JP2013012353A - プラズマ処理装置 - Google Patents
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- 230000002159 abnormal effect Effects 0.000 abstract description 16
- 238000010168 coupling process Methods 0.000 abstract description 11
- 230000001939 inductive effect Effects 0.000 abstract description 10
- 230000005672 electromagnetic field Effects 0.000 abstract description 9
- 239000007789 gas Substances 0.000 description 155
- 230000005684 electric field Effects 0.000 description 36
- 239000010453 quartz Substances 0.000 description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 18
- 230000015556 catabolic process Effects 0.000 description 7
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- 239000004065 semiconductor Substances 0.000 description 6
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- 239000000758 substrate Substances 0.000 description 5
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- 238000005507 spraying Methods 0.000 description 4
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- 239000007795 chemical reaction product Substances 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000009616 inductively coupled plasma Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
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- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
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- 238000005530 etching Methods 0.000 description 1
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- 230000002093 peripheral effect Effects 0.000 description 1
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- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
- C23C16/507—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using external electrodes, e.g. in tunnel type reactors
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45587—Mechanical means for changing the gas flow
- C23C16/45591—Fixed means, e.g. wings, baffles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
- H01J37/32449—Gas control, e.g. control of the gas flow
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Plasma Technology (AREA)
- Drying Of Semiconductors (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
【解決手段】
処理室1と、第1誘電体の真空窓4と、誘導コイル9と、高周波電源13と、ガス供給手段と、被処理体3を載置する試料台20とを備えたプラズマ処理装置において、ガス供給手段は、真空窓4の下方に近接して設置され、中央部にガス放出口を備えた第2誘電体のガス放出板6と、真空窓4とガス放出板6との隙間に設けられ、第1及び第2誘電体よりも比誘電率の高い第3の誘電体の島状の部材とを有する。
【選択図】 図1
Description
2…プラズマ、
3…試料(被処理体)、
4…誘電体真空窓、
5…ガス供給管、
6…ガス放出板、
7…誘電体、
8…Oリング、
9…高周波アンテナ(誘導コイル)、
10…ファラデーシールド、
11…整合器、
12…整合器、
13…高周波電源、
14…整合器、
15…高周波電源、
16…処理ガス、
17…ガス流路、
18…誘導電流、
19…排気口
20…試料台(試料支持電極)、
25…ガス放出孔、
32…導体、
40…電界ベクトル、
41…板部材、
43…隙間、
70…誘電体。
Claims (12)
- 被処理体にプラズマ処理を行うための処理室と、該処理室の上部を真空封止する第1の誘電体の真空窓と、該真空窓の上方に配置された誘導コイルと、該誘導コイルに高周波電力を供給する高周波電源と、前記処理室内にガスを供給するガス供給手段と、前記処理室内に設けられた前記被処理体を載置する試料台とを備えたプラズマ処理装置において、
