JP2012528936A - 成膜設備および成膜方法 - Google Patents
成膜設備および成膜方法 Download PDFInfo
- Publication number
- JP2012528936A JP2012528936A JP2012513532A JP2012513532A JP2012528936A JP 2012528936 A JP2012528936 A JP 2012528936A JP 2012513532 A JP2012513532 A JP 2012513532A JP 2012513532 A JP2012513532 A JP 2012513532A JP 2012528936 A JP2012528936 A JP 2012528936A
- Authority
- JP
- Japan
- Prior art keywords
- activation element
- contact
- activation
- film
- wire
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 15
- 230000004913 activation Effects 0.000 claims abstract description 107
- 239000002243 precursor Substances 0.000 claims abstract description 32
- 239000000758 substrate Substances 0.000 claims abstract description 14
- 239000011248 coating agent Substances 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 6
- 230000008021 deposition Effects 0.000 claims description 4
- 230000003213 activating effect Effects 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 18
- 239000000463 material Substances 0.000 description 10
- 238000010438 heat treatment Methods 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 5
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 5
- 229910052721 tungsten Inorganic materials 0.000 description 5
- 239000010937 tungsten Substances 0.000 description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 229910021332 silicide Inorganic materials 0.000 description 4
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000005137 deposition process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052732 germanium Inorganic materials 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
- 239000011733 molybdenum Substances 0.000 description 3
- 229910052758 niobium Inorganic materials 0.000 description 3
- 239000010955 niobium Substances 0.000 description 3
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 3
- 229910000077 silane Inorganic materials 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 229910052715 tantalum Inorganic materials 0.000 description 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 3
- 230000007704 transition Effects 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 230000001627 detrimental effect Effects 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- PQDJYEQOELDLCP-UHFFFAOYSA-N trimethylsilane Chemical compound C[SiH](C)C PQDJYEQOELDLCP-UHFFFAOYSA-N 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 229910052729 chemical element Inorganic materials 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 229910000078 germane Inorganic materials 0.000 description 1
- SCCCLDWUZODEKG-UHFFFAOYSA-N germanide Chemical compound [GeH3-] SCCCLDWUZODEKG-UHFFFAOYSA-N 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- -1 silane compound Chemical class 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 description 1
- 229910021342 tungsten silicide Inorganic materials 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/24—Deposition of silicon only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/271—Diamond only using hot filaments
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/28—Deposition of only one other non-metal element
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
Claims (13)
- 真空化が可能で、基板(30)を受けるためのものとされた少なくとも1つの受容器(10)と、少なくとも1つの気体前駆体を前記受容器(10)の中に導入できる手段となる少なくとも1つの気体供給装置(20、21、22)と、予め決定可能な長さ方向の範囲を有し、少なくとも1つの専用の機械的固定装置(44)によって前記受容器(10)に関してほとんど移動不能に固定される少なくとも1つの加熱可能な活性化要素(40)と、を備える成膜設備(1)であって、
少なくとも2つの接触要素(43)によって電流を前記活性化要素に供給することができ、前記接触要素(43)の少なくとも1つが、変化する接触点で前記活性化要素(40)と接触するように設計されていることを特徴とする成膜設備(1)。 - 前記接触要素(43)が複数の接触ピン(45)を含み、これらが前記活性化要素(40)の前記長さ方向の範囲に沿って配置され、前記活性化要素に向かって移動可能であることを特徴とする、請求項1に記載の成膜設備(1)。
