JP5882619B2 - スケール及びその製造方法並びにアブソリュートエンコーダ - Google Patents

スケール及びその製造方法並びにアブソリュートエンコーダ Download PDF

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Publication number
JP5882619B2
JP5882619B2 JP2011163689A JP2011163689A JP5882619B2 JP 5882619 B2 JP5882619 B2 JP 5882619B2 JP 2011163689 A JP2011163689 A JP 2011163689A JP 2011163689 A JP2011163689 A JP 2011163689A JP 5882619 B2 JP5882619 B2 JP 5882619B2
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Japan
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marks
light
scale
film
amount
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Expired - Fee Related
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JP2011163689A
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Japanese (ja)
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JP2013029328A5 (enExample
JP2013029328A (ja
Inventor
公 石塚
公 石塚
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Canon Inc
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Canon Inc
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Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2011163689A priority Critical patent/JP5882619B2/ja
Priority to EP12176064.9A priority patent/EP2551646B1/en
Priority to US13/555,284 priority patent/US20130026351A1/en
Publication of JP2013029328A publication Critical patent/JP2013029328A/ja
Publication of JP2013029328A5 publication Critical patent/JP2013029328A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
JP2011163689A 2011-07-26 2011-07-26 スケール及びその製造方法並びにアブソリュートエンコーダ Expired - Fee Related JP5882619B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2011163689A JP5882619B2 (ja) 2011-07-26 2011-07-26 スケール及びその製造方法並びにアブソリュートエンコーダ
EP12176064.9A EP2551646B1 (en) 2011-07-26 2012-07-12 Scale and manufacturing method thereof, and absolute encoder
US13/555,284 US20130026351A1 (en) 2011-07-26 2012-07-23 Scale and manufacturing method thereof, and absolute encoder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011163689A JP5882619B2 (ja) 2011-07-26 2011-07-26 スケール及びその製造方法並びにアブソリュートエンコーダ

Publications (3)

Publication Number Publication Date
JP2013029328A JP2013029328A (ja) 2013-02-07
JP2013029328A5 JP2013029328A5 (enExample) 2014-09-04
JP5882619B2 true JP5882619B2 (ja) 2016-03-09

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JP2011163689A Expired - Fee Related JP5882619B2 (ja) 2011-07-26 2011-07-26 スケール及びその製造方法並びにアブソリュートエンコーダ

Country Status (3)

Country Link
US (1) US20130026351A1 (enExample)
EP (1) EP2551646B1 (enExample)
JP (1) JP5882619B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015049140A (ja) * 2013-09-02 2015-03-16 株式会社ニコン エンコーダ用スケール、エンコーダ、エンコーダの製造方法、駆動装置、及びロボット装置
EP3553476A1 (de) * 2018-04-11 2019-10-16 Siemens Aktiengesellschaft Drehgeber mit spektral codierter massverkörperung
US11874144B2 (en) * 2020-07-28 2024-01-16 Li Lin Displacement measurement system

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60152916U (ja) 1984-03-21 1985-10-11 ロ−ム株式会社 エンコ−ダ
JPS6145923A (ja) * 1984-08-10 1986-03-06 Aronshiya:Kk 反射式ロ−タリ−エンコ−ダ−用回転デイスクの製作方法
JPH01152314A (ja) 1987-12-10 1989-06-14 Nikon Corp アブソリュートエンコーダ
US5212380A (en) * 1989-10-26 1993-05-18 Optec D.D. Meico Laboratory Co., Ltd. Automotive engine control system with rotary encoder indexing
JPH0599695A (ja) * 1991-10-08 1993-04-23 Mitsutoyo Corp 光学格子の製造方法
KR100264312B1 (ko) * 1995-10-13 2000-08-16 디지래드 개선된 전하 수집능력을 갖는 반도체 방사선 검출기
GB0109057D0 (en) 2001-04-11 2001-05-30 Renishaw Plc Absolute postition measurement
JP3741046B2 (ja) * 2002-01-25 2006-02-01 富士電機ホールディングス株式会社 光学式エンコーダ用スケールの製造方法
JP3976630B2 (ja) * 2002-07-12 2007-09-19 オークマ株式会社 エンコーダのスケール製造方法およびスケール製造装置
US7299991B2 (en) * 2003-04-08 2007-11-27 Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. Reflective members for use in encoder systems
US7112781B2 (en) * 2004-04-21 2006-09-26 Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. Absolute encoder
US6992757B2 (en) * 2004-06-14 2006-01-31 Varec, Inc. Method and system for encoding fluid level
US7622245B2 (en) * 2005-10-11 2009-11-24 Home Box Office, Inc. Manufacturing data-storage media using light-curable material
JP2007248359A (ja) * 2006-03-17 2007-09-27 Citizen Holdings Co Ltd 位置検出装置
JP2008045931A (ja) * 2006-08-11 2008-02-28 Nippon Sheet Glass Co Ltd 光学式エンコーダのスケールの製造方法
JP4828612B2 (ja) * 2007-06-01 2011-11-30 株式会社ミツトヨ 反射型エンコーダ、そのスケール、及び、スケールの製造方法
GB0807242D0 (en) * 2008-04-21 2008-05-28 Renishaw Plc Metrological scale
JP5308059B2 (ja) * 2008-04-25 2013-10-09 株式会社ミツトヨ 光電式エンコーダ用スケール
JP5138503B2 (ja) * 2008-06-17 2013-02-06 株式会社アイエイアイ リニアスケール製造方法
JP5779012B2 (ja) * 2011-06-24 2015-09-16 キヤノン株式会社 ２次元アブソリュートエンコーダ及びそのスケール

Also Published As

Publication number Publication date
EP2551646B1 (en) 2016-11-16
EP2551646A2 (en) 2013-01-30
JP2013029328A (ja) 2013-02-07
EP2551646A3 (en) 2013-06-26
US20130026351A1 (en) 2013-01-31

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