JP6352529B2 - 光量検出装置、それを用いた免疫分析装置および荷電粒子線装置 - Google Patents
光量検出装置、それを用いた免疫分析装置および荷電粒子線装置 Download PDFInfo
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/66—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence
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- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
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- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
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- G—PHYSICS
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- G—PHYSICS
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Description
本発明の第1の実施の形態を図1〜図6を参照しつつ説明する。
図3は、本実施の形態のA/D変換部6の出力における暗電流パルスの出力波形を模式的に示す図である。
ベース補正処理部8におけるベース補正処理では、A/D変換部6からの出力信号に対して、ベース電圧算出部9で算出されたベース電圧が0(ゼロ)となるようにオフセットされる。すなわち、A/D変換部6からの出力信号において、結果的にフロアノイズの平均値が0(ゼロ)になるように、その出力信号全体がオフセットされる。
図6は、閾値処理部における閾値処理を説明する図である。
PC4における発光信号量算出処理では、ホトマル2に検出光1が入射された状態での発光時信号量から、暗電流算出処理により得られた暗電流分の信号を減算することで検出光1の純粋な発光信号量が出力される。
本発明の第1の実施の形態の変形例について説明する。
本発明の第2の実施の形態を図7及び図8を参照しつつ説明する。
本発明の第3の実施の形態を図9を参照しつつ説明する。
本実施の形態に係る光量検出装置は、免疫分析装置に適用することが可能である。
2 ホトマル
3 検出回路
4,4B コンピュータ(PC)
5 プリアンプ
6 A/D変換部
7 演算部(FPGA)
8 ベース補正処理部
9 ベース電圧算出部
10 ベース閾値入力部
11 閾値処理部
12 信号検出閾値入力部
13 検出信号切換部
100 光量検出装置
300 荷電粒子線装置
Claims (7)
- 光を検出する光検出部からの検出信号を増幅する増幅処理を行う増幅部と、
前記増幅部で増幅された検出信号をディジタル信号に変換して出力するA/D変換処理を行うA/D変換部と、
前記A/D変換部からの出力信号に対して、予め定めたベース閾値よりも低い信号成分の時間平均値をベース電圧として算出するベース電圧算出処理を行うベース電圧算出部と、
A/D変換部からの出力信号に対して、ベース電圧算出部で算出されたベース電圧が0となるようにオフセットさせるベース補正処理を行うベース補正処理部と、
前記光検出部への光の未入力状態におけるベース電圧算出処理部からの出力信号に対して、予め定められた信号検出閾値よりも高い信号成分を暗電流パルスとして算出する暗電流算出処理を行う暗電流算出部と、
前記ベース電圧算出処理部からの出力信号に対して、予め定められた信号検出閾値よりも高い信号成分を検出光パルスとして算出する閾値処理を行う閾値処理部と、
前記閾値処理で得られた検出光の信号成分から前記暗電流算出処理で得られた暗電流の信号成分の時間平均値を減算して発光信号量を算出する発光信号量算出処理を行う発光信号量算出部と
を備えたことを特徴とする光量検出装置。 - 請求項1記載の光量検出装置において、
前記ベース電圧算出処理と、前記暗電流算出処理とは、並行して実行されることを特徴とする光量検出装置。 - 請求項1記載の光量検出装置において、
前記A/D変換部からの出力信号を記憶して必要に応じて出力するする出力信号記憶部をさらに備え、
前記暗電流算出処理、前記閾値処理、前記発光信号量算出処理は、前期出力信号記憶部からの出力信号に基づいて行うことを特徴とする光量検出装置。 - 請求項1又は3記載の光量検出装置において、
前記光検出部からの検出信号の出力の有無を切り換える検出信号切換部をさらに備えたことを特徴とする光量検出装置。 - 請求項1記載の光量検出装置において、
前記ベース電圧算出処理は、前記光検出部への光の未入力状態、又は、前記光検出部からの検出信号が無い状態において行われることを特徴とする光量検出装置。 - 測定対象の試料と、前記試料中の特定成分と結合して複合体を形成する発光体及び磁性粒子を含む試薬との混合液が導入されるフローセルと、
前記フローセルに導入された混合液中の前記複合体を前記フローセル内の予め定めた測定領域に捕捉するための磁界を発生させる磁界発生装置と、
前記測定領域に捕捉された複合体から発生する光を検出する前記請求項1に記載の光量検出装置と
を備えたことを特徴とする免疫分析装置。 - 測定対象の試料を配置する試料ステージと、
前記試料ステージ上の試料に荷電粒子線を照射する荷電粒子線照射装置と、
前記荷電粒子線の照射により前記試料から生じる二次電子によってシンチレータで生じる光を検出する前記請求項1に記載の光量検出装置と
を備えたことを特徴とする荷電粒子線装置。
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PCT/JP2016/058339 WO2016158421A1 (ja) | 2015-04-03 | 2016-03-16 | 光量検出装置、それを用いた免疫分析装置および荷電粒子線装置 |
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EP (1) | EP3279624B1 (ja) |
JP (1) | JP6352529B2 (ja) |
CN (1) | CN107407595B (ja) |
WO (1) | WO2016158421A1 (ja) |
Families Citing this family (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2399270B1 (en) | 2009-02-22 | 2013-06-12 | Mapper Lithography IP B.V. | Charged particle lithography apparatus |