- 前記活性化要素(40)が少なくとも1本のワイヤ(41)を含むことを特徴とする、請求項1または請求項2に記載の成膜設備(1)。
- 前記接触要素(43)は少なくとも1つのローラ(46)を含み、これは前記活性化要素(40)と接触するために設置されていることを特徴とする、請求項1〜請求項3のいずれか一項に記載の成膜設備(1)。
- 前記ワイヤ(41)は何度も活性領域(50)を通過するように導かれることを特徴とする、請求項3または請求項4のいずれかに記載の成膜設備(1)。
- 予め決定可能な電位差をそれぞれに付与できる複数の接触要素(43)が前記活性要素(40)の前記長さ方向の範囲に沿って配置されることを特徴とする、請求項1〜請求項5のいずれか一項に記載の成膜設備(1)。
- 前記機械的固定装置(44)は電気的に絶縁されることを特徴とする、請求項1〜請求項6のいずれか一項に記載の成膜設備(1)。
- 基板(30)の被膜(105)を生成する方法であって、前記基板は真空化可能な受容器(10)の中に導入され、少なくとも1つの気体前駆体が少なくとも1つの気体供給装置(20、21、22)によって前記受容器(10)の中に導入され、少なくとも1つの電気的に加熱された活性化要素(40)によって活性化され、少なくとも2つの接触要素(43)によって電流が前記活性化要素(40)に供給され、
前記活性化要素(40)は前記受容器の中で略固定されて配置され、前記接触要素(43)の少なくとも1つと前記活性化要素(40)との間で相対的な移動が起こされることを特徴とする方法。 - 前記移動は周期的に行われることを特徴とする、請求項8に記載の方法。
- 前記接触要素(43)は複数の接触ピン(45)を含み、これらは前記活性化要素(40)の長さ方向の範囲に沿って配置され、前記活性化要素(40)に向かって交互に移動される、請求項8または請求項9に記載の方法。
- 前記活性化要素(40)は、少なくとも1本のワイヤ(41)を含む、請求項8〜請求項10のいずれか一項に記載の方法。
- 前記ワイヤ(41)が何度も活性領域(50)を通過する、請求項11に記載の方法。
- 前記活性化要素(40)の前記長さ方向の範囲に沿った複数の接触要素(43)が前記活性化要素(40)と接触し、各接触要素(43)に予め決定可能な電位差が付与される、請求項8〜請求項12のいずれか一項に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102009023471.3 | 2009-06-02 | ||
DE102009023471A DE102009023471B4 (de) | 2009-06-02 | 2009-06-02 | Beschichtungsanlage und -verfahren |
PCT/EP2010/056625 WO2010139543A1 (de) | 2009-06-02 | 2010-05-13 | Beschichtungsanlage und -verfahren |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012528936A true JP2012528936A (ja) | 2012-11-15 |
JP5540084B2 JP5540084B2 (ja) | 2014-07-02 |
Family
ID=42543130
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012513532A Expired - Fee Related JP5540084B2 (ja) | 2009-06-02 | 2010-05-13 | 成膜設備および成膜方法 |
JP2012513534A Pending JP2012528937A (ja) | 2009-06-02 | 2010-05-17 | コーティング装置およびコーティング方法 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012513534A Pending JP2012528937A (ja) | 2009-06-02 | 2010-05-17 | コーティング装置およびコーティング方法 |
Country Status (7)
Country | Link |
---|---|
US (2) | US8986452B2 (ja) |
EP (2) | EP2438206B1 (ja) |
JP (2) | JP5540084B2 (ja) |
KR (2) | KR20120027300A (ja) |
CN (2) | CN102459694B (ja) |
DE (1) | DE102009023471B4 (ja) |
WO (2) | WO2010139543A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102008044025A1 (de) * | 2008-11-24 | 2010-08-05 | Cemecon Ag | Vorrichtung und Verfahren zum Beschichten eines Substrats mittels CVD |
DE102009023471B4 (de) | 2009-06-02 | 2012-08-30 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Beschichtungsanlage und -verfahren |
US20140050865A1 (en) * | 2011-03-22 | 2014-02-20 | Applied Materials, Inc. | Apparatus and method for coating using a hot wire |
JP6322131B2 (ja) * | 2014-12-24 | 2018-05-09 | 東京エレクトロン株式会社 | シリコン膜の成膜方法および成膜装置 |
CN113521539A (zh) * | 2020-04-16 | 2021-10-22 | 汪嵘 | 一种便携式等离子体伤口治疗仪及其使用方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0421777A (ja) * | 1990-05-14 | 1992-01-24 | Seiko Instr Inc | ダイヤモンドの合成装置 |
JPH07254566A (ja) * | 1994-03-16 | 1995-10-03 | Fuji Electric Co Ltd | 薄膜生成装置 |
JP2002093723A (ja) * | 2000-09-14 | 2002-03-29 | Anelva Corp | 発熱体cvd装置 |
JP2003264153A (ja) * | 2002-03-12 | 2003-09-19 | Sony Corp | 半導体薄膜の形成方法及びその装置、並びに触媒ノズル |
JP3780364B2 (ja) * | 2000-09-14 | 2006-05-31 | 国立大学法人北陸先端科学技術大学院大学 | 発熱体cvd装置 |
WO2007148457A1 (ja) * | 2006-06-22 | 2007-12-27 | Japan Advanced Institute Of Science And Technology | 触媒化学気相堆積装置 |
JP2008300793A (ja) * | 2007-06-04 | 2008-12-11 | Ulvac Japan Ltd | 触媒化学気相成長装置 |
Family Cites Families (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4422918A (en) * | 1980-01-25 | 1983-12-27 | Inoue-Japax Research Incorporated | Current-conducting assembly for a traveling wire-electrode |
JPS6091583A (ja) * | 1983-10-24 | 1985-05-22 | 松下電器産業株式会社 | 発熱体 |
