JP2012221942A5 - - Google Patents

Download PDF

Info

Publication number
JP2012221942A5
JP2012221942A5 JP2011183390A JP2011183390A JP2012221942A5 JP 2012221942 A5 JP2012221942 A5 JP 2012221942A5 JP 2011183390 A JP2011183390 A JP 2011183390A JP 2011183390 A JP2011183390 A JP 2011183390A JP 2012221942 A5 JP2012221942 A5 JP 2012221942A5
Authority
JP
Japan
Prior art keywords
particle beam
charged particle
secondary charged
particles
group
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011183390A
Other languages
English (en)
Japanese (ja)
Other versions
JP2012221942A (ja
JP5791028B2 (ja
Filing date
Publication date
Priority claimed from EP11162291.6A external-priority patent/EP2511939B1/en
Application filed filed Critical
Publication of JP2012221942A publication Critical patent/JP2012221942A/ja
Publication of JP2012221942A5 publication Critical patent/JP2012221942A5/ja
Application granted granted Critical
Publication of JP5791028B2 publication Critical patent/JP5791028B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2011183390A 2011-04-13 2011-08-25 試料を検査する荷電粒子ビーム装置のコントラストを向上させる装置及び方法 Expired - Fee Related JP5791028B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP11162291.6A EP2511939B1 (en) 2011-04-13 2011-04-13 Arrangement and method for the contrast improvement in a charged particle beam device for inspecting a specimen
EP11162291.6 2011-04-13

Publications (3)

Publication Number Publication Date
JP2012221942A JP2012221942A (ja) 2012-11-12
JP2012221942A5 true JP2012221942A5 (https=) 2014-10-09
JP5791028B2 JP5791028B2 (ja) 2015-10-07

Family

ID=44533263

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011183390A Expired - Fee Related JP5791028B2 (ja) 2011-04-13 2011-08-25 試料を検査する荷電粒子ビーム装置のコントラストを向上させる装置及び方法

Country Status (4)

Country Link
US (1) US8530837B2 (https=)
EP (1) EP2511939B1 (https=)
JP (1) JP5791028B2 (https=)
TW (1) TWI488212B (https=)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2879155B1 (en) * 2013-12-02 2018-04-25 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Multi-beam system for high throughput EBI
JP6258474B2 (ja) * 2014-04-28 2018-01-10 株式会社日立ハイテクノロジーズ 電子線装置
US10410828B2 (en) 2014-12-22 2019-09-10 Carl Zeiss Microscopy, Llc Charged particle beam system and methods
MX2017010072A (es) * 2015-02-05 2017-11-09 Molecular Templates Inc Moleculas multivalentes que se enlazan a cd20, las cuales comprenden regiones efectoras de la subunidad a de la toxina shiga, y composiciones enriquecidas de las mismas.
JP2017135218A (ja) * 2016-01-26 2017-08-03 株式会社アドバンテスト 荷電粒子ビームレンズ装置、荷電粒子ビームカラム、および荷電粒子ビーム露光装置
JP6967340B2 (ja) * 2016-09-13 2021-11-17 株式会社日立ハイテクサイエンス 複合ビーム装置
CN107240540A (zh) * 2017-06-22 2017-10-10 聚束科技（北京）有限公司 一种观察非导电或导电不均匀样品的方法和sem
CZ309855B6 (cs) * 2017-09-20 2023-12-20 Tescan Group, A.S. Zařízení s iontovým tubusem a rastrovacím elektronovým mikroskopem
DE102019203579A1 (de) * 2019-03-15 2020-09-17 Carl Zeiss Microscopy Gmbh Verfahren zum Betrieb eines Teilchenstrahlgeräts sowie Teilchenstrahlgerät zur Durchführung des Verfahrens
JP7199290B2 (ja) * 2019-04-08 2023-01-05 株式会社日立ハイテク パターン断面形状推定システム、およびプログラム
DE102019004124B4 (de) * 2019-06-13 2024-03-21 Carl Zeiss Multisem Gmbh Teilchenstrahl-System zur azimutalen Ablenkung von Einzel-Teilchenstrahlen sowie seine Verwendung und Verfahren zur Azimut-Korrektur bei einem Teilchenstrahl-System
CN115428116A (zh) 2020-04-10 2022-12-02 Asml荷兰有限公司 具有多个检测器的带电粒子束装置和成像方法
CN113035675A (zh) * 2021-02-26 2021-06-25 中国科学院生物物理研究所 带电粒子束设备
US20240128051A1 (en) * 2022-10-14 2024-04-18 Carl Zeiss Multisem Gmbh Multi-beam charged particle beam system with anisotropic filtering for improved image contrast

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60189855A (ja) * 1984-03-12 1985-09-27 Hitachi Ltd ２次電子検出器
US5644132A (en) 1994-06-20 1997-07-01 Opan Technologies Ltd. System for high resolution imaging and measurement of topographic and material features on a specimen
WO1999050446A1 (de) 1998-04-01 1999-10-07 Wolfrum Juergen Verfahren und vorrichtung zur quantifizierung von dna und rna
DE19828476A1 (de) 1998-06-26 1999-12-30 Leo Elektronenmikroskopie Gmbh Teilchenstrahlgerät
EP1296351A4 (en) * 2000-06-27 2009-09-23 Ebara Corp INVESTIGATION DEVICE FOR LOADED PARTICLE RAYS AND METHOD FOR PRODUCING A COMPONENT ELEVATED WITH THIS INSPECTION DEVICE
JP2003331770A (ja) * 2002-05-15 2003-11-21 Seiko Instruments Inc 電子線装置
US7138629B2 (en) * 2003-04-22 2006-11-21 Ebara Corporation Testing apparatus using charged particles and device manufacturing method using the testing apparatus
EP1703537B9 (en) 2005-03-17 2008-10-22 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Analysing system and charged particle beam device
EP2219204B1 (en) * 2009-02-12 2012-03-21 ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Arrangement and method for the contrast improvement in a charged particle beam device for inspecting a specimen

Similar Documents

Publication Publication Date Title
JP2012221942A5 (https=)
JP2018509741A5 (https=)
JP5791028B2 (ja) 試料を検査する荷電粒子ビーム装置のコントラストを向上させる装置及び方法
TWI737197B (zh) 藉由初級帶電粒子束的撞擊對從樣品發出的次級帶電粒子束成像的方法、系統、及裝置
EP2854153A3 (en) Multi-beam particle optical system for inspecting an object in transmission
JP2019536250A5 (https=)
JP2015023032A5 (https=)
CN103681204B (zh) 电感耦合等离子体质谱离子传输系统
JP2012243803A5 (https=)
JP2009530761A5 (https=)
JP2011238612A5 (https=)
JP2017199606A5 (https=)
GB2470600B (en) Charged particle analysers and methods of separating charged particles
GB2547120A (en) A multi-reflecting time-of-flight analyzer
JP2020074329A (ja) 電子ビーム画像化装置及び方法
WO2010001254A3 (en) Method and apparatus for sorting cells
EP2680295A3 (en) On-axis detector for charged particle beam system
JP2009252854A5 (https=)
JP4813063B2 (ja) 電子ビーム検査および欠陥の精査のための改善されたプリズムアレイ
JP2012014170A5 (https=)
WO2012012548A3 (en) Methods, devices, and systems for manipulating charged particle streams
WO2006018840A3 (en) Electron microscope array for inspection and lithography
WO2015080978A1 (en) Asymmetric electrostatic quadrupole deflector for improved field uniformity
JP2012253093A5 (https=)
JP2015179629A5 (https=)