TWI435016B - 狹縫閥門之控制 - Google Patents

狹縫閥門之控制 Download PDF

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Publication number
TWI435016B
TWI435016B TW98129085A TW98129085A TWI435016B TW I435016 B TWI435016 B TW I435016B TW 98129085 A TW98129085 A TW 98129085A TW 98129085 A TW98129085 A TW 98129085A TW I435016 B TWI435016 B TW I435016B
Authority
TW
Taiwan
Prior art keywords
slit valve
opening
slit
walls
chamber
Prior art date
Application number
TW98129085A
Other languages
English (en)
Chinese (zh)
Other versions
TW201026981A (en
Inventor
松本隆之
栗田真一
Original Assignee
應用材料股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 應用材料股份有限公司 filed Critical 應用材料股份有限公司
Publication of TW201026981A publication Critical patent/TW201026981A/zh
Application granted granted Critical
Publication of TWI435016B publication Critical patent/TWI435016B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/188—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of hydraulic forces
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3406—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door or cover
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0391—Affecting flow by the addition of material or energy

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
TW98129085A 2008-08-29 2009-08-28 狹縫閥門之控制 TWI435016B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US9328808P 2008-08-29 2008-08-29
US12/538,237 US8297591B2 (en) 2008-08-29 2009-08-10 Slit valve control

Publications (2)

Publication Number Publication Date
TW201026981A TW201026981A (en) 2010-07-16
TWI435016B true TWI435016B (zh) 2014-04-21

Family

ID=41722235

Family Applications (1)

Application Number Title Priority Date Filing Date
TW98129085A TWI435016B (zh) 2008-08-29 2009-08-28 狹縫閥門之控制

Country Status (6)

Country Link
US (1) US8297591B2 (https=)
JP (1) JP5543463B2 (https=)
KR (1) KR101364010B1 (https=)
CN (1) CN102138199B (https=)
TW (1) TWI435016B (https=)
WO (1) WO2010025081A2 (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120042828A1 (en) * 2010-08-17 2012-02-23 Primestar Solar, Inc. Slit valve for vacuum chamber module
JP5044725B1 (ja) * 2012-04-27 2012-10-10 株式会社ブイテックス シール材のつぶし量が制御可能なゲートバルブ
TWI484531B (zh) * 2012-05-31 2015-05-11 Archers Inc 閥門總成以及閥門
EP2876341B1 (de) * 2013-11-21 2015-10-21 VAT Holding AG Verfahren zum Betrieb eines Ventils
USD796562S1 (en) 2016-04-11 2017-09-05 Applied Materials, Inc. Plasma outlet liner
KR101840940B1 (ko) 2016-09-12 2018-03-21 에스케이실트론 주식회사 고온 상압 기상성장장치에 마련되는 챔버 간의 개폐 장치
US10224224B2 (en) * 2017-03-10 2019-03-05 Micromaterials, LLC High pressure wafer processing systems and related methods
JP6405067B1 (ja) * 2018-04-13 2018-10-17 株式会社ブイテックス ゲートバルブの制御方法
US20230002906A1 (en) * 2021-07-01 2023-01-05 Mellanox Technologies, Ltd. Continuous-feed chemical vapor deposition system

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4747577A (en) * 1986-07-23 1988-05-31 The Boc Group, Inc. Gate valve with magnetic closure for use with vacuum equipment
CH675286A5 (https=) * 1988-02-04 1990-09-14 Sulzer Ag
US5975492A (en) * 1997-07-14 1999-11-02 Brenes; Arthur Bellows driver slot valve
JPH11182699A (ja) * 1997-12-22 1999-07-06 Toshiba Corp ゲートバルブ
US6079693A (en) 1998-05-20 2000-06-27 Applied Komatsu Technology, Inc. Isolation valves
US6347918B1 (en) 1999-01-27 2002-02-19 Applied Materials, Inc. Inflatable slit/gate valve
JP4092028B2 (ja) * 1999-02-08 2008-05-28 新明和工業株式会社 真空ゲート弁
JP2001021048A (ja) * 1999-06-29 2001-01-26 Varian Inc ランプアクチュエータ機構を有するゲートバルブ
JP3425938B2 (ja) * 2000-12-14 2003-07-14 入江工研株式会社 ゲート弁
US6854708B2 (en) * 2002-07-22 2005-02-15 Mdc Vacuum Products Corporation High-vacuum valve with retractable valve plate to eliminate abrasion
KR100914087B1 (ko) * 2003-05-13 2009-08-27 어플라이드 머티어리얼스, 인코포레이티드 처리 챔버의 개구를 밀봉하기 위한 방법 및 장치
US7841582B2 (en) 2004-06-02 2010-11-30 Applied Materials, Inc. Variable seal pressure slit valve doors for semiconductor manufacturing equipment
US7422653B2 (en) 2004-07-13 2008-09-09 Applied Materials, Inc. Single-sided inflatable vertical slit valve
US7494107B2 (en) * 2005-03-30 2009-02-24 Supercritical Systems, Inc. Gate valve for plus-atmospheric pressure semiconductor process vessels
US7469715B2 (en) 2005-07-01 2008-12-30 Applied Materials, Inc. Chamber isolation valve RF grounding

Also Published As

Publication number Publication date
JP5543463B2 (ja) 2014-07-09
US8297591B2 (en) 2012-10-30
JP2012501421A (ja) 2012-01-19
KR20110063794A (ko) 2011-06-14
KR101364010B1 (ko) 2014-02-17
WO2010025081A3 (en) 2010-05-06
CN102138199A (zh) 2011-07-27
WO2010025081A2 (en) 2010-03-04
US20100051111A1 (en) 2010-03-04
TW201026981A (en) 2010-07-16
CN102138199B (zh) 2013-11-27

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MM4A Annulment or lapse of patent due to non-payment of fees