JP2012524986A - 電気機械の変換器の製造プロセス - Google Patents

電気機械の変換器の製造プロセス Download PDF

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Publication number
JP2012524986A
JP2012524986A JP2012506369A JP2012506369A JP2012524986A JP 2012524986 A JP2012524986 A JP 2012524986A JP 2012506369 A JP2012506369 A JP 2012506369A JP 2012506369 A JP2012506369 A JP 2012506369A JP 2012524986 A JP2012524986 A JP 2012524986A
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polymer layer
holes
coating
hole
continuous
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Japanese (ja)
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JP2012524986A5 (enExample
Inventor
ヴェルナー・イェニンガー
ヨアヒム・ワグナー
ヴォルフガング・フィッシャー
イェルク・ビュッフナー
トマス・ベルネルト
アンドレアス・ニュブラー
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Covestro Deutschland AG
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Bayer MaterialScience AG
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Publication of JP2012524986A publication Critical patent/JP2012524986A/ja
Publication of JP2012524986A5 publication Critical patent/JP2012524986A5/ja
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/857—Macromolecular compositions
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R7/00—Diaphragms for electromechanical transducers; Cones
    • H04R7/02—Diaphragms for electromechanical transducers; Cones characterised by the construction
    • H04R7/04—Plane diaphragms
    • H04R7/06—Plane diaphragms comprising a plurality of sections or layers
    • H04R7/08—Plane diaphragms comprising a plurality of sections or layers comprising superposed layers separated by air or other fluid
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/09—Forming piezoelectric or electrostrictive materials
    • H10N30/098—Forming organic materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/40—Piezoelectric or electrostrictive devices with electrical input and electrical output, e.g. functioning as transformers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H04R17/005—Piezoelectric transducers; Electrostrictive transducers using a piezoelectric polymer
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H10N30/057—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by stacking bulk piezoelectric or electrostrictive bodies and electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S310/00—Electrical generator or motor structure
    • Y10S310/80—Piezoelectric polymers, e.g. PVDF
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Manufacturing & Machinery (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Multimedia (AREA)
  • Power Engineering (AREA)
  • Laminated Bodies (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2012506369A 2009-04-24 2010-04-10 電気機械の変換器の製造プロセス Pending JP2012524986A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP09005740A EP2244489A1 (de) 2009-04-24 2009-04-24 Verfahren zur Herstellung eines elektromechanischen Wandlers
EP09005740.7 2009-04-24
PCT/EP2010/002238 WO2010121720A1 (de) 2009-04-24 2010-04-10 Verfahren zur herstellung eines elektromechanischen wandlers

Publications (2)

Publication Number Publication Date
JP2012524986A true JP2012524986A (ja) 2012-10-18
JP2012524986A5 JP2012524986A5 (enExample) 2013-05-30

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JP2012506369A Pending JP2012524986A (ja) 2009-04-24 2010-04-10 電気機械の変換器の製造プロセス

Country Status (7)

Country Link
US (1) US8779650B2 (enExample)
EP (2) EP2244489A1 (enExample)
JP (1) JP2012524986A (enExample)
KR (1) KR20120016611A (enExample)
CN (1) CN102415106B (enExample)
TW (1) TW201110434A (enExample)
WO (1) WO2010121720A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016020814A (ja) * 2014-07-11 2016-02-04 積水化学工業株式会社 圧電センサスイッチ
JP2023515114A (ja) * 2020-02-21 2023-04-12 ネーデルランセ オルハニサチエ フォール トゥーヘパスト－ナツールウェーテンシャッペルック オンデルズク テーエヌオー ピラー構造を有する圧電デバイス及びその製造方法
JPWO2023242898A1 (enExample) * 2022-06-13 2023-12-21