前記ガス供給手段は、前記真空窓の下方に近接して設置され、中央部にガス放出口を備えた第2の誘電体のガス放出板と、前記真空窓と前記ガス放出板との隙間に設けられ、前記第1及び第2の誘電体よりも比誘電率の高い第3の誘電体の島状の部材とを有し、
前記隙間と前記部材から形成されたガス流路に輸送された前記ガスは、前記ガス放出板の中心部に配置された前記ガス放出口を介して前記処理室内に供給されることを特徴とするプラズマ処理装置。 - 請求項1記載のプラズマ処理装置において、
前記部材は、絶縁体を溶射、成膜処理、または絶縁シートを貼り付けることによって形成されたものであることを特徴とするプラズマ処理装置。 - 請求項1記載のプラズマ処理装置において、
前記ガス放出口は、複数のガス放出孔を有することを特徴とするプラズマ処理装置。 - 請求項1記載のプラズマ処理装置において、
島状の前記部材は、平面形状が矩形又は扇状であることを特徴とするプラズマ処理装置。 - 請求項1記載のプラズマ処理装置において、
前記部材の間隔をW、前記ガス流路の高さをHとした場合、W/Hの比が2.5以下であることを特徴とするプラズマ処理装置。 - 請求項1記載のプラズマ処理装置において、
前記部材の内部は、導体で構成されていることを特徴とするプラズマ処理装置。 - 請求項1記載のプラズマ処理装置において、
島状の前記部材は、前記誘導コイル近傍に設けられていることを特徴とするプラズマ処理装置。 - 被処理体にプラズマ処理を行うための処理室と、該処理室の上部を真空封止する第1の誘電体の真空窓と、該真空窓の上方に配置された誘導コイルと、該誘導コイルに高周波電力を供給する高周波電源と、前記処理室内にガスを供給するガス供給手段と、前記処理室内に設けられた前記被処理体を載置する試料台とを備えたプラズマ処理装置において、
前記ガス供給手段は、前記真空窓の下方に近接して設置され、中央部にガス放出口を備えた第2の誘電体のガス放出板と、前記真空窓と前記ガス放出板との隙間に設けられた導体の島状の部材とを有し、
前記隙間と前記部材から形成されたガス流路に輸送された前記ガスは、前記ガス放出板の中心部に配置された前記ガス放出口を介して前記処理室内に供給されることを特徴とするプラズマ処理装置。 - 請求項8記載のプラズマ処理装置において、
前記導体は、前記ガスに対して耐腐食性を有することを特徴とするプラズマ処理装置。 - 請求項8記載のプラズマ処理装置において、
前記ガス放出口は、複数のガス放出孔を有することを特徴とするプラズマ処理装置。 - 請求項8記載のプラズマ処理装置において、
島状の前記部材は、平面形状が矩形又は扇状であることを特徴とするプラズマ処理装置。 - 請求項8記載のプラズマ処理装置において、
島状の前記部材は、前記誘導コイルの直下に配置されていることを特徴とするプラズマ処理装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
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JP2011143406A JP2013012353A (ja) | 2011-06-28 | 2011-06-28 | プラズマ処理装置 |
KR1020110075837A KR101274515B1 (ko) | 2011-06-28 | 2011-07-29 | 플라즈마 처리장치 |
US13/209,523 US20130000847A1 (en) | 2011-06-28 | 2011-08-15 | Plasma processing apparatus |
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JP2011143406A JP2013012353A (ja) | 2011-06-28 | 2011-06-28 | プラズマ処理装置 |
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JP2013012353A true JP2013012353A (ja) | 2013-01-17 |
JP2013012353A5 JP2013012353A5 (ja) | 2014-06-19 |
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JP2011143406A Pending JP2013012353A (ja) | 2011-06-28 | 2011-06-28 | プラズマ処理装置 |
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US (1) | US20130000847A1 (ja) |
JP (1) | JP2013012353A (ja) |
KR (1) | KR101274515B1 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017045916A (ja) * | 2015-08-28 | 2017-03-02 | パナソニックIpマネジメント株式会社 | プラズマ処理装置およびプラズマ処理方法 |
CN108573891A (zh) * | 2017-03-07 | 2018-09-25 | 北京北方华创微电子装备有限公司 | 进气机构及反应腔室 |
JP2020004534A (ja) * | 2018-06-26 | 2020-01-09 | 東京エレクトロン株式会社 | プラズマ処理装置 |
JP2021100044A (ja) * | 2019-12-23 | 2021-07-01 | 東京エレクトロン株式会社 | プラズマ処理装置 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20160049279A1 (en) * | 2014-08-14 | 2016-02-18 | Allied Techfinders Co., Ltd. | Plasma device |
US9673287B2 (en) | 2014-12-15 | 2017-06-06 | Infineon Technologies Americas Corp. | Reliable and robust electrical contact |
