JP2013026616A - 発光素子 - Google Patents
発光素子 Download PDFInfo
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- JP2013026616A JP2013026616A JP2012055118A JP2012055118A JP2013026616A JP 2013026616 A JP2013026616 A JP 2013026616A JP 2012055118 A JP2012055118 A JP 2012055118A JP 2012055118 A JP2012055118 A JP 2012055118A JP 2013026616 A JP2013026616 A JP 2013026616A
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- 239000004065 semiconductor Substances 0.000 claims abstract description 170
- 230000004888 barrier function Effects 0.000 claims abstract description 55
- 239000000203 mixture Substances 0.000 claims description 34
- 239000002019 doping agent Substances 0.000 claims description 30
- 229910052725 zinc Inorganic materials 0.000 claims description 6
- 229910052749 magnesium Inorganic materials 0.000 claims description 5
- 230000007423 decrease Effects 0.000 claims description 4
- 229910052788 barium Inorganic materials 0.000 claims description 3
- 229910052791 calcium Inorganic materials 0.000 claims description 3
- 229910052712 strontium Inorganic materials 0.000 claims description 3
- 238000002347 injection Methods 0.000 abstract description 22
- 239000007924 injection Substances 0.000 abstract description 22
- 230000000903 blocking effect Effects 0.000 abstract description 11
- 230000006798 recombination Effects 0.000 abstract description 10
- 238000005215 recombination Methods 0.000 abstract description 10
- 239000013078 crystal Substances 0.000 abstract description 4
- 230000007547 defect Effects 0.000 abstract description 4
- 239000000243 solution Substances 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 411
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 23
- 239000000463 material Substances 0.000 description 23
- 239000004973 liquid crystal related substance Substances 0.000 description 19
- 238000000034 method Methods 0.000 description 15
- 238000010586 diagram Methods 0.000 description 12
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 12
- 239000000758 substrate Substances 0.000 description 12
- 239000010408 film Substances 0.000 description 11
- 238000000605 extraction Methods 0.000 description 10
- 229910002704 AlGaN Inorganic materials 0.000 description 9
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 8
- 239000010931 gold Substances 0.000 description 8
- 229910052759 nickel Inorganic materials 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 7
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 7
- 229910052709 silver Inorganic materials 0.000 description 7
- 239000011651 chromium Substances 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 6
- 238000005530 etching Methods 0.000 description 6
- 229910052732 germanium Inorganic materials 0.000 description 6
- 229910052738 indium Inorganic materials 0.000 description 6
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 6
- 239000010409 thin film Substances 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 5
- 229910052804 chromium Inorganic materials 0.000 description 5
- 239000004020 conductor Substances 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- 238000005286 illumination Methods 0.000 description 5