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7952261B2 (en) 2007-06-29 2011-05-31 Bayer Materialscience Ag Electroactive polymer transducers for sensory feedback applications
EP2239793A1 (de) 2009-04-11 2010-10-13 Bayer MaterialScience AG Elektrisch schaltbarer Polymerfilmaufbau und dessen Verwendung
EP2284919A1 (de) * 2009-08-07 2011-02-16 Bayer MaterialScience AG Verfahren zur Herstellung eines elektromechanischen Wandlers
SG193003A1 (en) 2011-03-01 2013-10-30 Bayer Ip Gmbh Automated manufacturing processes for producing deformable polymer devices and films
CN103703404A (zh) 2011-03-22 2014-04-02 拜耳知识产权有限责任公司 电活化聚合物致动器双凸透镜系统
EP2511352A1 (de) * 2011-04-13 2012-10-17 Bayer Materialscience AG Siebdruckverfahren mit zu einem Polyurethanpolymer reagierender Drucktinte
JP6038174B2 (ja) 2011-12-21 2016-12-07 フィリップス ライティング ホールディング ビー ヴィ 制御可能な高分子アクチュエータ
WO2013142552A1 (en) 2012-03-21 2013-09-26 Bayer Materialscience Ag Roll-to-roll manufacturing processes for producing self-healing electroactive polymer devices
KR20150031285A (ko) 2012-06-18 2015-03-23 바이엘 인텔렉쳐 프로퍼티 게엠베하 연신 공정을 위한 연신 프레임
DE102012016378B4 (de) * 2012-08-13 2020-06-18 Technische Universität Dresden Dielektrischer Elastomeraktor und Verfahren zu seiner Herstellung
WO2014028822A1 (en) * 2012-08-16 2014-02-20 Bayer Intellectual Property Gmbh Electrical interconnect terminals for rolled dielectric elastomer transducers
CN103682083A (zh) * 2012-08-31 2014-03-26 纳米新能源（唐山）有限责任公司 一种压电驻极体薄膜及其制备方法
CN103682081B (zh) * 2012-09-14 2017-07-11 纳米新能源（唐山）有限责任公司 压电驻极体薄膜及其制备方法
US9590193B2 (en) 2012-10-24 2017-03-07 Parker-Hannifin Corporation Polymer diode
US9913321B2 (en) * 2013-01-25 2018-03-06 Energyield, Llc Energy harvesting container
US9444030B2 (en) 2013-05-10 2016-09-13 Wisconsin Alumni Research Foundation Nanoporous piezoelectric polymer films for mechanical energy harvesting
DE102014204015A1 (de) * 2014-03-05 2015-09-10 Tesa Se Mehrschicht-Verbund mit hoher innerer Dämpfung
JP6870200B2 (ja) * 2014-11-13 2021-05-12 株式会社リコー 素子、及び発電装置
JP6471812B2 (ja) * 2016-01-29 2019-02-20 株式会社リコー 感圧センサ、把持装置及びロボット
CN105788863B (zh) * 2016-02-29 2018-06-12 杭州电子科技大学 一种聚偏氟乙烯薄膜驻极体的制备方法
US10629800B2 (en) 2016-08-05 2020-04-21 Wisconsin Alumni Research Foundation Flexible compact nanogenerators based on mechanoradical-forming porous polymer films
DE102018221051A1 (de) * 2018-04-05 2019-10-10 Continental Reifen Deutschland Gmbh Vorrichtung zum Messen einer mechanischen Kraft, umfassend eine erste, zweite, dritte, vierte und fünfte Schicht sowie die Verwendungen der Vorrichtung und Reifen oder technischer Gummiartikel umfassend die Vorrichtung
KR20220016107A (ko) * 2019-05-31 2022-02-08 스토로브 가부시키가이샤 멀티레이어 구조를 갖는 정전 액추에이터
EP4493897A4 (en) * 2022-03-17 2026-03-11 Univ Istanbul Teknik LARGE AREA TEXTILE-BASED PRESSURE DETECTION NETWORKS
CN115643783B (zh) * 2022-11-07 2023-07-25 中南大学 多层定向多孔压电复合材料及制备和压电能量收集器
CN116801175A (zh) * 2023-06-30 2023-09-22 西安交通大学 一种通孔压电单晶复合材料、制备方法及其应用

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60576U (ja) * 1974-05-17 1985-01-05 アンスチチユ，フランセ，デユ，ペトロル 連続構造の地震探鉱用センサ
DE4025435A1 (de) * 1990-08-10 1990-12-20 Siemens Ag Piezoelektrischer biegewandler und verfahren zu seiner herstellung
JP2002518202A (ja) * 1998-06-18 2002-06-25 スリーエム イノベイティブ プロパティズ カンパニー ミクロ流体製品およびその製造方法
EP1814169A2 (de) * 2006-01-31 2007-08-01 Robert Bosch Gmbh Piezoaktor und Verfahren zur Herstellung desselben
JP2007231077A (ja) * 2006-02-28 2007-09-13 Junkosha Co Ltd 高分子物質の圧電・焦電素子
EP1930961A2 (en) * 2006-12-04 2008-06-11 Ngk Insulators, Ltd. Honeycomb-type piezoelectric/electrostrictive element
JP2009012474A (ja) * 2007-07-04 2009-01-22 Manroland Ag エレクトレットおよびエレクトレットの印刷機への導入
WO2010022896A1 (de) * 2008-08-30 2010-03-04 Bayer Materialscience Ag Elektromechanischer wandler

