CN102415106B - 生产电-机换能器的方法、电-机换能器及其用途 - Google Patents
生产电-机换能器的方法、电-机换能器及其用途 Download PDFInfo
- Publication number
- CN102415106B CN102415106B CN201080018062.5A CN201080018062A CN102415106B CN 102415106 B CN102415106 B CN 102415106B CN 201080018062 A CN201080018062 A CN 201080018062A CN 102415106 B CN102415106 B CN 102415106B
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- CN
- China
- Prior art keywords
- polymer layer
- hole
- holes
- layer
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/09—Forming piezoelectric or electrostrictive materials
- H10N30/098—Forming organic materials
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R7/00—Diaphragms for electromechanical transducers; Cones
- H04R7/02—Diaphragms for electromechanical transducers; Cones characterised by the construction
- H04R7/04—Plane diaphragms
- H04R7/06—Plane diaphragms comprising a plurality of sections or layers
- H04R7/08—Plane diaphragms comprising a plurality of sections or layers comprising superposed layers separated by air or other fluid
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/40—Piezoelectric or electrostrictive devices with electrical input and electrical output, e.g. functioning as transformers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/857—Macromolecular compositions
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
- H04R17/005—Piezoelectric transducers; Electrostrictive transducers using a piezoelectric polymer
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
- H10N30/057—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by stacking bulk piezoelectric or electrostrictive bodies and electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S310/00—Electrical generator or motor structure
- Y10S310/80—Piezoelectric polymers, e.g. PVDF
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Manufacturing & Machinery (AREA)
- Multimedia (AREA)
- Power Engineering (AREA)
- Laminated Bodies (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP09005740.7 | 2009-04-24 | ||
| EP09005740A EP2244489A1 (de) | 2009-04-24 | 2009-04-24 | Verfahren zur Herstellung eines elektromechanischen Wandlers |
| PCT/EP2010/002238 WO2010121720A1 (de) | 2009-04-24 | 2010-04-10 | Verfahren zur herstellung eines elektromechanischen wandlers |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102415106A CN102415106A (zh) | 2012-04-11 |
| CN102415106B true CN102415106B (zh) | 2014-09-24 |
Family
ID=41078219
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201080018062.5A Expired - Fee Related CN102415106B (zh) | 2009-04-24 | 2010-04-10 | 生产电-机换能器的方法、电-机换能器及其用途 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US8779650B2 (enExample) |
| EP (2) | EP2244489A1 (enExample) |
| JP (1) | JP2012524986A (enExample) |
| KR (1) | KR20120016611A (enExample) |
| CN (1) | CN102415106B (enExample) |
| TW (1) | TW201110434A (enExample) |
| WO (1) | WO2010121720A1 (enExample) |
Families Citing this family (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009006318A1 (en) | 2007-06-29 | 2009-01-08 | Artificial Muscle, Inc. | Electroactive polymer transducers for sensory feedback applications |