- 239000007769 metal material Substances 0.000 description 5
- -1 nitride silicate Chemical class 0.000 description 5
- 229910052697 platinum Inorganic materials 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 239000002356 single layer Substances 0.000 description 5
- 239000011135 tin Substances 0.000 description 5
- 239000010936 titanium Substances 0.000 description 5
- 239000011701 zinc Substances 0.000 description 5
- 239000000956 alloy Substances 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000969 carrier Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 229910052763 palladium Inorganic materials 0.000 description 4
- 239000003566 sealing material Substances 0.000 description 4
- 239000010944 silver (metal) Substances 0.000 description 4
- 229910052718 tin Inorganic materials 0.000 description 4
- 229910052719 titanium Inorganic materials 0.000 description 4
- 239000011787 zinc oxide Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- JAONJTDQXUSBGG-UHFFFAOYSA-N dialuminum;dizinc;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Al+3].[Al+3].[Zn+2].[Zn+2] JAONJTDQXUSBGG-UHFFFAOYSA-N 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 229910052733 gallium Inorganic materials 0.000 description 3
- 229910052735 hafnium Inorganic materials 0.000 description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 3
- 229910052741 iridium Inorganic materials 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
- 239000012788 optical film Substances 0.000 description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- 239000005020 polyethylene terephthalate Substances 0.000 description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 description 3
- 229910052707 ruthenium Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- SKRWFPLZQAAQSU-UHFFFAOYSA-N stibanylidynetin;hydrate Chemical compound O.[Sn].[Sb] SKRWFPLZQAAQSU-UHFFFAOYSA-N 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000004925 Acrylic resin Substances 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- 239000004954 Polyphthalamide Substances 0.000 description 2
- 239000004793 Polystyrene Substances 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 238000000295 emission spectrum Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 150000004678 hydrides Chemical class 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052758 niobium Inorganic materials 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 229920000515 polycarbonate Polymers 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 229920006375 polyphtalamide Polymers 0.000 description 2
- 229920002223 polystyrene Polymers 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000002096 quantum dot Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229910052702 rhenium Inorganic materials 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- 239000012780 transparent material Substances 0.000 description 2
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- LTPBRCUWZOMYOC-UHFFFAOYSA-N Beryllium oxide Chemical compound O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 description 1
- BTBUEUYNUDRHOZ-UHFFFAOYSA-N Borate Chemical compound [O-]B([O-])[O-] BTBUEUYNUDRHOZ-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- 229910005191 Ga 2 O 3 Inorganic materials 0.000 description 1
