JP2012506152A - 渦電流利得の補償 - Google Patents
渦電流利得の補償 Download PDFInfo
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- JP2012506152A JP2012506152A JP2011532169A JP2011532169A JP2012506152A JP 2012506152 A JP2012506152 A JP 2012506152A JP 2011532169 A JP2011532169 A JP 2011532169A JP 2011532169 A JP2011532169 A JP 2011532169A JP 2012506152 A JP2012506152 A JP 2012506152A
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- 239000000758 substrate Substances 0.000 claims abstract description 80
- 239000002184 metal Substances 0.000 claims abstract description 51
- 229910052751 metal Inorganic materials 0.000 claims abstract description 51
- 238000012544 monitoring process Methods 0.000 claims abstract description 30
- 238000012545 processing Methods 0.000 claims abstract description 26
- 239000004065 semiconductor Substances 0.000 claims abstract description 10
- 238000011065 in-situ storage Methods 0.000 claims abstract description 8
- 238000005498 polishing Methods 0.000 claims description 84
- 238000000034 method Methods 0.000 claims description 35
- 239000000126 substance Substances 0.000 claims description 16
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- 230000003750 conditioning effect Effects 0.000 claims description 5
- 230000009471 action Effects 0.000 claims description 3
- 230000001143 conditioned effect Effects 0.000 claims 2
- 238000005259 measurement Methods 0.000 description 29
- 239000011162 core material Substances 0.000 description 19
- 230000008859 change Effects 0.000 description 16
- 230000008569 process Effects 0.000 description 10
- 239000002002 slurry Substances 0.000 description 9
- 230000000875 corresponding effect Effects 0.000 description 7
- 239000010408 film Substances 0.000 description 6
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000005070 sampling Methods 0.000 description 4
- 238000012886 linear function Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000007517 polishing process Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
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- 229910052710 silicon Inorganic materials 0.000 description 2
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Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/005—Control means for lapping machines or devices
- B24B37/013—Devices or means for detecting lapping completion
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/10—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving electrical means
- B24B49/105—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving electrical means using eddy currents
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
- G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
- G01B7/105—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring thickness of coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
Abstract
Description
DP=mDR+b 式(1a)
SP(n)=SR(n)−[R(n)−R(0)] 式(3)
Claims (15)
- 基板の処理中に原位置で監視する方法であって、
半導体処理装置内で、基板上の導電膜を処理すること、および
処理中に、渦電流センサからの信号を生成すること
を含み、前記信号が、前記渦電流センサが前記基板に隣接しているときに生成された第1の部分と、前記渦電流センサが金属ボディには隣接しているが、前記基板には隣接していないときに生成された第2の部分と、前記渦電流センサが前記金属ボディにも前記基板にも隣接していないときに生成された第3の部分とを含み、前記方法がさらに、
前記信号の前記第2の部分を前記信号の前記第3の部分と比較し、少なくとも前記比較の結果に基づいて利得を決定すること、および
前記信号の前記第1の部分に前記利得を乗じて、調整された信号を生成すること
を含む方法。 - 前記渦電流センサを用いて前記基板および前記金属ボディを横切る複数のスイープを実施して、複数の信号を生成することをさらに含み、前記複数の信号のそれぞれの信号が、前記第1の部分、第2の部分および第3の部分を含む、請求項1に記載の方法。
- 前記複数のスイープのそれぞれのスイープで、前記比較および前記乗算を実行して、調整された複数の信号を生成することをさらに含む、請求項2に記載の方法。
- 前記基板処理装置が、回転可能なプラテン上に位置する研磨パッドを含む化学機械研磨器を含み、前記渦電流センサが前記プラテン内に位置し、前記プラテンが1回転するごとに1回、前記基板をスイープする、請求項1に記載の方法。
- 前記金属ボディが前記研磨パッド上にある、請求項4に記載の方法。
- 止め輪を有するキャリアヘッドによって前記研磨パッド上に前記基板を保持することをさらに含み、前記金属ボディが前記止め輪の一部分を構成する、請求項4に記載の方法。
- 前記金属ボディが、前記研磨パッドの状態を調節する状態調節ディスクの一部分を構成する、請求項4に記載の方法。
- 前記信号の前記第2の部分から第1の基準値を生成し、前記信号の前記第3の部分から第2の基準値を生成することをさらに含む、請求項1に記載の方法。
- 前記信号が位相差信号である、請求項1に記載の方法。
- コンピュータ可読媒体上に有形的にコード化され、データ処理装置に動作を実行させるように動作可能なコンピュータプログラム製品であって、前記動作が、
半導体処理装置内で基板上の導電膜を処理している間に、渦電流センサから信号を受け取ること
を含み、前記信号が、前記渦電流センサが前記基板に隣接しているときに生成された第1の部分と、前記渦電流センサが金属ボディには隣接しているが、前記基板には隣接していないときに生成された第2の部分と、前記渦電流センサが前記金属ボディにも前記基板にも隣接していないときに生成された第3の部分とを含み、前記動作がさらに、
