JP2013029328A5 - - Google Patents
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- Publication number
- JP2013029328A5 JP2013029328A5 JP2011163689A JP2011163689A JP2013029328A5 JP 2013029328 A5 JP2013029328 A5 JP 2013029328A5 JP 2011163689 A JP2011163689 A JP 2011163689A JP 2011163689 A JP2011163689 A JP 2011163689A JP 2013029328 A5 JP2013029328 A5 JP 2013029328A5
- Authority
- JP
- Japan
- Prior art keywords
- marks
- light
- scale
- film
- predetermined pitch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001579 optical reflectometry Methods 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 claims 12
- 238000004519 manufacturing process Methods 0.000 claims 5
- 238000000016 photochemical curing Methods 0.000 claims 4
- 239000012528 membrane Substances 0.000 claims 3
- 230000001678 irradiating effect Effects 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 239000011358 absorbing material Substances 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 230000031700 light absorption Effects 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- 238000002834 transmittance Methods 0.000 description 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011163689A JP5882619B2 (ja) | 2011-07-26 | 2011-07-26 | スケール及びその製造方法並びにアブソリュートエンコーダ |
| EP12176064.9A EP2551646B1 (en) | 2011-07-26 | 2012-07-12 | Scale and manufacturing method thereof, and absolute encoder |
| US13/555,284 US20130026351A1 (en) | 2011-07-26 | 2012-07-23 | Scale and manufacturing method thereof, and absolute encoder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011163689A JP5882619B2 (ja) | 2011-07-26 | 2011-07-26 | スケール及びその製造方法並びにアブソリュートエンコーダ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013029328A JP2013029328A (ja) | 2013-02-07 |
| JP2013029328A5 true JP2013029328A5 (enExample) | 2014-09-04 |
| JP5882619B2 JP5882619B2 (ja) | 2016-03-09 |
Family
ID=46888886
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011163689A Expired - Fee Related JP5882619B2 (ja) | 2011-07-26 | 2011-07-26 | スケール及びその製造方法並びにアブソリュートエンコーダ |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20130026351A1 (enExample) |
| EP (1) | EP2551646B1 (enExample) |
| JP (1) | JP5882619B2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015049140A (ja) * | 2013-09-02 | 2015-03-16 | 株式会社ニコン | エンコーダ用スケール、エンコーダ、エンコーダの製造方法、駆動装置、及びロボット装置 |
| EP3553476A1 (de) * | 2018-04-11 | 2019-10-16 | Siemens Aktiengesellschaft | Drehgeber mit spektral codierter massverkörperung |
| US11874144B2 (en) * | 2020-07-28 | 2024-01-16 | Li Lin | Displacement measurement system |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60152916U (ja) | 1984-03-21 | 1985-10-11 | ロ−ム株式会社 | エンコ−ダ |
| JPS6145923A (ja) * | 1984-08-10 | 1986-03-06 | Aronshiya:Kk | 反射式ロ−タリ−エンコ−ダ−用回転デイスクの製作方法 |
| JPH01152314A (ja) | 1987-12-10 | 1989-06-14 | Nikon Corp | アブソリュートエンコーダ |
| US5212380A (en) * | 1989-10-26 | 1993-05-18 | Optec D.D. Meico Laboratory Co., Ltd. | Automotive engine control system with rotary encoder indexing |
| JPH0599695A (ja) * | 1991-10-08 | 1993-04-23 | Mitsutoyo Corp | 光学格子の製造方法 |
| KR100264312B1 (ko) * | 1995-10-13 | 2000-08-16 | 디지래드 | 개선된 전하 수집능력을 갖는 반도체 방사선 검출기 |
| GB0109057D0 (en) | 2001-04-11 | 2001-05-30 | Renishaw Plc | Absolute postition measurement |
| JP3741046B2 (ja) * | 2002-01-25 | 2006-02-01 | 富士電機ホールディングス株式会社 | 光学式エンコーダ用スケールの製造方法 |
| JP3976630B2 (ja) * | 2002-07-12 | 2007-09-19 | オークマ株式会社 | エンコーダのスケール製造方法およびスケール製造装置 |
| US7299991B2 (en) * | 2003-04-08 | 2007-11-27 | Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. | Reflective members for use in encoder systems |
| US7112781B2 (en) * | 2004-04-21 | 2006-09-26 | Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. | Absolute encoder |
| US6992757B2 (en) * | 2004-06-14 | 2006-01-31 | Varec, Inc. | Method and system for encoding fluid level |
| US7622245B2 (en) * | 2005-10-11 | 2009-11-24 | Home Box Office, Inc. | Manufacturing data-storage media using light-curable material |
| JP2007248359A (ja) * | 2006-03-17 | 2007-09-27 | Citizen Holdings Co Ltd | 位置検出装置 |
| JP2008045931A (ja) * | 2006-08-11 | 2008-02-28 | Nippon Sheet Glass Co Ltd | 光学式エンコーダのスケールの製造方法 |
| JP4828612B2 (ja) * | 2007-06-01 | 2011-11-30 | 株式会社ミツトヨ | 反射型エンコーダ、そのスケール、及び、スケールの製造方法 |
| GB0807242D0 (en) * | 2008-04-21 | 2008-05-28 | Renishaw Plc | Metrological scale |
| JP5308059B2 (ja) * | 2008-04-25 | 2013-10-09 | 株式会社ミツトヨ | 光電式エンコーダ用スケール |
| JP5138503B2 (ja) * | 2008-06-17 | 2013-02-06 | 株式会社アイエイアイ | リニアスケール製造方法 |
| JP5779012B2 (ja) * | 2011-06-24 | 2015-09-16 | キヤノン株式会社 | ２次元アブソリュートエンコーダ及びそのスケール |
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2011
- 2011-07-26 JP JP2011163689A patent/JP5882619B2/ja not_active Expired - Fee Related
-
2012
- 2012-07-12 EP EP12176064.9A patent/EP2551646B1/en not_active Not-in-force
- 2012-07-23 US US13/555,284 patent/US20130026351A1/en not_active Abandoned