- 229910002601 GaN Inorganic materials 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 229920000106 Liquid crystal polymer Polymers 0.000 description 1
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- 229920012310 Polyamide 9T (PA9T) Polymers 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910008842 WTi Inorganic materials 0.000 description 1
- DZLPZFLXRVRDAE-UHFFFAOYSA-N [O--].[O--].[O--].[O--].[Al+3].[Zn++].[In+3] Chemical compound [O--].[O--].[O--].[O--].[Al+3].[Zn++].[In+3] DZLPZFLXRVRDAE-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 150000004645 aluminates Chemical class 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- YZZNJYQZJKSEER-UHFFFAOYSA-N gallium tin Chemical compound [Ga].[Sn] YZZNJYQZJKSEER-UHFFFAOYSA-N 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 230000004313 glare Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- HRHKULZDDYWVBE-UHFFFAOYSA-N indium;oxozinc;tin Chemical compound [In].[Sn].[Zn]=O HRHKULZDDYWVBE-UHFFFAOYSA-N 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910003465 moissanite Inorganic materials 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
- H01L33/06—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
- H01L33/32—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
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- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/14—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a carrier transport control structure, e.g. highly-doped semiconductor layer or current-blocking structure
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
- H01L33/32—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen
- H01L33/325—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen characterised by the doping materials
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Abstract
【解決手段】発光素子は、第1半導体層120、第2半導体層150、及び前記第1半導体層と前記第2半導体層との間に配置された活性層を有し、活性層と第2半導体層150との間に、活性層での電子と正孔の再結合確率を高め、漏れ電流を防止する電子遮断層の機能をもつ、活性層より相対的に大きいバンドギャップを有する中間層140を備える。発光素子は、活性層の障壁層の構造を変更し、中間層のバンドギャップエネルギーに変化を与えて、活性層の正孔注入効率を改善することによって、発光効率を向上させることができる。
【選択図】図3
Description
Claims (24)
- 第1半導体層、第2半導体層、及び前記第1半導体層と前記第2半導体層との間に配置された活性層を有する発光構造物を備え、
前記第1半導体層は、N型ドーパントがドーピングされたN型半導体層で、前記第2半導体層は、P型ドーパントがドーピングされたP型半導体層であり、
前記活性層は、交互に積層された少なくとも2対の井戸層及び障壁層を有し、
前記障壁層のうち前記第2半導体層に隣接した障壁層は、
第1層、及び前記第1層と前記第2半導体層との間に配置されている第2層を有し、
前記第1層は第1バンドギャップを有し、前記第2層は第2バンドギャップを有し、
前記第2バンドギャップは前記第1バンドギャップより小さく、
前記第2層はP型ドーパントでドーピングされている、発光素子。 - 第1半導体層、第2半導体層、及び前記第1半導体層と前記第2半導体層との間に配置された活性層を有する発光構造物を備え、
前記第1半導体層は、N型ドーパントがドーピングされたN型半導体層で、前記第2半導体層は、P型ドーパントがドーピングされたP型半導体層であり、
前記活性層は、交互に積層された少なくとも2対の井戸層及び障壁層を有し、
前記障壁層のうち前記第2半導体層に隣接した障壁層は、
第1層、及び前記第1層と前記第2半導体層との間に配置された第2層を有し、
前記第1層は第1バンドギャップを有し、前記第2層は第2バンドギャップを有し、
前記第2バンドギャップは前記第1バンドギャップより小さく、
前記第2層はP型ドーパントでドーピングされ、
前記第1層及び第2層は、Inを含み、
前記第2層は前記第1層より多いIn含有量を有する、発光素子。 - 第1半導体層、第2半導体層、及び前記第1半導体層と前記第2半導体層との間に配置された活性層を有する発光構造物を備え、
前記第1半導体層は、N型ドーパントがドーピングされたN型半導体層で、前記第2半導体層は、P型ドーパントがドーピングされたP型半導体層であり、
前記活性層は、交互に積層された少なくとも2対の井戸層及び障壁層を有し、
前記障壁層のうち前記第2半導体層に隣接した障壁層は、
第1層、及び前記第1層と前記第2半導体層との間に配置された第2層を有し、
前記第1層は第1バンドギャップを有し、前記第2層は第2バンドギャップを有し、
前記第2バンドギャップは前記第1バンドギャップより小さく、