CH664719A5 (fr) * | 1985-11-22 | 1988-03-31 | Charmilles Technologies | Organe de contact pour fil-electrode pour electroerosion. |
ZA877921B (en) * | 1986-12-22 | 1988-04-21 | General Electric Company | Condensate diamond |
JP2664672B2 (ja) | 1987-01-28 | 1997-10-15 | 住友ベークライト株式会社 | ポリアミド樹脂組成物 |
US5424096A (en) * | 1994-02-14 | 1995-06-13 | General Electric Company | HF-CVD method for forming diamond |
US5833753A (en) * | 1995-12-20 | 1998-11-10 | Sp 3, Inc. | Reactor having an array of heating filaments and a filament force regulator |
US6045877A (en) * | 1997-07-28 | 2000-04-04 | Massachusetts Institute Of Technology | Pyrolytic chemical vapor deposition of silicone films |
DE19809675C1 (de) * | 1998-03-06 | 1999-11-25 | Fraunhofer Ges Forschung | Vorrichtung und Verfahren zum Diamantbeschichten von rohrförmigen Hohlkörpern begrenzter Länge sowie danach hergestellte Hohlkörper und dessen Verwendung |
US6427622B2 (en) * | 1998-08-28 | 2002-08-06 | Mv Systems, Inc. | Hot wire chemical vapor deposition method and apparatus using graphite hot rods |
KR100382943B1 (ko) * | 2001-02-26 | 2003-05-09 | 프리시젼다이아몬드 주식회사 | 고온 열 필라멘트를 이용한 기상화학다이아몬드증착장치 |
GB2385864A (en) * | 2002-02-28 | 2003-09-03 | Qinetiq Ltd | Production of nanocarbons |
US6740586B1 (en) * | 2002-11-06 | 2004-05-25 | Advanced Technology Materials, Inc. | Vapor delivery system for solid precursors and method of using same |
US20040182600A1 (en) * | 2003-03-20 | 2004-09-23 | Fujitsu Limited | Method for growing carbon nanotubes, and electronic device having structure of ohmic connection to carbon element cylindrical structure body and production method thereof |
KR100688838B1 (ko) | 2005-05-13 | 2007-03-02 | 삼성에스디아이 주식회사 | 촉매 화학기상증착장치 및 촉매 화학기상증착방법 |
CN100412231C (zh) * | 2006-03-27 | 2008-08-20 | 南京航空航天大学 | 一种金刚石膜生长设备的热丝及电极结构 |
US7727590B2 (en) * | 2006-05-18 | 2010-06-01 | California Institute Of Technology | Robust filament assembly for a hot-wire chemical vapor deposition system |
TW200809924A (en) * | 2006-08-09 | 2008-02-16 | Kinik Co | Chemical vapor thin film deposition device |
TW200811310A (en) | 2006-08-23 | 2008-03-01 | Kinik Co | Apparatus for chemical gas phase thin film sedimentation |
JP4818082B2 (ja) * | 2006-11-30 | 2011-11-16 | 三洋電機株式会社 | cat−CVD装置及びフィラメント交換方法 |
US20090023274A1 (en) * | 2007-07-07 | 2009-01-22 | Xinmin Cao | Hybrid Chemical Vapor Deposition Process Combining Hot-Wire CVD and Plasma-Enhanced CVD |
EP2098608A1 (en) | 2008-03-05 | 2009-09-09 | Applied Materials, Inc. | Coating apparatus with rotation module |
GB2462846B (en) * | 2008-08-22 | 2013-03-13 | Tisics Ltd | Coated filaments and their manufacture |
JP2009038398A (ja) * | 2008-11-04 | 2009-02-19 | Canon Anelva Corp | シリコン膜及びシリコン窒化膜の製造法 |
DE102009015545B4 (de) * | 2009-03-02 | 2013-10-17 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Beschichtungsanlage mit Aktivierungselement, deren Verwendung sowie Verfahren zur Abscheidung einer Beschichtung |
DE102009023472B4 (de) * | 2009-06-02 | 2014-10-23 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Beschichtungsanlage und Beschichtungsverfahren |
DE102009023467B4 (de) * | 2009-06-02 | 2011-05-12 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Beschichtungsanlage und -verfahren |
DE102009023471B4 (de) * | 2009-06-02 | 2012-08-30 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Beschichtungsanlage und -verfahren |
-
2009
- 2009-06-02 DE DE102009023471A patent/DE102009023471B4/de not_active Expired - Fee Related
-
2010
- 2010-05-13 WO PCT/EP2010/056625 patent/WO2010139543A1/de active Application Filing
- 2010-05-13 US US13/375,971 patent/US8986452B2/en active Active
- 2010-05-13 KR KR1020117028959A patent/KR20120027300A/ko not_active Application Discontinuation