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2479310A (en) 1947-03-21 1949-08-16 Edward K Chapin Dry egg composition
DE1256822B (de) 1963-07-23 1967-12-21 Bayer Ag Verkleben von weichmacherhaltigen Kunststoffen aus Polyvinylchlorid oder dessen Mischpolymerisaten
DE1930336C3 (de) 1969-06-14 1978-12-14 Bayer Ag, 5090 Leverkusen Verwendung von Polyurethanen zur Herstellung von Klebstoffen mit hoher Anfangsfestigkeit
DE2551094A1 (de) 1975-11-14 1977-05-26 Bayer Ag Verfahren zur herstellung von in wasser dispergierbaren polyurethanen
DE2811148A1 (de) 1978-03-15 1979-09-20 Bayer Ag Verfahren zur herstellung von waessrigen polyurethan-dispersionen und -loesungen
JPS6077600A (ja) * 1983-10-05 1985-05-02 Kureha Chem Ind Co Ltd アレイ型超音波探触子の製造方法
DE3502379A1 (de) 1985-01-25 1986-07-31 Bayer Ag, 5090 Leverkusen Endstaendige hydroxylgruppen aufweisende polyesterpolyurethane und ihre verwendung als klebstoffe oder zur herstellung von klebstoffen
DE3603996A1 (de) 1986-02-08 1987-08-13 Bayer Ag Verfahren zur kontinuierlichen herstellung von waessrigen polyurethandispersionen und ihre verwendung als beschichtungsmittel oder als klebstoff
DE3827724A1 (de) 1987-08-22 1989-03-02 Zahnradfabrik Friedrichshafen Hilfskraftbetaetigte kupplungs- und gangschalteinrichtung
DE3827224C3 (de) 1988-08-11 2003-09-25 Degussa Schmelzklebeverfahren
GB2243946A (en) * 1990-05-09 1991-11-13 Plessey Res Caswell A method of poling an electroactive composite material
DE4114229A1 (de) 1990-10-13 1992-04-16 Bayer Ag Verfahren zur herstellung von polarisationsfolien
EP0634227B1 (en) * 1993-07-15 1999-10-06 General Electric Company Broadband ultrasonic transducers and related method of manufacture
US6098460A (en) * 1995-10-09 2000-08-08 Matsushita Electric Industrial Co., Ltd. Acceleration sensor and shock detecting device using the same
ATE203035T1 (de) 1997-12-11 2001-07-15 Thomas Abend Verfahren zur herstellung und verwendung von lagerstabilen latentreaktiven schichten oder pulvern aus oberflächendesaktivierten festen polyisocyanaten und dispersionspolymeren mit funktionellen gruppen
US6013311A (en) * 1998-06-08 2000-01-11 Eastman Kodak Company Using morphological changes to make piezoelectric transducers
US6758094B2 (en) * 2001-07-31 2004-07-06 Koninklijke Philips Electronics, N.V. Ultrasonic transducer wafer having variable acoustic impedance
US7382082B2 (en) * 2002-08-14 2008-06-03 Bhardwaj Mahesh C Piezoelectric transducer with gas matrix
DE10238932B3 (de) * 2002-08-24 2004-06-09 Deutsches Zentrum für Luft- und Raumfahrt e.V. Als Sensor und/oder Aktuator einsetzbares Bauteil
JP2008530953A (ja) * 2005-02-15 2008-08-07 ザ・ウルトラン・グループ・インコーポレイテッド 積層ガスマトリックス圧電コンポジットトランスデューサ
US7193350B1 (en) * 2005-02-25 2007-03-20 United States Of America As Represented By The Secretary Of The Navy Electroactive polymer structure
US8006356B2 (en) * 2006-12-07 2011-08-30 Xerox Corporation Method of forming an array of drop generators
DE102006058527A1 (de) 2006-12-12 2008-06-19 Bayer Materialscience Ag Klebstoffe
EP2339869A1 (de) * 2009-11-12 2011-06-29 Bayer MaterialScience AG Ferroelektret-Zwei- und Mehrschichtverbund und Verfahren zu dessen Herstellung