前記第2層はP型ドーパントでドーピングされ、
前記活性層と前記第2半導体層との間に中間層を有し、
前記中間層は、
p型にドーピングされたp−AlxGa1−xN(0<x<1)を含み、
前記中間層は、バルク層(bulk layer)であり、前記中間層のAlの組成が変わる、発光素子。 - 前記井戸層は、第3バンドギャップを有し、
前記第2バンドギャップは前記第3バンドギャップより大きい、請求項1乃至3のいずれかに記載の発光素子。 - 前記第2層の厚さは、
2nm乃至15nmである、請求項1乃至3のいずれかに記載の発光素子。 - 前記p型ドーパントは、
Mg、Zn、Ca、Sr、Baのうちのいずれか一つを含む、請求項1乃至3のいずれかに記載の発光素子。 - 前記第2層は、Inを含む、請求項1または3に記載の発光素子。
- 前記第2層は、
前記井戸層より少なく、前記第1層より多いIn含有量を有する、請求項7に記載の発光素子。 - 前記中間層は、
前記障壁層より大きいバンドギャップを有する、請求項3に記載の発光素子。 - 前記中間層のAlの組成が、前記活性層から前記第2半導体層の方向に増加してから減少する、請求項3に記載の発光素子。
- 前記中間層のAlの組成が、前記活性層から前記第2半導体層の方向に漸増してから漸減する、請求項3に記載の発光素子。
- 前記中間層にInがドーピングされた、請求項3に記載の発光素子。
- 前記活性層と前記中間層との間に、ドーピングされないAlyGa1−yN(0<y<1)をさらに含む、請求項3に記載の発光素子。
- 前記中間層は、
300Å〜600Åの厚さに形成されている、請求項3に記載の発光素子。 - 前記中間層は、
Al組成比が5%乃至30%の間で変化される、請求項3に記載の発光素子。 - 前記第2半導体層の下部に支持部材、
前記支持部材と前記第2半導体層との間に第1電極、及び
前記第1半導体層上に第2電極
をさらに備える、請求項1乃至15のいずれかに記載の発光素子。 - 前記第2半導体層上に第2電極、
前記第1半導体層の下部に支持部材、及び
前記第2半導体層及び前記活性層の一部を除去して、前記第1半導体層の上面の一部を露出させ、前記露出された第1半導体層の上面に第1電極
を備える、請求項1乃至16のいずれかに記載の発光素子。 - 前記第2半導体層上に、所定のラフネスを有する凸凹部をさらに備える、請求項17に記載の発光素子。
- 前記ドーピングされないAlyGa1−yN(0<y<1)のバンドギャップは、前記第1層のバンドギャップより大きい、請求項13に記載の発光素子。
- 前記第1層の厚さは、4nm乃至6nmである、請求項1乃至3のいずれかに記載の発光素子。
- 前記第2層は、Mgでドーピングされ、前記Mgの濃度は、1E19atoms/cm3乃至5E19atoms/cm3である、請求項1乃至3のいずれかに記載の発光素子。
- 請求項1乃至21のいずれかに記載の発光素子を備える発光素子パッケージ。
- 請求項1乃至21のいずれかに記載の発光素子を備える照明装置。
- 請求項1乃至21のいずれかに記載の発光素子を備えるバックライトユニット。
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015122500A (ja) * | 2013-12-24 | 2015-07-02 | シャープ株式会社 | 窒化物系発光装置 |
JP2017195213A (ja) * | 2016-04-18 | 2017-10-26 | スタンレー電気株式会社 | 半導体発光素子 |
JP2018050012A (ja) * | 2016-09-23 | 2018-03-29 | 日亜化学工業株式会社 | 発光素子 |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2503603B1 (en) * | 2011-03-25 | 2019-09-25 | LG Innotek Co., Ltd. | Light emitting device and method for manufacturing the same |
JP5781032B2 (ja) * | 2012-07-30 | 2015-09-16 | 株式会社東芝 | 半導体発光素子 |
KR20140019635A (ko) * | 2012-08-06 | 2014-02-17 | 엘지이노텍 주식회사 | 발광 소자 및 발광 소자 패키지 |
KR101936312B1 (ko) | 2012-10-09 | 2019-01-08 | 엘지이노텍 주식회사 | 발광소자 |
KR101976455B1 (ko) * | 2012-10-19 | 2019-05-09 | 엘지이노텍 주식회사 | 발광 소자 및 발광 소자 패키지 |
JP6001446B2 (ja) * | 2012-12-28 | 2016-10-05 | 株式会社東芝 | 半導体発光素子及びその製造方法 |
CN103915534B (zh) * | 2012-12-31 | 2017-08-22 | 比亚迪股份有限公司 | 一种led外延片及其形成方法 |
US20160005919A1 (en) * | 2013-02-05 | 2016-01-07 | Tokuyama Corporation | Nitride semiconductor light emitting device |
CN108365066B (zh) * | 2013-02-08 | 2020-06-02 | 晶元光电股份有限公司 | 发光二极管及其制作方法 |
KR102019858B1 (ko) * | 2013-07-18 | 2019-09-09 | 엘지이노텍 주식회사 | 발광소자 및 조명시스템 |
US9653631B2 (en) * | 2013-09-03 | 2017-05-16 | Sensor Electronic Technology, Inc. | Optoelectronic device with modulation doping |
US9647168B2 (en) | 2013-09-03 | 2017-05-09 | Sensor Electronic Technology, Inc. | Optoelectronic device with modulation doping |
US10804423B2 (en) | 2013-09-03 | 2020-10-13 | Sensor Electronic Technology, Inc. | Optoelectronic device with modulation doping |
US10903391B2 (en) | 2013-09-03 | 2021-01-26 | Sensor Electronic Technology, Inc. | Optoelectronic device with modulation doping |
KR20150039475A (ko) * | 2013-10-02 | 2015-04-10 | 엘지이노텍 주식회사 | 발광소자 |
KR102116829B1 (ko) * | 2013-11-27 | 2020-06-01 | 서울바이오시스 주식회사 | 자외선 발광 다이오드 및 그것을 제조하는 방법 |
