JP2012516825A - バリスタセラミック、バリスタセラミックを含む多層構成要素、バリスタセラミックの製造方法 - Google Patents
バリスタセラミック、バリスタセラミックを含む多層構成要素、バリスタセラミックの製造方法 Download PDFInfo
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- 239000000919 ceramic Substances 0.000 title claims abstract description 33
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 229910052727 yttrium Inorganic materials 0.000 claims abstract description 9
- 229910052765 Lutetium Inorganic materials 0.000 claims abstract description 5
- 239000000463 material Substances 0.000 claims abstract description 5
- 229910052751 metal Inorganic materials 0.000 claims abstract description 5
- 239000002184 metal Substances 0.000 claims abstract description 5
- 229910052691 Erbium Inorganic materials 0.000 claims abstract description 3
- 229910052689 Holmium Inorganic materials 0.000 claims abstract description 3
- 229910052769 Ytterbium Inorganic materials 0.000 claims abstract description 3
- 238000000034 method Methods 0.000 claims description 10
- 238000005245 sintering Methods 0.000 claims description 7
- 229910010293 ceramic material Inorganic materials 0.000 claims description 5
- 239000011230 binding agent Substances 0.000 claims description 4
- 229910052791 calcium Inorganic materials 0.000 claims description 4
- 229910052804 chromium Inorganic materials 0.000 claims description 4
- 239000002002 slurry Substances 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 229910052796 boron Inorganic materials 0.000 claims description 3
- 238000010304 firing Methods 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 229910052783 alkali metal Inorganic materials 0.000 claims 1
- 150000001340 alkali metals Chemical class 0.000 claims 1
- 239000002245 particle Substances 0.000 description 9
- 239000011575 calcium Substances 0.000 description 7
- 239000011651 chromium Substances 0.000 description 7
- 230000004888 barrier function Effects 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 3
- 229910052777 Praseodymium Inorganic materials 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005261 decarburization Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 238000007873 sieving Methods 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052810 boron oxide Inorganic materials 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 229910000428 cobalt oxide Inorganic materials 0.000 description 1
- IVMYJDGYRUAWML-UHFFFAOYSA-N cobalt(ii) oxide Chemical compound [Co]=O IVMYJDGYRUAWML-UHFFFAOYSA-N 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- MMKQUGHLEMYQSG-UHFFFAOYSA-N oxygen(2-);praseodymium(3+) Chemical compound [O-2].[O-2].[O-2].[Pr+3].[Pr+3] MMKQUGHLEMYQSG-UHFFFAOYSA-N 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- PUDIUYLPXJFUGB-UHFFFAOYSA-N praseodymium atom Chemical compound [Pr] PUDIUYLPXJFUGB-UHFFFAOYSA-N 0.000 description 1
- 229910003447 praseodymium oxide Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000012430 stability testing Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- -1 yttrium compound Chemical class 0.000 description 1
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Abstract
Description
本発明の1つの実施形態は、次の材料:
− Znを主成分として、
− Prを0.1〜3原子%の割合で、
− Y,Ho,Er,Yb,Luから選択される金属Mを0.1〜5原子%の割合で、
含む、バリスタセラミックに関するものである。
1つの実施形態では、Coの割合は0.1〜10原子%の範囲内であり、Coは好ましくはCo2+として存在する。
C = ε0 εr A/d (1)
[式中、Cはキャパシタンス、ε0は真空の誘電率、εrは相対誘電率、Aは2つの電極間の面積、dは電極間の層の厚みである。]
によって表される。
C = εeff ε0[A/(z*d)] (2)
[式中、Cはキャパシタンス、ε0は真空の誘電率、zは電極間の粒子・粒子接触の数、Aは電極間の面積、dは粒子・粒子接触の障壁層厚である。]
によって記述される。
1つの実施形態では、カチオンが比較的小さなイオン半径を有している金属M(たとえばY3+、Lu3+)の酸化物または塩がバリスタセラミックに溶解しており、それにより、バリスタセラミックは粒子・粒子接触点ごとの低いキャパシタンスを有している。
これらの成分は、酸化され、溶解され、または固定された形態で、表1に掲げる比率で定量され(A1)、予備粉砕され(A2)、乾燥され(A3)、ふるいにかけられ(A4)、引き続いて400℃〜1000℃の間で焼成され(A5)、再粉砕され(A6)、噴霧乾燥され(A7)、ふるいにかけられる(A8)。
キャパシタンスは1Vおよび1kHzで測定される。
α1(10μA/1mA) = log(1*10−3/10*10−6)/log(V10mA/V10μA)
α2(1mA/1A) = log(1/1*10−3)/log(V1A/V1mA)
α3(1mA/20A) = log(20/1*10−3)/log(V20A/V1mA)
安定性試験は80%AVRの条件下で125℃で実施した。漏れ電流ILは、この条件のもとでは増加特性を有していないほうがよい。
アルカリカーボネート添加剤が回避される結果として、工業プロセスの過程で高い再現性を実現することができる。
2) バリスタセラミック材料
3) 外部終端
Claims (15)
- 次の材料:
Znを主成分として、
Prを0.1〜3原子%の割合で、
Y,Ho,Er,Yb,Luから選択される金属Mを0.1〜5原子%の割合で、
含む、バリスタセラミック。 - MがYまたはLuを表す、請求項1記載のバリスタセラミック。
- Coを0.1〜10原子%の割合で追加的に含む、先行請求項のいずれか1項に記載のバリスタセラミック。
- Caを0.001〜5原子%の割合で追加的に含む、先行請求項のいずれか1項に記載のバリスタセラミック。
- Siを0.001〜0.5原子%の割合で追加的に含む、先行請求項のいずれか1項に記載のバリスタセラミック。
- Alを0.001〜0.1原子%の割合で追加的に含む、先行請求項のいずれか1項に記載のバリスタセラミック。
- Crを0.001〜5原子%の割合で追加的に含む、先行請求項のいずれか1項に記載のバリスタセラミック。
- Bを0.001〜5原子%の割合で追加的に含む、先行請求項のいずれか1項に記載のバリスタセラミック。
- Znを主成分として、
Prを0.1〜3原子%の割合で、
Mを0.1〜5原子%の割合で、
Coを0.1〜10原子%の割合で、
Caを0.001〜5原子%の割合で、
Siを0.001〜0.5原子%の割合で、
Alを0.001〜0.1原子%の割合で、
Crを0.001〜5原子%の割合で、
Bを0.001〜5原子%の割合で、
含む、先行請求項のいずれか1項に記載のバリスタセラミック。 - 2000よりも低い相対誘電率εrを有する、先行請求項のいずれか1項に記載のバリスタセラミック。
- Mの添加によってバリスタ材料の相対誘電率が低減される、先行請求項のいずれか1項に記載のバリスタセラミック。
- 焼結温度が1000〜1300℃の間である、先行請求項のいずれか1項に記載のバリスタセラミック。
- アルカリ金属を有していない、先行請求項のいずれか1項に記載のバリスタセラミック。
- ESD防護のための設計形態を有する、請求項1〜13のいずれか1項に記載のバリスタセラミックを含む多層構成要素。
- 次の方法ステップ:
a)未加工セラミック材料の焼成、
b)スラリーの製造、
c)グリーンシートの作成、
d)グリーンシートのバインダ除去、
e)d)のグリーンシートの焼結、
を含む、請求項1〜13のいずれか1項に記載のバリスタセラミックの製造方法。
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JPH07320908A (ja) * | 1994-05-19 | 1995-12-08 | Tdk Corp | 酸化亜鉛系バリスタの製造方法および酸化亜鉛系バリスタ |
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