CN105931940B (zh) * | 2016-06-01 | 2018-09-21 | 京东方科技集团股份有限公司 | 一种电感耦合等离子体装置 |
Citations (5)
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JPS55154585A (en) * | 1979-05-18 | 1980-12-02 | Tegal Corp | Plasma reactor |
US6123802A (en) * | 1997-09-23 | 2000-09-26 | Micron Technology, Inc. | Method and apparatus for preventing plasma formation |
JP2002305153A (ja) * | 2001-04-06 | 2002-10-18 | Tokyo Electron Ltd | 処理装置および処理方法 |
US20030136516A1 (en) * | 2002-01-22 | 2003-07-24 | Hong-Seub Kim | Gas diffussion plate for use in ICP etcher |
JP2007221116A (ja) * | 2006-01-20 | 2007-08-30 | Tokyo Electron Ltd | プラズマ処理装置 |
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JP3400909B2 (ja) * | 1996-02-19 | 2003-04-28 | 松下電器産業株式会社 | プラズマ処理方法及び装置 |
JP2943691B2 (ja) * | 1996-04-25 | 1999-08-30 | 日本電気株式会社 | プラズマ処理装置 |
US6123775A (en) * | 1999-06-30 | 2000-09-26 | Lam Research Corporation | Reaction chamber component having improved temperature uniformity |
JP2002305184A (ja) * | 2001-04-09 | 2002-10-18 | Hitachi Ltd | 半導体製造装置 |
KR20060064067A (ko) * | 2003-09-03 | 2006-06-12 | 동경 엘렉트론 주식회사 | 가스 처리 장치 및 처리 가스 토출 기구의 방열 방법 |
KR101213391B1 (ko) * | 2005-08-26 | 2012-12-18 | 주성엔지니어링(주) | 기판처리장치 |
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2011
- 2011-06-28 JP JP2011143406A patent/JP2013012353A/ja active Pending
- 2011-07-29 KR KR1020110075837A patent/KR101274515B1/ko not_active IP Right Cessation
- 2011-08-15 US US13/209,523 patent/US20130000847A1/en not_active Abandoned
Patent Citations (5)
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JPS55154585A (en) * | 1979-05-18 | 1980-12-02 | Tegal Corp | Plasma reactor |
US6123802A (en) * | 1997-09-23 | 2000-09-26 | Micron Technology, Inc. | Method and apparatus for preventing plasma formation |
JP2002305153A (ja) * | 2001-04-06 | 2002-10-18 | Tokyo Electron Ltd | 処理装置および処理方法 |
US20030136516A1 (en) * | 2002-01-22 | 2003-07-24 | Hong-Seub Kim | Gas diffussion plate for use in ICP etcher |
JP2007221116A (ja) * | 2006-01-20 | 2007-08-30 | Tokyo Electron Ltd | プラズマ処理装置 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017045916A (ja) * | 2015-08-28 | 2017-03-02 | パナソニックIpマネジメント株式会社 | プラズマ処理装置およびプラズマ処理方法 |
CN108573891A (zh) * | 2017-03-07 | 2018-09-25 | 北京北方华创微电子装备有限公司 | 进气机构及反应腔室 |
CN108573891B (zh) * | 2017-03-07 | 2022-01-11 | 北京北方华创微电子装备有限公司 | 等离子体加工设备 |
JP2020004534A (ja) * | 2018-06-26 | 2020-01-09 | 東京エレクトロン株式会社 | プラズマ処理装置 |
JP7182916B2 (ja) | 2018-06-26 | 2022-12-05 | 東京エレクトロン株式会社 | プラズマ処理装置 |
JP2021100044A (ja) * | 2019-12-23 | 2021-07-01 | 東京エレクトロン株式会社 | プラズマ処理装置 |
JP7313269B2 (ja) | 2019-12-23 | 2023-07-24 | 東京エレクトロン株式会社 | プラズマ処理装置 |
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KR101274515B1 (ko) | 2013-06-13 |
US20130000847A1 (en) | 2013-01-03 |
KR20130007385A (ko) | 2013-01-18 |
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