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60576U (ja) * 1974-05-17 1985-01-05 アンスチチユ，フランセ，デユ，ペトロル 連続構造の地震探鉱用センサ
DE4025435A1 (de) * 1990-08-10 1990-12-20 Siemens Ag Piezoelektrischer biegewandler und verfahren zu seiner herstellung
JP2002518202A (ja) * 1998-06-18 2002-06-25 スリーエム イノベイティブ プロパティズ カンパニー ミクロ流体製品およびその製造方法
EP1814169A2 (de) * 2006-01-31 2007-08-01 Robert Bosch Gmbh Piezoaktor und Verfahren zur Herstellung desselben
JP2007231077A (ja) * 2006-02-28 2007-09-13 Junkosha Co Ltd 高分子物質の圧電・焦電素子
EP1930961A2 (en) * 2006-12-04 2008-06-11 Ngk Insulators, Ltd. Honeycomb-type piezoelectric/electrostrictive element
JP2009012474A (ja) * 2007-07-04 2009-01-22 Manroland Ag エレクトレットおよびエレクトレットの印刷機への導入
WO2010022896A1 (de) * 2008-08-30 2010-03-04 Bayer Materialscience Ag Elektromechanischer wandler

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
JPN6014022451; ＢＡＳＳＯ，　Ｈ．Ｃ．　ｅｔ　ａｌ: 'Ｔｈｒｅｅ-ｌａｙｅｒ　ｆｅｒｒｏｅｌｅｃｔｒｅｔｓ　ｆｒｏｍ　ｐｅｒｆｏｒａｔｅｄ　Ｔｅｆｌｏｎ-ＰＴＦＥ　ｆｉｌｍｓ　ｆｕｓｅｄ　ｂｅｔｗｅｅｎ　ｔｗｏ　ｈｏｍｏｇｅｎｅｏｕｓ　Ｔｅｆｌｏｎ-ＦＥ' ２００７　Ａｎｎｕａｌ　Ｒｅｐｏｒｔ　Ｃｏｎｆｅｒｅｎｃｅ　ｏｎ　Ｅｌｅｃｔｒｉｃａｌ　Ｉｎｓｕｌａｔｉｏｎ　ａｎｄ　Ｄｉｅｌｅｃｔｒｉｃ　Ｐｈｅｎｏｍｅｎａ , 20071014, ｐｐ．４５３　-　４５６ *
JPN7014001660; ＪＩＮＦＥＮＧ　Ｈｕａｎｇ，　ｅｔ　ａｌ: 'Ｐｉｅｚｏｅｌｅｃｔｒｅｔｓ　ｆｒｏｍ　ｌａｍｉｎａｔｅｄ　ｓａｎｄｗｉｃｈｅｓ　ｏｆ　ｐｏｒｏｕｓ　ｐｏｌｙｔｅｔｒａｆｌｕｏｒｏｅｔｈｙｌｅｎｅ　ｆｉｌｍｓ　ａｎｄ　ｎｏｎｐｏｒｏｕｓ　ｆｌｕｏｒ' Ｊｏｕｒｎａｌ　ｏｆ　Ａｐｐｌｉｅｄ　Ｐｈｙｓｉｃｓ １０３, 20080423, ｐｐ．０８４１１１-１　-　０８４１１１-６ *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016020814A (ja) * 2014-07-11 2016-02-04 積水化学工業株式会社 圧電センサスイッチ
JP2023515114A (ja) * 2020-02-21 2023-04-12 ネーデルランセ オルハニサチエ フォール トゥーヘパスト－ナツールウェーテンシャッペルック オンデルズク テーエヌオー ピラー構造を有する圧電デバイス及びその製造方法
JP7701367B2 (ja) 2020-02-21 2025-07-01 ネーデルランセ オルハニサチエ フォール トゥーヘパスト－ナツールウェーテンシャッペルック オンデルズク テーエヌオー ピラー構造を有する圧電デバイス及びその製造方法
JPWO2023242898A1 (enExample) * 2022-06-13 2023-12-21
JP7617695B2 (ja) 2022-06-13 2025-01-20 順治 曽根 センサ

Also Published As

Publication number Publication date
CN102415106B (zh) 2014-09-24
WO2010121720A1 (de) 2010-10-28
EP2244489A1 (de) 2010-10-27
CN102415106A (zh) 2012-04-11
TW201110434A (en) 2011-03-16
KR20120016611A (ko) 2012-02-24
US20120068572A1 (en) 2012-03-22
US8779650B2 (en) 2014-07-15
EP2422530A1 (de) 2012-02-29

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