JP2013033726A5 - - Google Patents
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- JP2013033726A5 JP2013033726A5 JP2012142092A JP2012142092A JP2013033726A5 JP 2013033726 A5 JP2013033726 A5 JP 2013033726A5 JP 2012142092 A JP2012142092 A JP 2012142092A JP 2012142092 A JP2012142092 A JP 2012142092A JP 2013033726 A5 JP2013033726 A5 JP 2013033726A5
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- JP
- Japan
- Prior art keywords
- signal
- waveform pattern
- frequency signal
- frequency
- processing chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000005856 abnormality Effects 0.000 claims description 21
- 230000002159 abnormal effect Effects 0.000 claims description 13
- 239000000284 extract Substances 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims 14
- 238000003795 desorption Methods 0.000 claims 2
- 238000012544 monitoring process Methods 0.000 claims 2
- 239000000523 sample Substances 0.000 claims 2
- 238000005070 sampling Methods 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 1
- 238000005530 etching Methods 0.000 description 9
- 239000004642 Polyimide Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012142092A JP2013033726A (ja) | 2011-06-27 | 2012-06-25 | 異常検出装置及び異常検出方法 |
| TW101122756A TW201316374A (zh) | 2011-06-27 | 2012-06-26 | 異常檢測裝置及異常檢測方法 |
| US13/534,594 US20130056154A1 (en) | 2011-06-27 | 2012-06-27 | Abnormality detecting unit and abnormality detecting method |
| CN2012102169091A CN102856149A (zh) | 2011-06-27 | 2012-06-27 | 异常检测装置和异常检测方法 |
| KR1020120069186A KR20130007469A (ko) | 2011-06-27 | 2012-06-27 | 이상 검출 장치 및 이상 검출 방법 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011141492 | 2011-06-27 | ||
| JP2011141492 | 2011-06-27 | ||
| JP2012142092A JP2013033726A (ja) | 2011-06-27 | 2012-06-25 | 異常検出装置及び異常検出方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2013033726A JP2013033726A (ja) | 2013-02-14 |
| JP2013033726A5 true JP2013033726A5 (zh) | 2015-08-06 |
Family
ID=47789412
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012142092A Withdrawn JP2013033726A (ja) | 2011-06-27 | 2012-06-25 | 異常検出装置及び異常検出方法 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2013033726A (zh) |
| KR (1) | KR20130007469A (zh) |
| TW (1) | TW201316374A (zh) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI562252B (en) * | 2014-02-17 | 2016-12-11 | Shinkawa Kk | Detecting discharging device, wire bonding device and detecting discharging method |
| JP6496579B2 (ja) * | 2015-03-17 | 2019-04-03 | 東京エレクトロン株式会社 | 基板処理方法及び基板処理装置 |
| EP3742169B1 (en) * | 2018-01-16 | 2022-06-22 | Hitachi High-Tech Corporation | Specimen processing system |
| JP7067516B2 (ja) * | 2019-03-26 | 2022-05-16 | 日本電産株式会社 | プラズマ処理装置 |
| KR102709642B1 (ko) | 2021-11-26 | 2024-09-25 | 주식회사 뉴파워 프라즈마 | 잡음 특성 향상을 위한 rf 제너레이터 전원 제어 시스템 |
| EP4450966A1 (en) * | 2021-12-13 | 2024-10-23 | Proterial, Ltd. | State monitoring system and state monitoring method |
| TW202420392A (zh) | 2022-07-22 | 2024-05-16 | 日商東京威力科創股份有限公司 | 檢測方法及電漿處理裝置 |
| CN118091398B (zh) * | 2024-04-09 | 2024-06-28 | 浙江索高电气科技有限公司 | 一种高压开关设备局部放电故障识别方法、设备及介质 |
-
2012
- 2012-06-25 JP JP2012142092A patent/JP2013033726A/ja not_active Withdrawn
- 2012-06-26 TW TW101122756A patent/TW201316374A/zh unknown
- 2012-06-27 KR KR1020120069186A patent/KR20130007469A/ko not_active Application Discontinuation
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