KR101687955B1 (ko) | 2009-02-22 | 2016-12-20 | 마퍼 리쏘그라피 아이피 비.브이. | 하전입자 리소그래피 장치 및 진공 챔버에 진공을 발생시키는 방법 |
WO2010094801A1 (en) | 2009-02-22 | 2010-08-26 | Mapper Lithography Ip B.V. | A method and arrangement for realizing a vacuum in a vacuum chamber |
WO2010094804A1 (en) | 2009-02-22 | 2010-08-26 | Mapper Lithography Ip B.V. | Lithography machine and substrate handling arrangement |
KR101854828B1 (ko) | 2009-05-20 | 2018-05-04 | 마퍼 리쏘그라피 아이피 비.브이. | 듀얼 패스 스캐닝 |
JP5801289B2 (ja) | 2009-05-20 | 2015-10-28 | マッパー・リソグラフィー・アイピー・ビー.ブイ. | リソグラフシステムのためのパターンデータ変換 |
US8884255B2 (en) | 2010-11-13 | 2014-11-11 | Mapper Lithography Ip B.V. | Data path for lithography apparatus |
US9305747B2 (en) | 2010-11-13 | 2016-04-05 | Mapper Lithography Ip B.V. | Data path for lithography apparatus |
KR101907433B1 (ko) | 2010-12-14 | 2018-10-12 | 마퍼 리쏘그라피 아이피 비.브이. | 리소그라피 시스템 및 이러한 리소그라피 시스템에서 기판을 프로세싱하는 방법 |
KR101791252B1 (ko) | 2011-04-22 | 2017-10-27 | 마퍼 리쏘그라피 아이피 비.브이. | 리소그래피 머신들의 클러스터를 위한 네트워크 아키텍처 및 프로토콜 |
US8936994B2 (en) | 2011-04-28 | 2015-01-20 | Mapper Lithography Ip B.V. | Method of processing a substrate in a lithography system |
TW201330705A (zh) | 2011-09-28 | 2013-07-16 | Mapper Lithography Ip Bv | 電漿產生器 |
WO2013171214A1 (en) | 2012-05-14 | 2013-11-21 | Mapper Lithography Ip B.V. | Charged particle lithography system and beam generator |
CN104471669B (zh) | 2012-05-14 | 2017-02-22 | 迈普尔平版印刷Ip有限公司 | 带电粒子多子束光刻系统和冷却配置制造方法 |
RU2689391C2 (ru) | 2013-12-30 | 2019-05-28 | АСМЛ Недерландс Б.В. | Катодное устройство, электронная пушка и установка литографии, содержащая такую электронную пушку |
CN105548848B (zh) * | 2015-12-11 | 2018-09-21 | 中派科技(深圳)有限责任公司 | 用于测量击穿电压的装置、设备及方法 |
CN105572721B (zh) * | 2015-12-11 | 2019-03-22 | 中派科技(深圳)有限责任公司 | 用于测量传感器增益的装置、设备及方法 |
JP6742259B2 (ja) * | 2017-03-02 | 2020-08-19 | 住友重機械工業株式会社 | 中性子線検出システム、及び中性子線検出システムの設定方法 |
US10973112B2 (en) * | 2017-07-18 | 2021-04-06 | Hitachi High-Tech Corporation | Charged particle beam device |
DE112018008108T5 (de) * | 2018-12-18 | 2021-07-22 | Hitachi High-Tech Corporation | Messvorrichtung und signalverarbeitungsverfahren |
US11361951B2 (en) * | 2019-10-03 | 2022-06-14 | Kla Corporation | System and method for photomultiplier tube image correction |
US11950879B2 (en) | 2020-02-21 | 2024-04-09 | Hi Llc | Estimation of source-detector separation in an optical measurement system |
US11883181B2 (en) | 2020-02-21 | 2024-01-30 | Hi Llc | Multimodal wearable measurement systems and methods |
US11630310B2 (en) | 2020-02-21 | 2023-04-18 | Hi Llc | Wearable devices and wearable assemblies with adjustable positioning for use in an optical measurement system |
WO2021167890A1 (en) | 2020-02-21 | 2021-08-26 | Hi Llc | Wearable module assemblies for an optical measurement system |