| EP2239793A1 (de) | 2009-04-11 | 2010-10-13 | Bayer MaterialScience AG | Elektrisch schaltbarer Polymerfilmaufbau und dessen Verwendung |
| EP2284919A1 (de) * | 2009-08-07 | 2011-02-16 | Bayer MaterialScience AG | Verfahren zur Herstellung eines elektromechanischen Wandlers |
| JP2014513510A (ja) | 2011-03-01 | 2014-05-29 | バイエル・インテレクチュアル・プロパティ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング | 変形可能なポリマー装置及び変形可能なポリマーフィルムを作るための自動化された製造プロセス |
| US9195058B2 (en) | 2011-03-22 | 2015-11-24 | Parker-Hannifin Corporation | Electroactive polymer actuator lenticular system |
| EP2511352A1 (de) * | 2011-04-13 | 2012-10-17 | Bayer Materialscience AG | Siebdruckverfahren mit zu einem Polyurethanpolymer reagierender Drucktinte |
| RU2014129880A (ru) * | 2011-12-21 | 2016-02-10 | Конинклейке Филипс Н.В. | Управляемый полимерный актюатор |
| WO2013142552A1 (en) | 2012-03-21 | 2013-09-26 | Bayer Materialscience Ag | Roll-to-roll manufacturing processes for producing self-healing electroactive polymer devices |
| US9761790B2 (en) | 2012-06-18 | 2017-09-12 | Parker-Hannifin Corporation | Stretch frame for stretching process |
| DE102012016378B4 (de) * | 2012-08-13 | 2020-06-18 | Technische Universität Dresden | Dielektrischer Elastomeraktor und Verfahren zu seiner Herstellung |
| EP2885868A4 (en) * | 2012-08-16 | 2016-04-13 | Bayer Ip Gmbh | LAMINATED AND COMPLIANT DIELECTRIC ELASTOMER ACTUATORS |
| CN103682083A (zh) * | 2012-08-31 | 2014-03-26 | 纳米新能源(唐山)有限责任公司 | 一种压电驻极体薄膜及其制备方法 |
| CN103682081B (zh) * | 2012-09-14 | 2017-07-11 | 纳米新能源(唐山)有限责任公司 | 压电驻极体薄膜及其制备方法 |
| US9590193B2 (en) | 2012-10-24 | 2017-03-07 | Parker-Hannifin Corporation | Polymer diode |
| US9913321B2 (en) * | 2013-01-25 | 2018-03-06 | Energyield, Llc | Energy harvesting container |
| US9444030B2 (en) | 2013-05-10 | 2016-09-13 | Wisconsin Alumni Research Foundation | Nanoporous piezoelectric polymer films for mechanical energy harvesting |
| DE102014204015A1 (de) * | 2014-03-05 | 2015-09-10 | Tesa Se | Mehrschicht-Verbund mit hoher innerer Dämpfung |
| JP2016020814A (ja) * | 2014-07-11 | 2016-02-04 | 積水化学工業株式会社 | 圧電センサスイッチ |
| JP6870200B2 (ja) * | 2014-11-13 | 2021-05-12 | 株式会社リコー | 素子、及び発電装置 |
| WO2017130591A1 (ja) * | 2016-01-29 | 2017-08-03 | 株式会社リコー | 感圧センサ、把持装置及びロボット |
| CN105788863B (zh) * | 2016-02-29 | 2018-06-12 | 杭州电子科技大学 | 一种聚偏氟乙烯薄膜驻极体的制备方法 |
| US10629800B2 (en) | 2016-08-05 | 2020-04-21 | Wisconsin Alumni Research Foundation | Flexible compact nanogenerators based on mechanoradical-forming porous polymer films |
| DE102018221051A1 (de) * | 2018-04-05 | 2019-10-10 | Continental Reifen Deutschland Gmbh | Vorrichtung zum Messen einer mechanischen Kraft, umfassend eine erste, zweite, dritte, vierte und fünfte Schicht sowie die Verwendungen der Vorrichtung und Reifen oder technischer Gummiartikel umfassend die Vorrichtung |
| KR20220016107A (ko) * | 2019-05-31 | 2022-02-08 | 스토로브 가부시키가이샤 | 멀티레이어 구조를 갖는 정전 액추에이터 |
| EP3869575A1 (en) * | 2020-02-21 | 2021-08-25 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk Onderzoek TNO | Piezoelectric device with pillar structure and method of manufacturing |
| JP7617695B2 (ja) * | 2022-06-13 | 2025-01-20 | 順治 曽根 | センサ |
