JP2013019897A5 - - Google Patents
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- Publication number
- JP2013019897A5 JP2013019897A5 JP2012152136A JP2012152136A JP2013019897A5 JP 2013019897 A5 JP2013019897 A5 JP 2013019897A5 JP 2012152136 A JP2012152136 A JP 2012152136A JP 2012152136 A JP2012152136 A JP 2012152136A JP 2013019897 A5 JP2013019897 A5 JP 2013019897A5
- Authority
- JP
- Japan
- Prior art keywords
- electrons
- detector
- sample
- charged particle
- radiation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005855 radiation Effects 0.000 claims 11
- 239000002245 particle Substances 0.000 claims 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 7
- 229910052710 silicon Inorganic materials 0.000 claims 7
- 239000010703 silicon Substances 0.000 claims 7
- 238000005259 measurement Methods 0.000 claims 6
- 230000000903 blocking effect Effects 0.000 claims 3
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims 1
- 238000001514 detection method Methods 0.000 claims 1
- 239000011888 foil Substances 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP11172955A EP2544025A1 (en) | 2011-07-07 | 2011-07-07 | Silicon Drift Detector for use in a charged particle apparatus |
| EP11172955.4 | 2011-07-07 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013019897A JP2013019897A (ja) | 2013-01-31 |
| JP2013019897A5 true JP2013019897A5 (enExample) | 2015-09-03 |
| JP5995562B2 JP5995562B2 (ja) | 2016-09-21 |
Family
ID=46319067
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012152136A Active JP5995562B2 (ja) | 2011-07-07 | 2012-07-06 | 荷電粒子装置において用いられる検出器 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US8941072B2 (enExample) |
| EP (2) | EP2544025A1 (enExample) |
| JP (1) | JP5995562B2 (enExample) |
| CN (1) | CN102866413B (enExample) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102011080341A1 (de) * | 2011-08-03 | 2013-02-07 | Carl Zeiss Nts Gmbh | Verfahren und Teilchenstrahlgerät zur Erzeugung eines Bildes eines Objekts |
| US9123837B2 (en) * | 2013-05-31 | 2015-09-01 | Oxford Instruments Analytical Oy | Semiconductor detector with radiation shield |
| US10460905B2 (en) * | 2015-09-23 | 2019-10-29 | Kla-Tencor Corporation | Backscattered electrons (BSE) imaging using multi-beam tools |
| ITUB20159390A1 (it) * | 2015-12-24 | 2017-06-24 | Fond Bruno Kessler | Rivelatore a semiconduttore, rivelatore di radiazione e apparecchiatura di rivelazione di radiazione. |
| KR101749920B1 (ko) * | 2016-03-02 | 2017-06-22 | 한국과학기술원 | 실리콘 드리프트 디텍터를 이용한 엑스선 검출용 방사선 검출기 |
| CN105842727B (zh) * | 2016-06-03 | 2018-07-03 | 中国工程物理研究院激光聚变研究中心 | 一种透射式平响应软x射线辐射流测量装置 |
| ES2653767B1 (es) | 2016-07-07 | 2019-03-28 | Consejo Superior Investigacion | Sensor de electrones para microscopia electronica |
| EP3532873B1 (en) * | 2016-10-27 | 2021-06-23 | Shenzhen Xpectvision Technology Co., Ltd. | Dark noise compensation in a radiation detector |
| CN106525028B (zh) * | 2016-10-28 | 2019-05-24 | 北京控制工程研究所 | 用于x射线脉冲星导航敏感器的硅漂移探测器处理电路 |
| EP3385756A1 (en) * | 2017-04-06 | 2018-10-10 | Koninklijke Philips N.V. | Pulse shaper |
| DE102018204683B3 (de) | 2018-03-27 | 2019-08-08 | Carl Zeiss Microscopy Gmbh | Elektronenstrahlmikroskop |
| KR102484833B1 (ko) * | 2018-07-31 | 2023-01-06 | 한국원자력연구원 | 방사성 핵종 분석 시스템 |
| DE102019104710B4 (de) * | 2019-02-25 | 2023-04-27 | Ketek Gmbh | Verfahren zum Betreiben eines Strahlungsdetektionssystems und Strahlungsdetektionssystem |
| EP3842838A1 (en) * | 2019-12-23 | 2021-06-30 | Koninklijke Philips N.V. | Radiological instrument with a pulse shaper circuit |
| CN111584656B (zh) * | 2020-06-15 | 2021-11-09 | 中国科学院微电子研究所 | 漂移探测器及其加工方法 |
| CN114300570B (zh) * | 2021-12-29 | 2024-05-17 | 上海集成电路研发中心有限公司 | 探测器及制造方法 |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3813545A (en) * | 1973-04-12 | 1974-05-28 | Edax Int Inc | X-ray scan area mapping system |