- 2010-05-13 JP JP2012513532A patent/JP5540084B2/ja not_active Expired - Fee Related
- 2010-05-13 EP EP10721468.6A patent/EP2438206B1/de not_active Not-in-force
- 2010-05-13 CN CN2010800245865A patent/CN102459694B/zh not_active Expired - Fee Related
- 2010-05-17 EP EP10721772A patent/EP2438207A1/de not_active Withdrawn
- 2010-05-17 WO PCT/EP2010/056719 patent/WO2010139547A1/de active Application Filing
- 2010-05-17 US US13/375,926 patent/US20120114855A1/en not_active Abandoned
- 2010-05-17 JP JP2012513534A patent/JP2012528937A/ja active Pending
- 2010-05-17 KR KR1020117028817A patent/KR20120014192A/ko not_active Application Discontinuation
- 2010-05-17 CN CN201080024724XA patent/CN102803557A/zh active Pending
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0421777A (ja) * | 1990-05-14 | 1992-01-24 | Seiko Instr Inc | ダイヤモンドの合成装置 |
JPH07254566A (ja) * | 1994-03-16 | 1995-10-03 | Fuji Electric Co Ltd | 薄膜生成装置 |
JP2002093723A (ja) * | 2000-09-14 | 2002-03-29 | Anelva Corp | 発熱体cvd装置 |
JP3780364B2 (ja) * | 2000-09-14 | 2006-05-31 | 国立大学法人北陸先端科学技術大学院大学 | 発熱体cvd装置 |
JP2003264153A (ja) * | 2002-03-12 | 2003-09-19 | Sony Corp | 半導体薄膜の形成方法及びその装置、並びに触媒ノズル |
WO2007148457A1 (ja) * | 2006-06-22 | 2007-12-27 | Japan Advanced Institute Of Science And Technology | 触媒化学気相堆積装置 |
JP2008300793A (ja) * | 2007-06-04 | 2008-12-11 | Ulvac Japan Ltd | 触媒化学気相成長装置 |
Also Published As
Publication number | Publication date |
---|---|
EP2438206B1 (de) | 2014-06-25 |
KR20120014192A (ko) | 2012-02-16 |
US20120114855A1 (en) | 2012-05-10 |
CN102459694B (zh) | 2013-11-06 |
CN102459694A (zh) | 2012-05-16 |
CN102803557A (zh) | 2012-11-28 |
DE102009023471B4 (de) | 2012-08-30 |
EP2438206A1 (de) | 2012-04-11 |
US8986452B2 (en) | 2015-03-24 |
KR20120027300A (ko) | 2012-03-21 |
JP5540084B2 (ja) | 2014-07-02 |
US20120100310A1 (en) | 2012-04-26 |
WO2010139547A1 (de) | 2010-12-09 |
DE102009023471A1 (de) | 2010-12-09 |
WO2010139543A1 (de) | 2010-12-09 |
EP2438207A1 (de) | 2012-04-11 |
JP2012528937A (ja) | 2012-11-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5540084B2 (ja) | 成膜設備および成膜方法 | |
US6593548B2 (en) | Heating element CVD system | |
IE901886A1 (en) | Apparatus for synthetic diamond deposition including¹spring-tensioned filaments | |
JPH03115576A (ja) | 曲がったフィラメントと基板冷却手段を有する合成ダイヤモンド蒸着装置 | |
CA3038816C (en) | Device and method for applying a carbon layer | |
EP2374915A1 (en) | Catalyst chemical vapor deposition apparatus | |
Morassutto et al. | Vertically aligned carbon nanotube field emitter arrays with Ohmic base contact to silicon by Fe-catalyzed chemical vapor deposition | |
US9127350B2 (en) | Device and method for coating a substrate using CVD | |
JP5603340B2 (ja) | 化学気相成長法を用いて基板をコーティングするデバイス及び方法 | |
US20110318490A1 (en) | Method for depositing a coating | |
WO2007148457A1 (ja) | 触媒化学気相堆積装置 | |
JP2009287064A (ja) | 触媒cvd装置 | |
EP2408946B1 (en) | Filament arrangement for hot wire chemical vapour deposition | |
WO2012057128A1 (ja) | 成膜装置及びそれを用いた成膜方法 | |
JP4714208B2 (ja) | 発熱体cvd装置及び成膜方法 | |
JP2016128607A (ja) | 触媒体ユニット及びそれを備える発熱体cvd装置 | |
CN103339286A (zh) | 用于热丝化学气相沉积的丝 | |
JP2004332044A (ja) | カーボン系物質の作製方法及び作製装置 | |
JP2012227380A (ja) | 通電加熱線、通電加熱線の製造方法および真空処理装置 | |
JPH10134700A (ja) | 電子放出材 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20130530 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130604 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130904 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20140408 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5540084 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140501 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |