JP2012507716A5 - - Google Patents

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Publication number
JP2012507716A5
JP2012507716A5 JP2011534580A JP2011534580A JP2012507716A5 JP 2012507716 A5 JP2012507716 A5 JP 2012507716A5 JP 2011534580 A JP2011534580 A JP 2011534580A JP 2011534580 A JP2011534580 A JP 2011534580A JP 2012507716 A5 JP2012507716 A5 JP 2012507716A5
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JP
Japan
Prior art keywords
test mass
substrate
transducer
anchor system
rotation axis
Prior art date
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Application number
JP2011534580A
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English (en)
Japanese (ja)
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JP5627590B2 (ja
JP2012507716A (ja
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Priority claimed from US12/262,042 external-priority patent/US8020443B2/en
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Publication of JP2012507716A publication Critical patent/JP2012507716A/ja
Publication of JP2012507716A5 publication Critical patent/JP2012507716A5/ja
Application granted granted Critical
Publication of JP5627590B2 publication Critical patent/JP5627590B2/ja
Expired - Fee Related legal-status Critical Current
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JP2011534580A 2008-10-30 2009-10-05 相互直交方向で分離的検知を有するトランスデューサ Expired - Fee Related JP5627590B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/262,042 US8020443B2 (en) 2008-10-30 2008-10-30 Transducer with decoupled sensing in mutually orthogonal directions
US12/262,042 2008-10-30
PCT/US2009/059499 WO2010056435A2 (en) 2008-10-30 2009-10-05 Transducer with decoupled sensing in mutually orthogonal directions

Publications (3)

Publication Number Publication Date
JP2012507716A JP2012507716A (ja) 2012-03-29
JP2012507716A5 true JP2012507716A5 (enrdf_load_stackoverflow) 2012-11-15
JP5627590B2 JP5627590B2 (ja) 2014-11-19

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011534580A Expired - Fee Related JP5627590B2 (ja) 2008-10-30 2009-10-05 相互直交方向で分離的検知を有するトランスデューサ

Country Status (5)

Country Link
US (1) US8020443B2 (enrdf_load_stackoverflow)
JP (1) JP5627590B2 (enrdf_load_stackoverflow)
CN (1) CN102203001B (enrdf_load_stackoverflow)
TW (1) TWI494263B (enrdf_load_stackoverflow)
WO (1) WO2010056435A2 (enrdf_load_stackoverflow)

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