WO2021167893A1 (en) | 2020-02-21 | 2021-08-26 | Hi Llc | Integrated detector assemblies for a wearable module of an optical measurement system |
US11864867B2 (en) | 2020-03-20 | 2024-01-09 | Hi Llc | Control circuit for a light source in an optical measurement system by applying voltage with a first polarity to start an emission of a light pulse and applying voltage with a second polarity to stop the emission of the light pulse |
US11903676B2 (en) * | 2020-03-20 | 2024-02-20 | Hi Llc | Photodetector calibration of an optical measurement system |
US11857348B2 (en) | 2020-03-20 | 2024-01-02 | Hi Llc | Techniques for determining a timing uncertainty of a component of an optical measurement system |
US11187575B2 (en) | 2020-03-20 | 2021-11-30 | Hi Llc | High density optical measurement systems with minimal number of light sources |
US11877825B2 (en) | 2020-03-20 | 2024-01-23 | Hi Llc | Device enumeration in an optical measurement system |
WO2021188486A1 (en) | 2020-03-20 | 2021-09-23 | Hi Llc | Phase lock loop circuit based adjustment of a measurement time window in an optical measurement system |
WO2021188485A1 (en) | 2020-03-20 | 2021-09-23 | Hi Llc | Maintaining consistent photodetector sensitivity in an optical measurement system |
WO2021188487A1 (en) | 2020-03-20 | 2021-09-23 | Hi Llc | Temporal resolution control for temporal point spread function generation in an optical measurement system |
JP2023096808A (ja) * | 2021-12-27 | 2023-07-07 | パナソニックIpマネジメント株式会社 | 光電センサ、及び、受光ユニット |
CN117055425A (zh) * | 2023-09-11 | 2023-11-14 | 深圳市晶扬电子有限公司 | 一种集成的光电开关的自动增益控制电路 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5663564A (en) | 1996-03-20 | 1997-09-02 | Santa Barbara Research Center | Photovoltaic detector with integrated dark current offset correction |
JP2001141560A (ja) | 1999-11-15 | 2001-05-25 | Naka Instruments Kk | フォトンカウンテイング装置 |
US7233393B2 (en) | 2004-08-05 | 2007-06-19 | Applera Corporation | Signal noise reduction for imaging in biological analysis |
JP2008256380A (ja) * | 2007-03-30 | 2008-10-23 | Hamamatsu Photonics Kk | 光計測装置及び光計測装置の調整方法 |
US8766161B2 (en) | 2009-12-02 | 2014-07-01 | Nucript LLC | System for controling and calibrating single photon detection devices |
JP5797884B2 (ja) * | 2010-08-04 | 2015-10-21 | 株式会社日立ハイテクノロジーズ | 光量検出方法及びその装置 |
CN102322875B (zh) * | 2011-08-01 | 2013-10-16 | 西安电子科技大学 | 可见光传感器 |
EP2790400A1 (en) * | 2011-12-09 | 2014-10-15 | Sony Corporation | Image pickup device, electronic apparatus, optically stimulated luminescence detection scanner, and image pickup method |
JP5175989B1 (ja) | 2012-03-09 | 2013-04-03 | 福島双羽電機株式会社 | 平板形状の半導体装置 |
WO2013187511A1 (ja) | 2012-06-15 | 2013-12-19 | 株式会社日立ハイテクノロジーズ | 光信号検出回路、光量検出装置、および荷電粒子線装置 |
GB201301754D0 (en) | 2013-01-31 | 2013-03-20 | Malvern Instr Ltd | Dynamic single photon counting system |
US10314978B2 (en) * | 2013-02-04 | 2019-06-11 | Sanofi-Aventis Deutschland Gmbh | Assembly for a drug delivery device |
-
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