前記信号の前記第2の部分を前記信号の前記第3の部分と比較し、少なくとも前記比較の結果に基づいて利得を決定すること、および
前記信号の前記第1の部分に前記利得を乗じて、調整された信号を生成すること
を含むコンピュータプログラム製品。 - 信号を受け取ることが、前記渦電流センサを用いた前記基板および前記金属ボディを横切る複数のスイープからの複数の信号を受け取ることを含み、前記複数の信号のそれぞれの信号が、前記第1の部分、第2の部分および第3の部分を含む、請求項11に記載のコンピュータプログラム製品。
- 前記データ処理装置に動作を実行させるように動作可能であり、さらに、前記複数のスイープのそれぞれのスイープで、前記比較および前記乗算を実行して、調整された複数の信号を生成することを含む、請求項12に記載のコンピュータプログラム製品。
- 前記データ処理装置に動作を実行させるように動作可能であることが、前記信号の前記第2の部分から第1の基準値を生成し、前記信号の前記第3の部分から第2の基準値を生成することをさらに含む、請求項11に記載のコンピュータプログラム製品。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10612708P | 2008-10-16 | 2008-10-16 | |
US61/106,127 | 2008-10-16 | ||
PCT/US2009/060397 WO2010045162A2 (en) | 2008-10-16 | 2009-10-12 | Eddy current gain compensation |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012506152A true JP2012506152A (ja) | 2012-03-08 |
JP5611214B2 JP5611214B2 (ja) | 2014-10-22 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011532169A Active JP5611214B2 (ja) | 2008-10-16 | 2009-10-12 | 渦電流利得の補償 |
Country Status (4)
Country | Link |
---|---|
US (1) | US8408965B2 (ja) |
JP (1) | JP5611214B2 (ja) |
KR (1) | KR101482064B1 (ja) |
WO (1) | WO2010045162A2 (ja) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013036881A (ja) * | 2011-08-09 | 2013-02-21 | Ebara Corp | 研磨監視方法および研磨装置 |
KR101655075B1 (ko) * | 2015-08-21 | 2016-09-07 | 주식회사 케이씨텍 | 화학 기계적 연마 장치 |
JP2019530236A (ja) * | 2016-09-21 | 2019-10-17 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | フィルタリングのための補償を用いた終点検出 |
JP2020505759A (ja) * | 2017-01-13 | 2020-02-20 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | インシトゥ監視からの測定値の、抵抗率に基づく調整 |
CN111604809A (zh) * | 2019-02-22 | 2020-09-01 | 株式会社荏原制作所 | 基板研磨系统及方法和基板研磨装置 |
KR20200128757A (ko) * | 2018-04-03 | 2020-11-16 | 어플라이드 머티어리얼스, 인코포레이티드 | 패드 두께에 대한 기계 학습 및 보상을 사용하는 연마 장치 |
US11780047B2 (en) | 2020-06-24 | 2023-10-10 | Applied Materials, Inc. | Determination of substrate layer thickness with polishing pad wear compensation |
Families Citing this family (24)
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US8367429B2 (en) * | 2011-03-10 | 2013-02-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | Adaptive endpoint method for pad life effect on chemical mechanical polishing |
US9067295B2 (en) | 2012-07-25 | 2015-06-30 | Applied Materials, Inc. | Monitoring retaining ring thickness and pressure control |
US9108293B2 (en) * | 2012-07-30 | 2015-08-18 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Method for chemical mechanical polishing layer pretexturing |
US8998676B2 (en) | 2012-10-26 | 2015-04-07 | Applied Materials, Inc. | Retaining ring with selected stiffness and thickness |
US9275917B2 (en) | 2013-10-29 | 2016-03-01 | Applied Materials, Inc. | Determination of gain for eddy current sensor |
CN105659363B (zh) * | 2013-10-29 | 2019-05-03 | 应用材料公司 | 涡电流传感器增益的确定 |
US9281253B2 (en) | 2013-10-29 | 2016-03-08 | Applied Materials, Inc. | Determination of gain for eddy current sensor |
US9636797B2 (en) | 2014-02-12 | 2017-05-02 | Applied Materials, Inc. | Adjusting eddy current measurements |
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US9911664B2 (en) * | 2014-06-23 | 2018-03-06 | Applied Materials, Inc. | Substrate features for inductive monitoring of conductive trench depth |
US9754846B2 (en) | 2014-06-23 | 2017-09-05 | Applied Materials, Inc. | Inductive monitoring of conductive trench depth |
US20160121452A1 (en) * | 2014-10-31 | 2016-05-05 | Ebara Corporation | Polishing apparatus and polishing method |
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KR102412776B1 (ko) * | 2015-10-27 | 2022-06-24 | 주식회사 케이씨텍 | 웨이퍼 가장자리에서의 연마층 두께 검출 정확성이 향상된 화학 기계적 연마 장치 |
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KR20110084947A (ko) | 2011-07-26 |
WO2010045162A2 (en) | 2010-04-22 |
WO2010045162A3 (en) | 2010-07-15 |
US20100099334A1 (en) | 2010-04-22 |
US8408965B2 (en) | 2013-04-02 |
KR101482064B1 (ko) | 2015-01-13 |
JP5611214B2 (ja) | 2014-10-22 |
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