| US4149076A (en) * | 1976-04-05 | 1979-04-10 | Albert Richard D | Method and apparatus producing plural images of different contrast range by X-ray scanning |
| JPS5329787A (en) * | 1976-08-31 | 1978-03-20 | Kagaku Gijutsucho Hoshasen Igaku Sogo Kenkyusho | Measuring device for radiation |
| FI67961C (fi) * | 1983-08-18 | 1985-06-10 | Valmet Oy | Pulsbredd-pulshoejd-multiplikator i en statisk kwh-maetare |
| JPH03122588A (ja) * | 1989-10-05 | 1991-05-24 | Hitachi Medical Corp | 放射線検出器，データ収集装置およびこれを用いる放射線ｃｔ装置 |
| DE19960243A1 (de) | 1999-12-14 | 2001-07-05 | Infineon Technologies Ag | Bussystem |
| US20050105665A1 (en) * | 2000-03-28 | 2005-05-19 | Lee Grodzins | Detection of neutrons and sources of radioactive material |
| US6541836B2 (en) * | 2001-02-21 | 2003-04-01 | Photon Imaging, Inc. | Semiconductor radiation detector with internal gain |
| WO2006034585A1 (en) * | 2004-09-28 | 2006-04-06 | UNIVERSITé DE SHERBROOKE | Method and system for low radiation computed tomography (ct) |
| US7193216B2 (en) * | 2004-10-22 | 2007-03-20 | Oxford Instruments Analytical Oy | Method and circuit arrangement for compensating for rate dependent change of conversion factor in a drift-type radiation detector and a detector appliance |
| US7187316B1 (en) * | 2006-02-06 | 2007-03-06 | Brookhaven Science Associates, Llc | Method and apparatus for clockless analog-to-digital conversion and peak detection |
| US7411198B1 (en) * | 2006-05-31 | 2008-08-12 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Integrator circuitry for single channel radiation detector |
| US20080001095A1 (en) * | 2006-06-29 | 2008-01-03 | Oliver Richard Astley | Adaptive imaging system |
| US7339175B1 (en) * | 2006-07-28 | 2008-03-04 | Thermo Electron Scientific Instruments Llc | Feedback circuit for output control in a semiconductor X-ray detector |
| US7858946B2 (en) | 2007-01-18 | 2010-12-28 | Bruker Ax Microanalysis Gmbh | Energy dispersive X-ray I-FET SDD detector appliance and a method for pulsed reset neutralization of accumulated charges within an energy dispersive X-ray I-FET SDD detector appliance |
| US7586108B2 (en) | 2007-06-25 | 2009-09-08 | Asml Netherlands B.V. | Radiation detector, method of manufacturing a radiation detector and lithographic apparatus comprising a radiation detector |
| US8138485B2 (en) | 2007-06-25 | 2012-03-20 | Asml Netherlands B.V. | Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector |
| CN101281148B (zh) * | 2007-07-27 | 2011-01-05 | 江苏天瑞仪器股份有限公司 | 一种高分辨率的半导体核辐射探测器 |
| US7511545B1 (en) * | 2007-09-13 | 2009-03-31 | Delphi Technologies, Inc. | Analog duty cycle replicating frequency converter for PWM signals |
| JP5606723B2 (ja) | 2008-12-25 | 2014-10-15 | 日本電子株式会社 | シリコンドリフト型ｘ線検出器 |
| US8198577B2 (en) * | 2009-02-25 | 2012-06-12 | Caeleste Cvba | High dynamic range analog X-ray photon counting |
| DE102009036701A1 (de) * | 2009-08-07 | 2011-03-03 | Carl Zeiss Nts Gmbh | Teilchenstrahlsystem und Untersuchungsverfahren hierzu |
| EP2510536B1 (en) * | 2009-12-07 | 2018-11-28 | Oxford Instruments Nanotechnology Tools Limited | X-ray analyser |
| US8049182B2 (en) * | 2010-01-12 | 2011-11-01 | Oxford Instruments Nanotechnology Tools Limited | Charged particle filter |
| EP2346094A1 (en) | 2010-01-13 | 2011-07-20 | FEI Company | Method of manufacturing a radiation detector |
-
2011
- 2011-07-07 EP EP11172955A patent/EP2544025A1/en not_active Withdrawn
-
2012
- 2012-06-28 EP EP12173975.9A patent/EP2544026B1/en active Active
- 2012-07-06 JP JP2012152136A patent/JP5995562B2/ja active Active
- 2012-07-06 CN CN201210233116.0A patent/CN102866413B/zh active Active
- 2012-07-09 US US13/544,776 patent/US8941072B2/en active Active
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