JP2012525692A5 - - Google Patents
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- Publication number
- JP2012525692A5 JP2012525692A5 JP2012507683A JP2012507683A JP2012525692A5 JP 2012525692 A5 JP2012525692 A5 JP 2012525692A5 JP 2012507683 A JP2012507683 A JP 2012507683A JP 2012507683 A JP2012507683 A JP 2012507683A JP 2012525692 A5 JP2012525692 A5 JP 2012525692A5
- Authority
- JP
- Japan
- Prior art keywords
- dielectric layer
- metal
- layer
- component according
- optoelectronic component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052751 metal Inorganic materials 0.000 claims 12
- 239000002184 metal Substances 0.000 claims 12
- 238000000034 method Methods 0.000 claims 7
- 230000005693 optoelectronics Effects 0.000 claims 7
- 238000000231 atomic layer deposition Methods 0.000 claims 6
- 229910044991 metal oxide Inorganic materials 0.000 claims 5
- 239000007800 oxidant agent Substances 0.000 claims 4
- 239000002243 precursor Substances 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- 239000003638 chemical reducing agent Substances 0.000 claims 3
- -1 metal oxide nitride Chemical class 0.000 claims 3
- 150000004706 metal oxides Chemical class 0.000 claims 3
- 150000004767 nitrides Chemical class 0.000 claims 3
- 230000001590 oxidative effect Effects 0.000 claims 3
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims 2
- 229910052782 aluminium Inorganic materials 0.000 claims 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 2
- 238000004140 cleaning Methods 0.000 claims 2
- 150000001875 compounds Chemical class 0.000 claims 2
- 229910052733 gallium Inorganic materials 0.000 claims 2
- 229910052735 hafnium Inorganic materials 0.000 claims 2
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims 2
- 238000002347 injection Methods 0.000 claims 2
- 239000007924 injection Substances 0.000 claims 2
- 229910052746 lanthanum Inorganic materials 0.000 claims 2
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims 2
- 150000002739 metals Chemical class 0.000 claims 2
- 229910052715 tantalum Inorganic materials 0.000 claims 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 2
- 229910052719 titanium Inorganic materials 0.000 claims 2
- 239000010936 titanium Substances 0.000 claims 2
- 229910052725 zinc Inorganic materials 0.000 claims 2
- 239000011701 zinc Substances 0.000 claims 2
- 229910052726 zirconium Inorganic materials 0.000 claims 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims 1
- 238000010521 absorption reaction Methods 0.000 claims 1
- 239000003513 alkali Substances 0.000 claims 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- 150000002366 halogen compounds Chemical class 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims 1
- 229910052760 oxygen Inorganic materials 0.000 claims 1
- 239000001301 oxygen Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102009019520.3 | 2009-04-30 | ||
| DE102009019520 | 2009-04-30 | ||
| DE200910022900 DE102009022900A1 (de) | 2009-04-30 | 2009-05-27 | Optoelektronisches Bauelement und Verfahren zu dessen Herstellung |
| DE102009022900.0 | 2009-05-27 | ||
| PCT/EP2010/055289 WO2010124979A1 (de) | 2009-04-30 | 2010-04-21 | Optoelektronisches bauelement und verfahren zu dessen herstellung |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015000285A Division JP2015130344A (ja) | 2009-04-30 | 2015-01-05 | 光電構成素子およびその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012525692A JP2012525692A (ja) | 2012-10-22 |
| JP2012525692A5 true JP2012525692A5 (cg-RX-API-DMAC7.html) | 2013-05-02 |
| JP5740551B2 JP5740551B2 (ja) | 2015-06-24 |
Family
ID=42979234
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012507683A Expired - Fee Related JP5740551B2 (ja) | 2009-04-30 | 2010-04-21 | 光電構成素子およびその製造方法 |
| JP2015000285A Granted JP2015130344A (ja) | 2009-04-30 | 2015-01-05 | 光電構成素子およびその製造方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015000285A Granted JP2015130344A (ja) | 2009-04-30 | 2015-01-05 | 光電構成素子およびその製造方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US8680563B2 (cg-RX-API-DMAC7.html) |
