JP2013007740A - 波面測定装置及び波面測定方法、物体測定装置 - Google Patents

波面測定装置及び波面測定方法、物体測定装置 Download PDF

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Publication number
JP2013007740A
JP2013007740A JP2012084441A JP2012084441A JP2013007740A JP 2013007740 A JP2013007740 A JP 2013007740A JP 2012084441 A JP2012084441 A JP 2012084441A JP 2012084441 A JP2012084441 A JP 2012084441A JP 2013007740 A JP2013007740 A JP 2013007740A
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Japan
Prior art keywords
wavefront
electromagnetic wave
wave pulse
pulse
propagation path
Prior art date
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Abandoned
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JP2012084441A
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English (en)
Japanese (ja)
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JP2013007740A5 (https=
Inventor
Kosuke Kajiki
康介 加治木
Toshihiko Onouchi
敏彦 尾内
Takeaki Itsuji
健明 井辻
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Canon Inc
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Canon Inc
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2012084441A priority Critical patent/JP2013007740A/ja
Publication of JP2013007740A publication Critical patent/JP2013007740A/ja
Publication of JP2013007740A5 publication Critical patent/JP2013007740A5/ja
Abandoned legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
    • G01N21/3586—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation by Terahertz time domain spectroscopy [THz-TDS]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3554—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for determining moisture content

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP2012084441A 2011-05-23 2012-04-03 波面測定装置及び波面測定方法、物体測定装置 Abandoned JP2013007740A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012084441A JP2013007740A (ja) 2011-05-23 2012-04-03 波面測定装置及び波面測定方法、物体測定装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011114945 2011-05-23
JP2011114945 2011-05-23
JP2012084441A JP2013007740A (ja) 2011-05-23 2012-04-03 波面測定装置及び波面測定方法、物体測定装置

Publications (2)

Publication Number Publication Date
JP2013007740A true JP2013007740A (ja) 2013-01-10
JP2013007740A5 JP2013007740A5 (https=) 2015-05-21

Family

ID=47217019

Family Applications (1)

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JP2012084441A Abandoned JP2013007740A (ja) 2011-05-23 2012-04-03 波面測定装置及び波面測定方法、物体測定装置

Country Status (4)

Country Link
US (1) US20140183363A1 (https=)
EP (1) EP2715319A4 (https=)
JP (1) JP2013007740A (https=)
WO (1) WO2012160936A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104914478A (zh) * 2015-07-01 2015-09-16 博康智能网络科技股份有限公司 太赫兹人体安检系统及安检方法
CN106248616B (zh) * 2016-09-27 2017-10-24 深圳市太赫兹科技创新研究院有限公司 太赫兹全偏振态检测光谱仪
CN109520712B (zh) * 2018-12-03 2021-08-17 江苏慧光电子科技有限公司 光学检测方法、系统及光学器件制造系统
JP7362409B2 (ja) 2019-10-17 2023-10-17 キヤノン株式会社 照明装置およびカメラシステム
CN112097923B (zh) * 2020-07-30 2022-05-24 福建华科光电有限公司 一种简易的光学件波前测量方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0695044B2 (ja) 1987-01-16 1994-11-24 浜松ホトニクス株式会社 光波面を観測する装置
US6724125B2 (en) * 1999-03-30 2004-04-20 Massachusetts Institute Of Technology Methods and apparatus for diffractive optical processing using an actuatable structure
AU2003230610A1 (en) * 2002-03-08 2003-09-22 Trustees Of Boston University Method for linearizing deflection of a mems device using binary electrodes and voltage modulation
JP2004198192A (ja) 2002-12-17 2004-07-15 Olympus Corp 光学系の偏心量測定機及び偏心量測定方法
JP4654003B2 (ja) * 2004-11-09 2011-03-16 株式会社栃木ニコン 測定装置
JP2006214856A (ja) 2005-02-03 2006-08-17 Canon Inc 測定装置及び方法
JP4895109B2 (ja) * 2006-10-10 2012-03-14 アイシン精機株式会社 形状検査方法及び形状検査装置
EP2031374B1 (en) * 2007-08-31 2012-10-10 Canon Kabushiki Kaisha Apparatus and method for obtaining information related to terahertz waves

Also Published As

Publication number Publication date
US20140183363A1 (en) 2014-07-03
EP2715319A4 (en) 2015-01-07
WO2012160936A1 (en) 2012-11-29
EP2715319A1 (en) 2014-04-09

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