JP2015188048A (ja) * | 2014-03-10 | 2015-10-29 | 株式会社東芝 | 窒化物半導体積層体および半導体発光素子 |
DE102016111929A1 (de) | 2016-06-29 | 2018-01-04 | Osram Opto Semiconductors Gmbh | Optoelektronischer Halbleiterkörper und Leuchtdiode |
KR20180004866A (ko) | 2016-07-04 | 2018-01-15 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 |
DE102016117477A1 (de) * | 2016-09-16 | 2018-03-22 | Osram Opto Semiconductors Gmbh | Halbleiterschichtenfolge |
JP2019054023A (ja) * | 2017-09-12 | 2019-04-04 | 豊田合成株式会社 | Iii族窒化物半導体発光素子とその製造方法 |
JP2021034497A (ja) * | 2019-08-22 | 2021-03-01 | 株式会社東芝 | 半導体発光デバイス |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007088270A (ja) * | 2005-09-22 | 2007-04-05 | Matsushita Electric Works Ltd | 半導体発光素子およびそれを用いる照明装置ならびに半導体発光素子の製造方法 |
JP2008511153A (ja) * | 2004-08-26 | 2008-04-10 | エルジー イノテック カンパニー リミテッド | 窒化物半導体発光素子及びその製造方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69637304T2 (de) * | 1995-03-17 | 2008-08-07 | Toyoda Gosei Co., Ltd. | Lichtemittierende Halbleitervorrichtung bestehend aus einer III-V Nitridverbindung |
CN1160801C (zh) * | 1995-11-06 | 2004-08-04 | 日亚化学工业株式会社 | 氮化物半导体器件 |
WO2002021604A1 (fr) * | 2000-09-08 | 2002-03-14 | Sharp Kabushiki Kaisha | Dispositif emetteur de lumiere a semi-conducteurs au nitrure |
DE60230602D1 (de) * | 2001-03-28 | 2009-02-12 | Nichia Corp | Nitrid-halbleiterelement |
US7692182B2 (en) * | 2001-05-30 | 2010-04-06 | Cree, Inc. | Group III nitride based quantum well light emitting device structures with an indium containing capping structure |
JP2005203520A (ja) * | 2004-01-14 | 2005-07-28 | Sumitomo Electric Ind Ltd | 半導体発光素子 |
JP4206086B2 (ja) * | 2004-08-03 | 2009-01-07 | 住友電気工業株式会社 | 窒化物半導体発光素子および窒化物半導体発光素子を製造する方法 |
US7326963B2 (en) * | 2004-12-06 | 2008-02-05 | Sensor Electronic Technology, Inc. | Nitride-based light emitting heterostructure |
KR100753518B1 (ko) * | 2006-05-23 | 2007-08-31 | 엘지전자 주식회사 | 질화물계 발광 소자 |
KR100850950B1 (ko) * | 2006-07-26 | 2008-08-08 | 엘지전자 주식회사 | 질화물계 발광 소자 |
US20080137701A1 (en) * | 2006-12-12 | 2008-06-12 | Joseph Michael Freund | Gallium Nitride Based Semiconductor Device with Reduced Stress Electron Blocking Layer |
JP5316276B2 (ja) * | 2009-01-23 | 2013-10-16 | 住友電気工業株式会社 | 窒化物半導体発光素子、エピタキシャル基板、及び窒化物半導体発光素子を作製する方法 |
EP2408028B1 (en) * | 2010-07-16 | 2015-04-08 | LG Innotek Co., Ltd. | Light emitting device |
-
2012
- 2012-02-16 US US13/397,907 patent/US8648384B2/en active Active
- 2012-03-07 CN CN201210058023.9A patent/CN102903806B/zh active Active
- 2012-03-09 EP EP12158942.8A patent/EP2551923B1/en active Active
- 2012-03-12 JP JP2012055118A patent/JP6144014B2/ja active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008511153A (ja) * | 2004-08-26 | 2008-04-10 | エルジー イノテック カンパニー リミテッド | 窒化物半導体発光素子及びその製造方法 |
JP2007088270A (ja) * | 2005-09-22 | 2007-04-05 | Matsushita Electric Works Ltd | 半導体発光素子およびそれを用いる照明装置ならびに半導体発光素子の製造方法 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015122500A (ja) * | 2013-12-24 | 2015-07-02 | シャープ株式会社 | 窒化物系発光装置 |
JP2017195213A (ja) * | 2016-04-18 | 2017-10-26 | スタンレー電気株式会社 | 半導体発光素子 |
JP2018050012A (ja) * | 2016-09-23 | 2018-03-29 | 日亜化学工業株式会社 | 発光素子 |
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