| EP (1) | EP2425037A1 (cg-RX-API-DMAC7.html) |
| JP (2) | JP5740551B2 (cg-RX-API-DMAC7.html) |
| KR (1) | KR20120042747A (cg-RX-API-DMAC7.html) |
| CN (1) | CN102439197B (cg-RX-API-DMAC7.html) |
| DE (1) | DE102009022900A1 (cg-RX-API-DMAC7.html) |
| WO (1) | WO2010124979A1 (cg-RX-API-DMAC7.html) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102009022900A1 (de) * | 2009-04-30 | 2010-11-18 | Osram Opto Semiconductors Gmbh | Optoelektronisches Bauelement und Verfahren zu dessen Herstellung |
| DE102010040839B4 (de) * | 2010-09-15 | 2013-10-17 | Osram Opto Semiconductors Gmbh | Verfahren zum Herstellen eines elektronsichen Bauelements und elektronisches Bauelement |
| US20130242533A1 (en) * | 2011-09-12 | 2013-09-19 | Appotronics Corporation Limited | Method and apparatus for a color filter |
| EP2768029B1 (en) * | 2012-03-06 | 2016-10-19 | Japan Science and Technology Agency | Multi-quantum well solar cell and method of manufacturing multi-quantum well solar cell |
| KR101387918B1 (ko) * | 2012-04-30 | 2014-04-23 | 엘지디스플레이 주식회사 | 유기전계발광표시장치 및 그 제조 방법 |
| FR2992098A1 (fr) * | 2012-06-19 | 2013-12-20 | Commissariat Energie Atomique | Dispositif optoelectronique organique et son procede de fabrication. |
| CN102728238B (zh) * | 2012-07-06 | 2015-02-18 | 南京工业大学 | 聚丙烯分离膜表面改性的方法 |
| DE112012006689B4 (de) * | 2012-07-10 | 2022-05-12 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Verfahren zur Verkapselung eines optoelektronischen Bauelements und Leuchtdioden-Chip |
| CN103840089B (zh) | 2012-11-20 | 2016-12-21 | 群康科技(深圳)有限公司 | 有机发光二极管装置及其显示面板 |
| JP2014149994A (ja) * | 2013-02-01 | 2014-08-21 | Denso Corp | 表示装置の製造方法 |
| CN104009180A (zh) * | 2013-02-26 | 2014-08-27 | 海洋王照明科技股份有限公司 | 有机电致发光器件及其制备方法 |
| US20160043247A1 (en) * | 2013-03-15 | 2016-02-11 | Arkema Inc. | Nitrogen-containing transparent conductive oxide cap layer composition |
| JP6119408B2 (ja) * | 2013-05-09 | 2017-04-26 | ソニー株式会社 | 原子層堆積装置 |
| EP2918701A1 (en) * | 2014-03-14 | 2015-09-16 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Method of manufacturing a stacked organic light emitting diode, stacked OLED device, and apparatus for manufacturing thereof |
| FR3020179B1 (fr) * | 2014-04-22 | 2017-10-06 | Saint Gobain | Electrode supportee transparente pour oled |
| DE102014111346B4 (de) * | 2014-08-08 | 2022-11-03 | Pictiva Displays International Limited | Optoelektronische Bauelementevorrichtung und Verfahren zum Herstellen einer optoelektronischen Bauelementevorrichtung |
| US9490453B2 (en) * | 2014-10-06 | 2016-11-08 | Winbond Electronics Corp. | Quasi-crystal organic light-emitting display panel and method for simulating optical efficiency of the same |
| DE102015112681B4 (de) * | 2015-08-03 | 2025-08-28 | Pictiva Displays International Limited | Organisches optoelektronisches Bauelement und Verfahren zum Herstellen eines organischen optoelektronischen Bauelements |
| DE102016103059A1 (de) * | 2016-02-22 | 2017-08-24 | Osram Opto Semiconductors Gmbh | Halbleiterbauelement und Verfahren zur Herstellung eines Halbleiterbauelements |
| CN106784350A (zh) * | 2016-12-23 | 2017-05-31 | 京东方科技集团股份有限公司 | 一种有机电致发光显示面板及其制作方法、显示装置 |
| CN108123050B (zh) * | 2017-12-04 | 2020-05-12 | 武汉华美晨曦光电有限责任公司 | 一种以交流驱动的白光oled器件 |
| US11682692B2 (en) | 2020-02-24 | 2023-06-20 | Taiwan Semiconductor Manufacturing Company, Ltd. | Hard mask layer below via structure in display device |
| DE102020113616A1 (de) * | 2020-02-24 | 2021-08-26 | Taiwan Semiconductor Manufacturing Co., Ltd. | Hartmaskenschicht unter einer durchkontaktierungsstruktur in einer anzeigevorrichtung |
Family Cites Families (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FI92897C (fi) * | 1993-07-20 | 1995-01-10 | Planar International Oy Ltd | Menetelmä kerrosrakenteen valmistamiseksi elektroluminenssikomponentteja varten |