| CN115643783B (zh) * | 2022-11-07 | 2023-07-25 | 中南大学 | 多层定向多孔压电复合材料及制备和压电能量收集器 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0634227A2 (en) * | 1993-07-15 | 1995-01-18 | General Electric Company | Broadband ultrasonic transducers and related method of manufacture |
| US6013311A (en) * | 1998-06-08 | 2000-01-11 | Eastman Kodak Company | Using morphological changes to make piezoelectric transducers |
| US6615465B2 (en) * | 1995-10-09 | 2003-09-09 | Matsushita Electric Industrial Co., Ltd. | Method for producing an acceleration sensor |
| WO2010022896A1 (de) * | 2008-08-30 | 2010-03-04 | Bayer Materialscience Ag | Elektromechanischer wandler |
Family Cites Families (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2479310A (en) | 1947-03-21 | 1949-08-16 | Edward K Chapin | Dry egg composition |
| DE1256822B (de) | 1963-07-23 | 1967-12-21 | Bayer Ag | Verkleben von weichmacherhaltigen Kunststoffen aus Polyvinylchlorid oder dessen Mischpolymerisaten |
| DE1930336C3 (de) | 1969-06-14 | 1978-12-14 | Bayer Ag, 5090 Leverkusen | Verwendung von Polyurethanen zur Herstellung von Klebstoffen mit hoher Anfangsfestigkeit |
| FR2271733B1 (enExample) * | 1974-05-17 | 1979-08-03 | Inst Francais Du Petrole | |
| DE2551094A1 (de) | 1975-11-14 | 1977-05-26 | Bayer Ag | Verfahren zur herstellung von in wasser dispergierbaren polyurethanen |
| DE2811148A1 (de) | 1978-03-15 | 1979-09-20 | Bayer Ag | Verfahren zur herstellung von waessrigen polyurethan-dispersionen und -loesungen |
| JPS6077600A (ja) * | 1983-10-05 | 1985-05-02 | Kureha Chem Ind Co Ltd | アレイ型超音波探触子の製造方法 |
| DE3502379A1 (de) | 1985-01-25 | 1986-07-31 | Bayer Ag, 5090 Leverkusen | Endstaendige hydroxylgruppen aufweisende polyesterpolyurethane und ihre verwendung als klebstoffe oder zur herstellung von klebstoffen |
| DE3603996A1 (de) | 1986-02-08 | 1987-08-13 | Bayer Ag | Verfahren zur kontinuierlichen herstellung von waessrigen polyurethandispersionen und ihre verwendung als beschichtungsmittel oder als klebstoff |
| DE3827724A1 (de) | 1987-08-22 | 1989-03-02 | Zahnradfabrik Friedrichshafen | Hilfskraftbetaetigte kupplungs- und gangschalteinrichtung |
| DE3827224C3 (de) | 1988-08-11 | 2003-09-25 | Degussa | Schmelzklebeverfahren |
| GB2243946A (en) * | 1990-05-09 | 1991-11-13 | Plessey Res Caswell | A method of poling an electroactive composite material |
| DE4025435C2 (de) * | 1990-08-10 | 2003-07-03 | Siemens Ag | Piezoelektrischer Biegewandler und Verfahren zu seiner Herstellung |
| DE4114229A1 (de) | 1990-10-13 | 1992-04-16 | Bayer Ag | Verfahren zur herstellung von polarisationsfolien |
| US6375871B1 (en) * | 1998-06-18 | 2002-04-23 | 3M Innovative Properties Company | Methods of manufacturing microfluidic articles |
| DE59705314D1 (de) | 1997-12-11 | 2001-12-06 | Thomas Abend | Verfahren zur Herstellung und Verwendung von lagerstabilen latentreaktiven Schichten oder Pulvern aus oberflächendesaktivierten festen Polyisocyanaten und Dispersionspolymeren mit funktionellen Gruppen |
| US6758094B2 (en) * | 2001-07-31 | 2004-07-06 | Koninklijke Philips Electronics, N.V. | Ultrasonic transducer wafer having variable acoustic impedance |
