JP2013005446A5 - - Google Patents

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Publication number
JP2013005446A5
JP2013005446A5 JP2012135371A JP2012135371A JP2013005446A5 JP 2013005446 A5 JP2013005446 A5 JP 2013005446A5 JP 2012135371 A JP2012135371 A JP 2012135371A JP 2012135371 A JP2012135371 A JP 2012135371A JP 2013005446 A5 JP2013005446 A5 JP 2013005446A5
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JP
Japan
Prior art keywords
piezoelectric layer
resonator structure
baw resonator
equal
width
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2012135371A
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English (en)
Japanese (ja)
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JP2013005446A (ja
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Publication date
Priority claimed from US13/161,946 external-priority patent/US8330325B1/en
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Publication of JP2013005446A publication Critical patent/JP2013005446A/ja
Publication of JP2013005446A5 publication Critical patent/JP2013005446A5/ja
Pending legal-status Critical Current

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JP2012135371A 2011-06-16 2012-06-15 非圧電層を備えたバルク音響共振器 Pending JP2013005446A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/161,946 2011-06-16
US13/161,946 US8330325B1 (en) 2011-06-16 2011-06-16 Bulk acoustic resonator comprising non-piezoelectric layer

Publications (2)

Publication Number Publication Date
JP2013005446A JP2013005446A (ja) 2013-01-07
JP2013005446A5 true JP2013005446A5 (https=) 2015-07-16

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012135371A Pending JP2013005446A (ja) 2011-06-16 2012-06-15 非圧電層を備えたバルク音響共振器

Country Status (3)

Country Link
US (1) US8330325B1 (https=)
JP (1) JP2013005446A (https=)
DE (1) DE102012210160B4 (https=)

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