JP2013007740A5 - - Google Patents
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- Publication number
- JP2013007740A5 JP2013007740A5 JP2012084441A JP2012084441A JP2013007740A5 JP 2013007740 A5 JP2013007740 A5 JP 2013007740A5 JP 2012084441 A JP2012084441 A JP 2012084441A JP 2012084441 A JP2012084441 A JP 2012084441A JP 2013007740 A5 JP2013007740 A5 JP 2013007740A5
- Authority
- JP
- Japan
- Prior art keywords
- wavefront
- electromagnetic wave
- wave pulse
- propagation path
- pulse
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012084441A JP2013007740A (ja) | 2011-05-23 | 2012-04-03 | 波面測定装置及び波面測定方法、物体測定装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011114945 | 2011-05-23 | ||
| JP2011114945 | 2011-05-23 | ||
| JP2012084441A JP2013007740A (ja) | 2011-05-23 | 2012-04-03 | 波面測定装置及び波面測定方法、物体測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2013007740A JP2013007740A (ja) | 2013-01-10 |
| JP2013007740A5 true JP2013007740A5 (https=) | 2015-05-21 |
Family
ID=47217019
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012084441A Abandoned JP2013007740A (ja) | 2011-05-23 | 2012-04-03 | 波面測定装置及び波面測定方法、物体測定装置 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20140183363A1 (https=) |
| EP (1) | EP2715319A4 (https=) |
| JP (1) | JP2013007740A (https=) |
| WO (1) | WO2012160936A1 (https=) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104914478A (zh) * | 2015-07-01 | 2015-09-16 | 博康智能网络科技股份有限公司 | 太赫兹人体安检系统及安检方法 |
| CN106248616B (zh) * | 2016-09-27 | 2017-10-24 | 深圳市太赫兹科技创新研究院有限公司 | 太赫兹全偏振态检测光谱仪 |
| CN109520712B (zh) * | 2018-12-03 | 2021-08-17 | 江苏慧光电子科技有限公司 | 光学检测方法、系统及光学器件制造系统 |
| JP7362409B2 (ja) | 2019-10-17 | 2023-10-17 | キヤノン株式会社 | 照明装置およびカメラシステム |
| CN112097923B (zh) * | 2020-07-30 | 2022-05-24 | 福建华科光电有限公司 | 一种简易的光学件波前测量方法 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0695044B2 (ja) | 1987-01-16 | 1994-11-24 | 浜松ホトニクス株式会社 | 光波面を観測する装置 |
| US6724125B2 (en) * | 1999-03-30 | 2004-04-20 | Massachusetts Institute Of Technology | Methods and apparatus for diffractive optical processing using an actuatable structure |
| AU2003230610A1 (en) * | 2002-03-08 | 2003-09-22 | Trustees Of Boston University | Method for linearizing deflection of a mems device using binary electrodes and voltage modulation |
| JP2004198192A (ja) | 2002-12-17 | 2004-07-15 | Olympus Corp | 光学系の偏心量測定機及び偏心量測定方法 |
| JP4654003B2 (ja) * | 2004-11-09 | 2011-03-16 | 株式会社栃木ニコン | 測定装置 |
| JP2006214856A (ja) | 2005-02-03 | 2006-08-17 | Canon Inc | 測定装置及び方法 |
| JP4895109B2 (ja) * | 2006-10-10 | 2012-03-14 | アイシン精機株式会社 | 形状検査方法及び形状検査装置 |
| EP2031374B1 (en) * | 2007-08-31 | 2012-10-10 | Canon Kabushiki Kaisha | Apparatus and method for obtaining information related to terahertz waves |
-
2012
- 2012-04-03 JP JP2012084441A patent/JP2013007740A/ja not_active Abandoned
- 2012-04-19 EP EP12790345.8A patent/EP2715319A4/en not_active Withdrawn
- 2012-04-19 US US14/119,169 patent/US20140183363A1/en not_active Abandoned
- 2012-04-19 WO PCT/JP2012/061163 patent/WO2012160936A1/en not_active Ceased
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