| US7382082B2 (en) * | 2002-08-14 | 2008-06-03 | Bhardwaj Mahesh C | Piezoelectric transducer with gas matrix |
| DE10238932B3 (de) * | 2002-08-24 | 2004-06-09 | Deutsches Zentrum für Luft- und Raumfahrt e.V. | Als Sensor und/oder Aktuator einsetzbares Bauteil |
| WO2006088708A2 (en) * | 2005-02-15 | 2006-08-24 | The Ultran Group, Inc. | Multi-layer gas matrix piezoelectric composite transducer |
| US7193350B1 (en) * | 2005-02-25 | 2007-03-20 | United States Of America As Represented By The Secretary Of The Navy | Electroactive polymer structure |
| DE102006004284A1 (de) * | 2006-01-31 | 2007-08-02 | Robert Bosch Gmbh | Piezoaktor und Verfahren zur Herstellung desselben |
| JP4903002B2 (ja) * | 2006-02-28 | 2012-03-21 | 株式会社潤工社 | 高分子物質の圧電・焦電素子 |
| US7755254B2 (en) * | 2006-12-04 | 2010-07-13 | Ngk Insulators, Ltd. | Honeycomb-type piezoelectric/electrostrictive element |
| US8006356B2 (en) * | 2006-12-07 | 2011-08-30 | Xerox Corporation | Method of forming an array of drop generators |
| DE102006058527A1 (de) | 2006-12-12 | 2008-06-19 | Bayer Materialscience Ag | Klebstoffe |
| DE102007031057A1 (de) * | 2007-07-04 | 2009-01-08 | Manroland Ag | Elektrete und deren Einsatz in Druckmaschinen |
| EP2339869A1 (de) * | 2009-11-12 | 2011-06-29 | Bayer MaterialScience AG | Ferroelektret-Zwei- und Mehrschichtverbund und Verfahren zu dessen Herstellung |
-
2009
- 2009-04-24 EP EP09005740A patent/EP2244489A1/de not_active Withdrawn
-
2010
- 2010-03-31 TW TW099109756A patent/TW201110434A/zh unknown
- 2010-04-10 US US13/258,646 patent/US8779650B2/en not_active Expired - Fee Related
- 2010-04-10 WO PCT/EP2010/002238 patent/WO2010121720A1/de not_active Ceased
- 2010-04-10 JP JP2012506369A patent/JP2012524986A/ja active Pending
- 2010-04-10 EP EP10713317A patent/EP2422530A1/de not_active Withdrawn
- 2010-04-10 KR KR1020117024863A patent/KR20120016611A/ko not_active Ceased
- 2010-04-10 CN CN201080018062.5A patent/CN102415106B/zh not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0634227A2 (en) * | 1993-07-15 | 1995-01-18 | General Electric Company | Broadband ultrasonic transducers and related method of manufacture |
| US6615465B2 (en) * | 1995-10-09 | 2003-09-09 | Matsushita Electric Industrial Co., Ltd. | Method for producing an acceleration sensor |
| US6013311A (en) * | 1998-06-08 | 2000-01-11 | Eastman Kodak Company | Using morphological changes to make piezoelectric transducers |
| WO2010022896A1 (de) * | 2008-08-30 | 2010-03-04 | Bayer Materialscience Ag | Elektromechanischer wandler |
Also Published As
| Publication number | Publication date |
|---|---|
| US20120068572A1 (en) | 2012-03-22 |
| US8779650B2 (en) | 2014-07-15 |
| JP2012524986A (ja) | 2012-10-18 |
| TW201110434A (en) | 2011-03-16 |
| KR20120016611A (ko) | 2012-02-24 |
| CN102415106A (zh) | 2012-04-11 |
| EP2422530A1 (de) | 2012-02-29 |
| WO2010121720A1 (de) | 2010-10-28 |
| EP2244489A1 (de) | 2010-10-27 |
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| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140924 Termination date: 20150410 |
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| EXPY | Termination of patent right or utility model |