) |
| JP (1) | JP5800662B2 (https=) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2014112002A1 (ja) * | 2013-01-15 | 2017-01-19 | オリンパス株式会社 | 撮像素子、及び撮像装置 |
| US20150064629A1 (en) * | 2013-08-27 | 2015-03-05 | Visera Technologies Company Limited | Manufacturing method for microlenses |
| US10249661B2 (en) * | 2014-08-22 | 2019-04-02 | Visera Technologies Company Limited | Imaging devices with dummy patterns |
| JP6927098B2 (ja) * | 2018-03-13 | 2021-08-25 | 日本電信電話株式会社 | レンズ集積受光素子及びその検査方法 |
| US20190339422A1 (en) * | 2018-05-03 | 2019-11-07 | Visera Technologies Company Limited | Method for forming micro-lens array and photomask therefor |
| TW202243239A (zh) * | 2021-01-08 | 2022-11-01 | 日商索尼集團公司 | 顯示裝置及電子機器 |
| WO2025249180A1 (ja) * | 2024-05-30 | 2025-12-04 | ソニーセミコンダクタソリューションズ株式会社 | 表示装置 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100628231B1 (ko) * | 2004-12-30 | 2006-09-26 | 동부일렉트로닉스 주식회사 | 사각 마이크로렌즈를 갖는 이미지 센서 및 그 제조방법 |
| JP2006253464A (ja) * | 2005-03-11 | 2006-09-21 | Fuji Photo Film Co Ltd | マイクロレンズの製造方法及びこれを用いて製造した固体撮像素子 |
| JP2006351853A (ja) * | 2005-06-16 | 2006-12-28 | Fujifilm Holdings Corp | 固体撮像素子およびその製造方法 |
| US8003983B2 (en) * | 2006-04-19 | 2011-08-23 | United Microelectronics Corp. | Wafer for manufacturing image sensors, test key layout for defects inspection, and methods for manufacturing image sensors and for forming test key |
| US7612319B2 (en) * | 2006-06-09 | 2009-11-03 | Aptina Imaging Corporation | Method and apparatus providing a microlens for an image sensor |
| US20110130508A1 (en) * | 2009-07-29 | 2011-06-02 | Alan David Pendley | Topside optical adhesive for micro-optical film embedded into paper during the papermaking process |
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2011
- 2011-10-07 JP JP2011223300A patent/JP5800662B2/ja not_active Expired - Fee Related
-
2012
- 2012-09-12 US US13/611,375 patent/US9276028B2/en not_active Expired - Fee Related