| JP3561549B2 (ja) | 1995-04-07 | 2004-09-02 | 三洋電機株式会社 | 有機エレクトロルミネッセンス素子 |
| WO1998005187A1 (en) | 1996-07-29 | 1998-02-05 | Cambridge Display Technology Limited | Electroluminescent devices with electrode protection |
| JPH11224781A (ja) * | 1998-02-05 | 1999-08-17 | Pioneer Electron Corp | 有機ｅｌディスプレイ及びその製造方法 |
| JP2000268973A (ja) * | 1999-03-17 | 2000-09-29 | Tdk Corp | 有機ｅｌ素子 |
| KR100692598B1 (ko) * | 1999-09-22 | 2007-04-13 | 한국전자통신연구원 | 이중 절연층을 갖는 유기전기발광소자의 구조 및 제조방법 |
| US6576053B1 (en) | 1999-10-06 | 2003-06-10 | Samsung Electronics Co., Ltd. | Method of forming thin film using atomic layer deposition method |
| DE10049257B4 (de) | 1999-10-06 | 2015-05-13 | Samsung Electronics Co., Ltd. | Verfahren zur Dünnfilmerzeugung mittels atomarer Schichtdeposition |
| US7560175B2 (en) * | 1999-12-31 | 2009-07-14 | Lg Chem, Ltd. | Electroluminescent devices with low work function anode |
| JP4556282B2 (ja) * | 2000-03-31 | 2010-10-06 | 株式会社デンソー | 有機ｅｌ素子およびその製造方法 |
| JP2002208479A (ja) * | 2001-01-05 | 2002-07-26 | Toppan Printing Co Ltd | 有機ｌｅｄ素子用中間抵抗膜付基板および有機ｌｅｄ素子 |
| US20040195966A1 (en) | 2001-05-14 | 2004-10-07 | Conway Natasha M J | Method of providing a layer including a metal or silicon or germanium and oxygen on a surface |
| GB0111751D0 (en) * | 2001-05-14 | 2001-07-04 | Opsys Ltd | A method of providing a layer including a metal or silicon or germanium and oxygen on a surface |
| CN1323128C (zh) | 2002-07-19 | 2007-06-27 | 出光兴产株式会社 | 有机电致发光装置和有机发光介质 |
| JP2005259550A (ja) * | 2004-03-12 | 2005-09-22 | Idemitsu Kosan Co Ltd | 有機ｅｌ素子及び表示装置 |
| US7183707B2 (en) * | 2004-04-12 | 2007-02-27 | Eastman Kodak Company | OLED device with short reduction |
| DE102004022004B4 (de) * | 2004-05-03 | 2007-07-05 | Novaled Ag | Schichtanordnung für eine organische lichtemittierende Diode |
| WO2006014591A2 (en) * | 2004-07-08 | 2006-02-09 | Itn Energy Systems, Inc. | Permeation barriers for flexible electronics |
| JP2007090803A (ja) * | 2005-09-30 | 2007-04-12 | Fujifilm Corp | ガスバリアフィルム、並びに、これを用いた画像表示素子および有機エレクトロルミネッセンス素子 |
| EP1974391A4 (en) * | 2006-01-04 | 2010-11-17 | Univ California | PASSIVATION LAYER FOR PHOTOVOLTAIC CELLS |
| US7564063B2 (en) * | 2006-03-23 | 2009-07-21 | Eastman Kodak Company | Composite electrode for light-emitting device |
| US20080100202A1 (en) * | 2006-11-01 | 2008-05-01 | Cok Ronald S | Process for forming oled conductive protective layer |
| KR20080051572A (ko) * | 2006-12-06 | 2008-06-11 | 주성엔지니어링(주) | 유기 전계 발광 소자 및 그 제조 방법 |
| JP2009081409A (ja) * | 2007-04-27 | 2009-04-16 | Fujifilm Corp | 有機電界発光素子 |
| US7911133B2 (en) * | 2007-05-10 | 2011-03-22 | Global Oled Technology Llc | Electroluminescent device having improved light output |
| WO2009002892A1 (en) | 2007-06-22 | 2008-12-31 | The Regents Of The University Of Colorado | Protective coatings for organic electronic devices made using atomic layer deposition and molecular layer deposition techniques |
| TWI420722B (zh) | 2008-01-30 | 2013-12-21 | 歐斯朗奧托半導體股份有限公司 | 具有封裝單元之裝置 |
| DE102009022900A1 (de) * | 2009-04-30 | 2010-11-18 | Osram Opto Semiconductors Gmbh | Optoelektronisches Bauelement und Verfahren zu dessen Herstellung |
-
2009
- 2009-05-27 DE DE200910022900 patent/DE102009022900A1/de active Granted
-
2010
- 2010-04-21 US US13/318,341 patent/US8680563B2/en active Active
- 2010-04-21 EP EP10718924A patent/EP2425037A1/de not_active Withdrawn
- 2010-04-21 JP JP2012507683A patent/JP5740551B2/ja not_active Expired - Fee Related
- 2010-04-21 WO PCT/EP2010/055289 patent/WO2010124979A1/de not_active Ceased
- 2010-04-21 KR KR20117028329A patent/KR20120042747A/ko not_active Ceased
- 2010-04-21 CN CN201080019112.1A patent/CN102439197B/zh active Active
-
2014
- 2014-01-10 US US14/152,608 patent/US9130189B2/en active Active
-
2015
- 2015-01-05 JP JP2015000285A patent/JP2015130344A/ja active Granted
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