JP2012501421A5 - - Google Patents

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Publication number
JP2012501421A5
JP2012501421A5 JP2011525103A JP2011525103A JP2012501421A5 JP 2012501421 A5 JP2012501421 A5 JP 2012501421A5 JP 2011525103 A JP2011525103 A JP 2011525103A JP 2011525103 A JP2011525103 A JP 2011525103A JP 2012501421 A5 JP2012501421 A5 JP 2012501421A5
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JP
Japan
Prior art keywords
slit valve
valve door
wall
rings
distance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011525103A
Other languages
English (en)
Japanese (ja)
Other versions
JP5543463B2 (ja
JP2012501421A (ja
Filing date
Publication date
Priority claimed from US12/538,237 external-priority patent/US8297591B2/en
Application filed filed Critical
Publication of JP2012501421A publication Critical patent/JP2012501421A/ja
Publication of JP2012501421A5 publication Critical patent/JP2012501421A5/ja
Application granted granted Critical
Publication of JP5543463B2 publication Critical patent/JP5543463B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2011525103A 2008-08-29 2009-08-20 スリットバルブ制御 Expired - Fee Related JP5543463B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US9328808P 2008-08-29 2008-08-29
US61/093,288 2008-08-29
US12/538,237 US8297591B2 (en) 2008-08-29 2009-08-10 Slit valve control
US12/538,237 2009-08-10
PCT/US2009/054469 WO2010025081A2 (en) 2008-08-29 2009-08-20 Slit valve control

Publications (3)

Publication Number Publication Date
JP2012501421A JP2012501421A (ja) 2012-01-19
JP2012501421A5 true JP2012501421A5 (https=) 2013-06-27
JP5543463B2 JP5543463B2 (ja) 2014-07-09

Family

ID=41722235

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011525103A Expired - Fee Related JP5543463B2 (ja) 2008-08-29 2009-08-20 スリットバルブ制御

Country Status (6)

Country Link
US (1) US8297591B2 (https=)
JP (1) JP5543463B2 (https=)
KR (1) KR101364010B1 (https=)
CN (1) CN102138199B (https=)
TW (1) TWI435016B (https=)
WO (1) WO2010025081A2 (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120042828A1 (en) * 2010-08-17 2012-02-23 Primestar Solar, Inc. Slit valve for vacuum chamber module
JP5044725B1 (ja) * 2012-04-27 2012-10-10 株式会社ブイテックス シール材のつぶし量が制御可能なゲートバルブ
TWI484531B (zh) * 2012-05-31 2015-05-11 Archers Inc 閥門總成以及閥門
EP2876341B1 (de) * 2013-11-21 2015-10-21 VAT Holding AG Verfahren zum Betrieb eines Ventils
USD796562S1 (en) 2016-04-11 2017-09-05 Applied Materials, Inc. Plasma outlet liner
KR101840940B1 (ko) 2016-09-12 2018-03-21 에스케이실트론 주식회사 고온 상압 기상성장장치에 마련되는 챔버 간의 개폐 장치
US10224224B2 (en) * 2017-03-10 2019-03-05 Micromaterials, LLC High pressure wafer processing systems and related methods
JP6405067B1 (ja) * 2018-04-13 2018-10-17 株式会社ブイテックス ゲートバルブの制御方法
US20230002906A1 (en) * 2021-07-01 2023-01-05 Mellanox Technologies, Ltd. Continuous-feed chemical vapor deposition system

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4747577A (en) * 1986-07-23 1988-05-31 The Boc Group, Inc. Gate valve with magnetic closure for use with vacuum equipment
CH675286A5 (https=) * 1988-02-04 1990-09-14 Sulzer Ag
US5975492A (en) * 1997-07-14 1999-11-02 Brenes; Arthur Bellows driver slot valve
JPH11182699A (ja) * 1997-12-22 1999-07-06 Toshiba Corp ゲートバルブ
US6079693A (en) 1998-05-20 2000-06-27 Applied Komatsu Technology, Inc. Isolation valves
US6347918B1 (en) 1999-01-27 2002-02-19 Applied Materials, Inc. Inflatable slit/gate valve
JP4092028B2 (ja) * 1999-02-08 2008-05-28 新明和工業株式会社 真空ゲート弁
JP2001021048A (ja) * 1999-06-29 2001-01-26 Varian Inc ランプアクチュエータ機構を有するゲートバルブ
JP3425938B2 (ja) * 2000-12-14 2003-07-14 入江工研株式会社 ゲート弁
US6854708B2 (en) * 2002-07-22 2005-02-15 Mdc Vacuum Products Corporation High-vacuum valve with retractable valve plate to eliminate abrasion
KR100914087B1 (ko) * 2003-05-13 2009-08-27 어플라이드 머티어리얼스, 인코포레이티드 처리 챔버의 개구를 밀봉하기 위한 방법 및 장치
US7841582B2 (en) 2004-06-02 2010-11-30 Applied Materials, Inc. Variable seal pressure slit valve doors for semiconductor manufacturing equipment
US7422653B2 (en) 2004-07-13 2008-09-09 Applied Materials, Inc. Single-sided inflatable vertical slit valve
US7494107B2 (en) * 2005-03-30 2009-02-24 Supercritical Systems, Inc. Gate valve for plus-atmospheric pressure semiconductor process vessels
US7469715B2 (en) 2005-07-01 2008-12-30 Applied Materials, Inc. Chamber isolation valve RF grounding

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